FR2700396B1 - Procede pour rendre planes des structures en forme de fosse. - Google Patents

Procede pour rendre planes des structures en forme de fosse.

Info

Publication number
FR2700396B1
FR2700396B1 FR9400377A FR9400377A FR2700396B1 FR 2700396 B1 FR2700396 B1 FR 2700396B1 FR 9400377 A FR9400377 A FR 9400377A FR 9400377 A FR9400377 A FR 9400377A FR 2700396 B1 FR2700396 B1 FR 2700396B1
Authority
FR
France
Prior art keywords
rendering
pitched structures
pitched
structures
rendering pitched
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9400377A
Other languages
English (en)
Other versions
FR2700396A1 (fr
Inventor
Weber Lothar
Lorkowski Monika
Mayer Klaus-Michael
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of FR2700396A1 publication Critical patent/FR2700396A1/fr
Application granted granted Critical
Publication of FR2700396B1 publication Critical patent/FR2700396B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4249—Packages, e.g. shape, construction, internal or external details comprising arrays of active devices and fibres
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1221—Basic optical elements, e.g. light-guiding paths made from organic materials
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/38—Mechanical coupling means having fibre to fibre mating means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3648—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures
    • G02B6/3652—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures the additional structures being prepositioning mounting areas, allowing only movement in one dimension, e.g. grooves, trenches or vias in the microbench surface, i.e. self aligning supporting carriers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3684—Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier
    • G02B6/3688—Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier using laser ablation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3684—Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier
    • G02B6/3692—Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier with surface micromachining involving etching, e.g. wet or dry etching steps

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Integrated Circuits (AREA)
  • Formation Of Insulating Films (AREA)
  • Element Separation (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
FR9400377A 1993-01-14 1994-01-14 Procede pour rendre planes des structures en forme de fosse. Expired - Fee Related FR2700396B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4300765A DE4300765C1 (de) 1993-01-14 1993-01-14 Verfahren zum Planarisieren grabenförmiger Strukturen

Publications (2)

Publication Number Publication Date
FR2700396A1 FR2700396A1 (fr) 1994-07-13
FR2700396B1 true FR2700396B1 (fr) 1995-06-23

Family

ID=6478155

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9400377A Expired - Fee Related FR2700396B1 (fr) 1993-01-14 1994-01-14 Procede pour rendre planes des structures en forme de fosse.

Country Status (5)

Country Link
US (1) US5456797A (fr)
JP (1) JPH06235835A (fr)
DE (1) DE4300765C1 (fr)
FR (1) FR2700396B1 (fr)
GB (1) GB2274354B (fr)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5577309A (en) * 1995-03-01 1996-11-26 Texas Instruments Incorporated Method for forming electrical contact to the optical coating of an infrared detector
US5961767A (en) * 1997-05-15 1999-10-05 Lucent Technologies, Inc. Method for forming micron-sized and smaller liquid droplets
DE19752926A1 (de) * 1997-11-28 1999-06-10 Bosch Gmbh Robert Verfahren zum Aufbringen eines Schutzlacks auf einen Wafer
US7043129B2 (en) * 2000-06-16 2006-05-09 Wayne State University Wide bandgap semiconductor waveguide structures
US6848295B2 (en) * 2002-04-17 2005-02-01 Wayne State University Acoustic wave sensor apparatus, method and system using wide bandgap materials
US7068870B2 (en) * 2000-10-26 2006-06-27 Shipley Company, L.L.C. Variable width waveguide for mode-matching and method for making
DE10056834A1 (de) * 2000-11-16 2002-06-13 Harting Elektrooptische Bauteile Gmbh & Co Kg Integriert-optisches Wellenleiterbauteil sowie Verfahren zu seiner Herstellung
US7251406B2 (en) * 2000-12-14 2007-07-31 Shipley Company, L.L.C. Optical waveguide termination with vertical and horizontal mode shaping
WO2002095453A2 (fr) * 2000-12-14 2002-11-28 Shipley Company, L.L.C. Terminaison de guide d'onde optique avec forme de mode vertical et horizontal
US7158701B2 (en) * 2001-02-21 2007-01-02 Shipley Company, L.L.C. Method for making optical devices with a moving mask and optical devices made thereby
US6912345B2 (en) * 2001-03-30 2005-06-28 Shipley Company, L.L.C. Tapered optical fiber for coupling to diffused optical waveguides
AU2002357700A1 (en) 2001-11-08 2003-05-19 Shipley Company, Llc Fiber optic termination
US20040144927A1 (en) * 2003-01-28 2004-07-29 Auner Gregory W. Microsystems arrays for digital radiation imaging and signal processing and method for making microsystem arrays
US6853075B2 (en) 2003-01-28 2005-02-08 Wayne State University Self-assembled nanobump array stuctures and a method to fabricate such structures
US20060035406A1 (en) * 2004-08-16 2006-02-16 Harvatek Corporation Method of forming a composite polymer material inside trenches of a semiconductor substrate to form a composite polymer structure
JP4683377B2 (ja) * 2004-09-24 2011-05-18 日立化成工業株式会社 ポリマー光導波路デバイスの製造方法
CN106945202A (zh) * 2010-02-11 2017-07-14 谭永杰 一种用于制造微型结构的系统和方法
US8232204B1 (en) 2011-06-29 2012-07-31 International Business Machines Corporation Method of forming borderless contact for transistor

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3313013A (en) * 1960-08-15 1967-04-11 Fairchild Camera Instr Co Method of making solid-state circuitry
IN152332B (fr) * 1978-08-03 1983-12-24 Westinghouse Electric Corp
US4656050A (en) * 1983-11-30 1987-04-07 International Business Machines Corporation Method of producing electronic components utilizing cured vinyl and/or acetylene terminated copolymers
JPS60120723A (ja) * 1983-11-30 1985-06-28 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション 電子装置
US4568601A (en) * 1984-10-19 1986-02-04 International Business Machines Corporation Use of radiation sensitive polymerizable oligomers to produce polyimide negative resists and planarized dielectric components for semiconductor structures
US4665010A (en) * 1985-04-29 1987-05-12 International Business Machines Corporation Method of fabricating photopolymer isolation trenches in the surface of a semiconductor wafer
US4654120A (en) * 1985-10-31 1987-03-31 International Business Machines Corporation Method of making a planar trench semiconductor structure
GB2222465A (en) * 1988-09-03 1990-03-07 Marconi Gec Ltd Optical waveguide having low light loss
US5271801A (en) * 1990-07-09 1993-12-21 Commissariat A L'energie Atomique Process of production of integrated optical components
US5217568A (en) * 1992-02-03 1993-06-08 Motorola, Inc. Silicon etching process using polymeric mask, for example, to form V-groove for an optical fiber coupling

Also Published As

Publication number Publication date
GB2274354A (en) 1994-07-20
FR2700396A1 (fr) 1994-07-13
US5456797A (en) 1995-10-10
JPH06235835A (ja) 1994-08-23
DE4300765C1 (de) 1993-12-23
GB2274354B (en) 1996-12-18
GB9400354D0 (en) 1994-03-09

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Legal Events

Date Code Title Description
ST Notification of lapse