FR2778458B1 - Dispositif optique de mesure interferometrique d'un deplacement relatif entre deux elements dont l'un au moins est mobile relativement a l'autre - Google Patents

Dispositif optique de mesure interferometrique d'un deplacement relatif entre deux elements dont l'un au moins est mobile relativement a l'autre

Info

Publication number
FR2778458B1
FR2778458B1 FR9805729A FR9805729A FR2778458B1 FR 2778458 B1 FR2778458 B1 FR 2778458B1 FR 9805729 A FR9805729 A FR 9805729A FR 9805729 A FR9805729 A FR 9805729A FR 2778458 B1 FR2778458 B1 FR 2778458B1
Authority
FR
France
Prior art keywords
relative
elements
optical device
interferometric measurement
relative movement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9805729A
Other languages
English (en)
Other versions
FR2778458A1 (fr
Inventor
Evgeni Popov
Michel Neviere
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Original Assignee
Centre National de la Recherche Scientifique CNRS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS filed Critical Centre National de la Recherche Scientifique CNRS
Priority to FR9805729A priority Critical patent/FR2778458B1/fr
Publication of FR2778458A1 publication Critical patent/FR2778458A1/fr
Application granted granted Critical
Publication of FR2778458B1 publication Critical patent/FR2778458B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
FR9805729A 1998-05-06 1998-05-06 Dispositif optique de mesure interferometrique d'un deplacement relatif entre deux elements dont l'un au moins est mobile relativement a l'autre Expired - Fee Related FR2778458B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR9805729A FR2778458B1 (fr) 1998-05-06 1998-05-06 Dispositif optique de mesure interferometrique d'un deplacement relatif entre deux elements dont l'un au moins est mobile relativement a l'autre

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9805729A FR2778458B1 (fr) 1998-05-06 1998-05-06 Dispositif optique de mesure interferometrique d'un deplacement relatif entre deux elements dont l'un au moins est mobile relativement a l'autre

Publications (2)

Publication Number Publication Date
FR2778458A1 FR2778458A1 (fr) 1999-11-12
FR2778458B1 true FR2778458B1 (fr) 2001-12-28

Family

ID=9526085

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9805729A Expired - Fee Related FR2778458B1 (fr) 1998-05-06 1998-05-06 Dispositif optique de mesure interferometrique d'un deplacement relatif entre deux elements dont l'un au moins est mobile relativement a l'autre

Country Status (1)

Country Link
FR (1) FR2778458B1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117367291B (zh) * 2023-12-08 2024-02-13 中国科学院长春光学精密机械与物理研究所 基于双光栅的双向Littrow二自由度光栅干涉测量装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1353470A (en) * 1970-10-19 1974-05-15 Post D Position measuring apparatus utilizing moire fringe multiplication
DE3810165C1 (fr) * 1988-03-25 1989-07-27 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut, De
EP0741282A3 (fr) * 1995-05-04 1998-06-17 CSEM Centre Suisse d'Electronique et de Microtechnique S.A. - Recherche et Développement Dispositif optique de mesure d'un déplacement relatif entre deux éléments

Also Published As

Publication number Publication date
FR2778458A1 (fr) 1999-11-12

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Effective date: 20070131