FR2665259B1 - Procede et appareil de determination de la qualite de pieces optiques. - Google Patents
Procede et appareil de determination de la qualite de pieces optiques.Info
- Publication number
- FR2665259B1 FR2665259B1 FR9009603A FR9009603A FR2665259B1 FR 2665259 B1 FR2665259 B1 FR 2665259B1 FR 9009603 A FR9009603 A FR 9009603A FR 9009603 A FR9009603 A FR 9009603A FR 2665259 B1 FR2665259 B1 FR 2665259B1
- Authority
- FR
- France
- Prior art keywords
- quality
- determining
- optical parts
- optical
- parts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8803—Visual inspection
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/50—Optics for phase object visualisation
- G02B27/54—Schlieren-optical systems
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N2021/9511—Optical elements other than lenses, e.g. mirrors
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9009603A FR2665259B1 (fr) | 1990-07-27 | 1990-07-27 | Procede et appareil de determination de la qualite de pieces optiques. |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9009603A FR2665259B1 (fr) | 1990-07-27 | 1990-07-27 | Procede et appareil de determination de la qualite de pieces optiques. |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2665259A1 FR2665259A1 (fr) | 1992-01-31 |
FR2665259B1 true FR2665259B1 (fr) | 1992-10-16 |
Family
ID=9399158
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR9009603A Expired - Fee Related FR2665259B1 (fr) | 1990-07-27 | 1990-07-27 | Procede et appareil de determination de la qualite de pieces optiques. |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR2665259B1 (fr) |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3468610A (en) * | 1966-05-10 | 1969-09-23 | Muffoletto Carl V | Schlieren and strain birefringence system |
JPS5767844A (en) * | 1980-10-15 | 1982-04-24 | Nippon Kogaku Kk <Nikon> | Surface inspecting device |
JPS59119246A (ja) * | 1982-12-24 | 1984-07-10 | Matsushita Electric Works Ltd | 被検査物照明装置 |
JPS61191946A (ja) * | 1985-02-20 | 1986-08-26 | Matsushita Electric Ind Co Ltd | 光学的欠陥検査装置 |
DE3620129A1 (de) * | 1986-06-14 | 1987-12-17 | Zeiss Carl Fa | Vorrichtung zum pruefen von bauteilen aus transparentem material auf oberflaechenfehler und einschluesse |
-
1990
- 1990-07-27 FR FR9009603A patent/FR2665259B1/fr not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
FR2665259A1 (fr) | 1992-01-31 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |