FR2783048B1 - Procede de fixation d'un capteur micromecanique dans un boitier et agencement de capteur en resultant - Google Patents

Procede de fixation d'un capteur micromecanique dans un boitier et agencement de capteur en resultant

Info

Publication number
FR2783048B1
FR2783048B1 FR9910868A FR9910868A FR2783048B1 FR 2783048 B1 FR2783048 B1 FR 2783048B1 FR 9910868 A FR9910868 A FR 9910868A FR 9910868 A FR9910868 A FR 9910868A FR 2783048 B1 FR2783048 B1 FR 2783048B1
Authority
FR
France
Prior art keywords
sensor
housing
fixing
arrangement
therefrom
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9910868A
Other languages
English (en)
Other versions
FR2783048A1 (fr
Inventor
Andreas Wildgen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of FR2783048A1 publication Critical patent/FR2783048A1/fr
Application granted granted Critical
Publication of FR2783048B1 publication Critical patent/FR2783048B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007—Fluidic connecting means
    • G01L19/0038—Fluidic connecting means being part of the housing

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Pressure Sensors (AREA)
FR9910868A 1998-09-07 1999-08-27 Procede de fixation d'un capteur micromecanique dans un boitier et agencement de capteur en resultant Expired - Fee Related FR2783048B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19840829A DE19840829B4 (de) 1998-09-07 1998-09-07 Verfahren zum Befestigen eines mikromechanischen Sensors in einem Gehäuse und Sensoranordnung

Publications (2)

Publication Number Publication Date
FR2783048A1 FR2783048A1 (fr) 2000-03-10
FR2783048B1 true FR2783048B1 (fr) 2003-02-21

Family

ID=7880118

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9910868A Expired - Fee Related FR2783048B1 (fr) 1998-09-07 1999-08-27 Procede de fixation d'un capteur micromecanique dans un boitier et agencement de capteur en resultant

Country Status (3)

Country Link
US (1) US6350630B1 (fr)
DE (1) DE19840829B4 (fr)
FR (1) FR2783048B1 (fr)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10036474A1 (de) * 2000-07-25 2002-02-14 A B Elektronik Gmbh Drucksensor
WO2002040956A1 (fr) * 2000-11-15 2002-05-23 K.K. Holding Ag Capteur de pression et de force presentant une puce a resonateur, des parties mecaniquement separees (fentes) et une membrane souple
JP2003077939A (ja) * 2001-09-05 2003-03-14 Mitsubishi Electric Corp 半導体装置およびその製造方法
JP2003086610A (ja) * 2001-09-10 2003-03-20 Mitsubishi Electric Corp 樹脂封止半導体装置およびその製造方法
DE10206464A1 (de) * 2002-02-16 2003-08-28 Micronas Gmbh Verfahren zur Herstellung einer Sensor- oder Aktuatoranordnung sowie Sensor- oder Aktuatoranordnung
US7055392B2 (en) * 2003-07-04 2006-06-06 Robert Bosch Gmbh Micromechanical pressure sensor
US7866964B2 (en) * 2005-05-20 2011-01-11 Emerson Climate Technologies, Inc. Sensor for hermetic machine
US8262372B2 (en) * 2007-05-10 2012-09-11 Emerson Climate Technologies, Inc. Compressor hermetic terminal
US8939734B2 (en) * 2007-08-28 2015-01-27 Emerson Climate Technologies, Inc. Molded plug for a compressor
US8939735B2 (en) * 2009-03-27 2015-01-27 Emerson Climate Technologies, Inc. Compressor plug assembly
US8322225B2 (en) * 2009-07-10 2012-12-04 Honeywell International Inc. Sensor package assembly having an unconstrained sense die
US8245575B2 (en) * 2009-12-08 2012-08-21 Jen-Huang Albert Chiou Pressure sensor device with breakwater to reduce protective gel vibration
US8230743B2 (en) 2010-08-23 2012-07-31 Honeywell International Inc. Pressure sensor
US9046426B1 (en) * 2012-06-15 2015-06-02 The United States Of America As Represented By The Administrator Of National Aeronautics And Space Administration Modular apparatus and method for attaching multiple devices
US9480177B2 (en) 2012-07-27 2016-10-25 Emerson Climate Technologies, Inc. Compressor protection module
FR3000205B1 (fr) * 2012-12-21 2015-07-31 Michelin & Cie Capteur de pression perfectionne a boitier etanche
DE102017202023B4 (de) * 2017-02-09 2020-09-03 Robert Bosch Gmbh Mikromechanische Sensorvorrichtung mit integrierter Gehäusedichtung, mikromechanische Sensoranordnung und entspechendes Herstellungsverfahren

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4655088A (en) * 1985-10-07 1987-04-07 Motorola, Inc. Unibody pressure transducer package
US4993265A (en) * 1988-03-03 1991-02-19 The Foxboro Company Protected pressure sensor and method of making
DE68918584T2 (de) * 1988-03-03 1995-01-26 Foxboro Co Geschützter drucksensor.
US4866989A (en) * 1988-11-07 1989-09-19 Chrysler Motors Corporation Pressure transducer with a sealed sensor
US4928376A (en) * 1989-07-31 1990-05-29 Motorola Inc. Method for filling a cavity, such as a sensor cavity, with an incompressible fluid
DE59202616D1 (de) * 1991-12-24 1995-07-27 Landis & Gry Tech Innovat Ag Drucksensor mit einer Membran aus Halbleitermaterial.
JP3092307B2 (ja) * 1992-04-16 2000-09-25 富士電機株式会社 半導体圧力センサ
US5948991A (en) * 1996-12-09 1999-09-07 Denso Corporation Semiconductor physical quantity sensor device having semiconductor sensor chip integrated with semiconductor circuit chip
DE19703206C2 (de) * 1997-01-29 2002-01-24 Infineon Technologies Ag Drucksensor-Bauteil mit Schlauchanschluß
JPH10332505A (ja) * 1997-05-30 1998-12-18 Matsushita Electric Works Ltd 半導体圧力センサ
JPH1197656A (ja) * 1997-09-22 1999-04-09 Fuji Electric Co Ltd 半導体光センサデバイス

Also Published As

Publication number Publication date
US6350630B1 (en) 2002-02-26
DE19840829A1 (de) 2000-03-23
FR2783048A1 (fr) 2000-03-10
DE19840829B4 (de) 2005-10-20

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Legal Events

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ST Notification of lapse

Effective date: 20100430