FR2712119B1 - Procédé et dispositif pour attaquer des couches minces, notamment des couches d'oxyde d'indium et d'étain. - Google Patents

Procédé et dispositif pour attaquer des couches minces, notamment des couches d'oxyde d'indium et d'étain.

Info

Publication number
FR2712119B1
FR2712119B1 FR9413066A FR9413066A FR2712119B1 FR 2712119 B1 FR2712119 B1 FR 2712119B1 FR 9413066 A FR9413066 A FR 9413066A FR 9413066 A FR9413066 A FR 9413066A FR 2712119 B1 FR2712119 B1 FR 2712119B1
Authority
FR
France
Prior art keywords
layers
tin oxide
indium tin
etching thin
thin layers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9413066A
Other languages
English (en)
Other versions
FR2712119A1 (fr
Inventor
Karl-Heinz Kretschmer
Gerhard Lorenz
Rainer Gegenwart
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE4337309A external-priority patent/DE4337309A1/de
Application filed by Leybold AG filed Critical Leybold AG
Publication of FR2712119A1 publication Critical patent/FR2712119A1/fr
Application granted granted Critical
Publication of FR2712119B1 publication Critical patent/FR2712119B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32091—Radio frequency generated discharge the radio frequency energy being capacitively coupled to the plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3266—Magnetic control means
    • H01J37/32678—Electron cyclotron resonance
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3266—Magnetic control means
    • H01J37/32688—Multi-cusp fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32697—Electrostatic control
    • H01J37/32706—Polarising the substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1884—Manufacture of transparent electrodes, e.g. TCO, ITO
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/334—Etching
    • H01J2237/3343—Problems associated with etching
    • H01J2237/3346—Selectivity

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Drying Of Semiconductors (AREA)
  • Physical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
  • Electron Sources, Ion Sources (AREA)
FR9413066A 1993-11-02 1994-11-02 Procédé et dispositif pour attaquer des couches minces, notamment des couches d'oxyde d'indium et d'étain. Expired - Fee Related FR2712119B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4337309A DE4337309A1 (de) 1993-08-26 1993-11-02 Verfahren und Vorrichtung zum Ätzen von dünnen Schichten, vorzugsweise von Indium-Zinn-Oxid-Schichten

Publications (2)

Publication Number Publication Date
FR2712119A1 FR2712119A1 (fr) 1995-05-12
FR2712119B1 true FR2712119B1 (fr) 1996-07-26

Family

ID=6501577

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9413066A Expired - Fee Related FR2712119B1 (fr) 1993-11-02 1994-11-02 Procédé et dispositif pour attaquer des couches minces, notamment des couches d'oxyde d'indium et d'étain.

Country Status (6)

Country Link
EP (1) EP0652585A1 (fr)
JP (1) JPH07183284A (fr)
FR (1) FR2712119B1 (fr)
GB (1) GB2283461B (fr)
IL (1) IL109698A (fr)
NL (1) NL9401790A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6794311B2 (en) 2000-07-14 2004-09-21 Applied Materials Inc. Method and apparatus for treating low k dielectric layers to reduce diffusion

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6547934B2 (en) * 1998-05-18 2003-04-15 Applied Materials, Inc. Reduction of metal oxide in a dual frequency etch chamber
US6297147B1 (en) 1998-06-05 2001-10-02 Applied Materials, Inc. Plasma treatment for ex-situ contact fill
US7053002B2 (en) 1998-12-04 2006-05-30 Applied Materials, Inc Plasma preclean with argon, helium, and hydrogen gases
US6368978B1 (en) 1999-03-04 2002-04-09 Applied Materials, Inc. Hydrogen-free method of plasma etching indium tin oxide

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2233286A (en) * 1989-06-01 1991-01-09 P Maguire Pattern processing on tin oxide films
US5032221A (en) * 1990-05-07 1991-07-16 Eastman Kodak Company Etching indium tin oxide
JP2543642B2 (ja) * 1991-01-18 1996-10-16 アプライド マテリアルズ インコーポレイテッド 高周波交流電気エネルギ―と相対的に低い周波数の交流電気的エネルギ―を有する、工作物を処理するためのシステムおよび方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6794311B2 (en) 2000-07-14 2004-09-21 Applied Materials Inc. Method and apparatus for treating low k dielectric layers to reduce diffusion

Also Published As

Publication number Publication date
GB2283461A (en) 1995-05-10
IL109698A0 (en) 1994-08-26
FR2712119A1 (fr) 1995-05-12
NL9401790A (nl) 1995-06-01
EP0652585A1 (fr) 1995-05-10
GB2283461B (en) 1997-10-15
JPH07183284A (ja) 1995-07-21
GB9414908D0 (en) 1994-09-14
IL109698A (en) 1996-08-04

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Legal Events

Date Code Title Description
ST Notification of lapse