FR2737017B1 - Detecteur de particules sensible a la position - Google Patents

Detecteur de particules sensible a la position

Info

Publication number
FR2737017B1
FR2737017B1 FR9508607A FR9508607A FR2737017B1 FR 2737017 B1 FR2737017 B1 FR 2737017B1 FR 9508607 A FR9508607 A FR 9508607A FR 9508607 A FR9508607 A FR 9508607A FR 2737017 B1 FR2737017 B1 FR 2737017B1
Authority
FR
France
Prior art keywords
particle detector
position sensitive
sensitive particle
detector
sensitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9508607A
Other languages
English (en)
Other versions
FR2737017A1 (fr
Inventor
Didier Christian Adri Blavette
Alain Bostel
Bernard Deconihout
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Original Assignee
Centre National de la Recherche Scientifique CNRS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS filed Critical Centre National de la Recherche Scientifique CNRS
Priority to FR9508607A priority Critical patent/FR2737017B1/fr
Priority to PCT/FR1996/001100 priority patent/WO1997004335A1/fr
Priority to EP96924968A priority patent/EP0839327A1/fr
Priority to JP9506347A priority patent/JPH11510246A/ja
Publication of FR2737017A1 publication Critical patent/FR2737017A1/fr
Application granted granted Critical
Publication of FR2737017B1 publication Critical patent/FR2737017B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/28—Measuring radiation intensity with secondary-emission detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/025—Detectors specially adapted to particle spectrometers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/24435—Microchannel plates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Measurement Of Radiation (AREA)
FR9508607A 1995-07-17 1995-07-17 Detecteur de particules sensible a la position Expired - Fee Related FR2737017B1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR9508607A FR2737017B1 (fr) 1995-07-17 1995-07-17 Detecteur de particules sensible a la position
PCT/FR1996/001100 WO1997004335A1 (fr) 1995-07-17 1996-07-16 Detecteur de particules sensible a la position et transparent
EP96924968A EP0839327A1 (fr) 1995-07-17 1996-07-16 Detecteur de particules sensible a la position et transparent
JP9506347A JPH11510246A (ja) 1995-07-17 1996-07-16 位置に感じ易い粒子検出器及び透明体

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9508607A FR2737017B1 (fr) 1995-07-17 1995-07-17 Detecteur de particules sensible a la position

Publications (2)

Publication Number Publication Date
FR2737017A1 FR2737017A1 (fr) 1997-01-24
FR2737017B1 true FR2737017B1 (fr) 1997-08-29

Family

ID=9481037

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9508607A Expired - Fee Related FR2737017B1 (fr) 1995-07-17 1995-07-17 Detecteur de particules sensible a la position

Country Status (4)

Country Link
EP (1) EP0839327A1 (fr)
JP (1) JPH11510246A (fr)
FR (1) FR2737017B1 (fr)
WO (1) WO1997004335A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7214947B2 (en) * 2005-03-25 2007-05-08 General Electric Company Detector assembly and method of manufacture
JP6381307B2 (ja) * 2014-06-11 2018-08-29 キヤノン株式会社 放射線画像撮像装置及びその制御方法、並びに、プログラム

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2597254A1 (fr) * 1986-04-14 1987-10-16 Commissariat Energie Atomique Dispositif d'imagerie, a grande sensibilite, d'un faisceau de particules
US5111035A (en) * 1990-02-22 1992-05-05 Universidad Autonoma Metropolitana Digital anode to determine the location of electrons on a given surface

Also Published As

Publication number Publication date
EP0839327A1 (fr) 1998-05-06
JPH11510246A (ja) 1999-09-07
FR2737017A1 (fr) 1997-01-24
WO1997004335A1 (fr) 1997-02-06

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Legal Events

Date Code Title Description
ST Notification of lapse