FR2750494B1 - Capteurs capacitifs a hautes performances comportant au moins une electrode non metallique et procede de fabrication de tels capteurs - Google Patents

Capteurs capacitifs a hautes performances comportant au moins une electrode non metallique et procede de fabrication de tels capteurs

Info

Publication number
FR2750494B1
FR2750494B1 FR9608168A FR9608168A FR2750494B1 FR 2750494 B1 FR2750494 B1 FR 2750494B1 FR 9608168 A FR9608168 A FR 9608168A FR 9608168 A FR9608168 A FR 9608168A FR 2750494 B1 FR2750494 B1 FR 2750494B1
Authority
FR
France
Prior art keywords
sensors
manufacturing
high performance
metallic electrode
performance capacitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR9608168A
Other languages
English (en)
Other versions
FR2750494A1 (fr
Inventor
Jean Desarnaud
Claude Eon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
S P S I SOC
Original Assignee
S P S I SOC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by S P S I SOC filed Critical S P S I SOC
Priority to FR9608168A priority Critical patent/FR2750494B1/fr
Publication of FR2750494A1 publication Critical patent/FR2750494A1/fr
Application granted granted Critical
Publication of FR2750494B1 publication Critical patent/FR2750494B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
    • G01N27/225—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity by using hygroscopic materials

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
FR9608168A 1996-07-01 1996-07-01 Capteurs capacitifs a hautes performances comportant au moins une electrode non metallique et procede de fabrication de tels capteurs Expired - Lifetime FR2750494B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR9608168A FR2750494B1 (fr) 1996-07-01 1996-07-01 Capteurs capacitifs a hautes performances comportant au moins une electrode non metallique et procede de fabrication de tels capteurs

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9608168A FR2750494B1 (fr) 1996-07-01 1996-07-01 Capteurs capacitifs a hautes performances comportant au moins une electrode non metallique et procede de fabrication de tels capteurs

Publications (2)

Publication Number Publication Date
FR2750494A1 FR2750494A1 (fr) 1998-01-02
FR2750494B1 true FR2750494B1 (fr) 1998-09-04

Family

ID=9493593

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9608168A Expired - Lifetime FR2750494B1 (fr) 1996-07-01 1996-07-01 Capteurs capacitifs a hautes performances comportant au moins une electrode non metallique et procede de fabrication de tels capteurs

Country Status (1)

Country Link
FR (1) FR2750494B1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2619160C2 (ru) * 2012-03-19 2017-05-12 Эологикс Сенсор Текнолоджи Гмбх Устройство для обнаружения критических состояний поверхности

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES2219788T3 (es) * 1997-12-31 2004-12-01 Societe D'applications Electroniques Pour La Physique, La Science Et L'industrie Captador capacitativo de la medicion de la humedad y procedimiento de fabricacion de estos captadores.
DE10016427C2 (de) * 2000-04-01 2003-02-13 Bosch Gmbh Robert Sensor, insbesondere Feuchtesensor, und Verfahren zur Herstellung desselben
EP2755023B1 (fr) 2013-01-11 2017-06-21 MEAS France Capteur capacitif intégré sur un circuit semi-conducteur

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2136451B (en) * 1983-03-11 1986-06-25 Gen Electric Plc Depositing porous films by evaporating material on to a surface
US5344549A (en) * 1991-10-11 1994-09-06 The United States Of America As Represented By The United States Department Of Energy Oxygen partial pressure sensor
US5177662A (en) * 1992-02-05 1993-01-05 Johnson Service Company Capacitance humidity sensor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2619160C2 (ru) * 2012-03-19 2017-05-12 Эологикс Сенсор Текнолоджи Гмбх Устройство для обнаружения критических состояний поверхности

Also Published As

Publication number Publication date
FR2750494A1 (fr) 1998-01-02

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