FR2626208B1 - Procede et dispositif de rodage et de polissage de surfaces optiques - Google Patents

Procede et dispositif de rodage et de polissage de surfaces optiques

Info

Publication number
FR2626208B1
FR2626208B1 FR8900607A FR8900607A FR2626208B1 FR 2626208 B1 FR2626208 B1 FR 2626208B1 FR 8900607 A FR8900607 A FR 8900607A FR 8900607 A FR8900607 A FR 8900607A FR 2626208 B1 FR2626208 B1 FR 2626208B1
Authority
FR
France
Prior art keywords
roding
optical surfaces
polishing optical
polishing
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR8900607A
Other languages
English (en)
Other versions
FR2626208A1 (fr
Inventor
Erich Heynacher
Klaus Beckstette
Michael Schmidt
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss SMT GmbH
Original Assignee
Carl Zeiss SMT GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss SMT GmbH filed Critical Carl Zeiss SMT GmbH
Publication of FR2626208A1 publication Critical patent/FR2626208A1/fr
Application granted granted Critical
Publication of FR2626208B1 publication Critical patent/FR2626208B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/16—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the load
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • B24B13/015—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor of television picture tube viewing panels, headlight reflectors or the like

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
FR8900607A 1988-01-23 1989-01-19 Procede et dispositif de rodage et de polissage de surfaces optiques Expired - Fee Related FR2626208B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19883801969 DE3801969A1 (de) 1988-01-23 1988-01-23 Verfahren und vorrichtung zum laeppen bzw. polieren optischer flaechen

Publications (2)

Publication Number Publication Date
FR2626208A1 FR2626208A1 (fr) 1989-07-28
FR2626208B1 true FR2626208B1 (fr) 1991-03-15

Family

ID=6345875

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8900607A Expired - Fee Related FR2626208B1 (fr) 1988-01-23 1989-01-19 Procede et dispositif de rodage et de polissage de surfaces optiques

Country Status (3)

Country Link
JP (1) JPH01222855A (fr)
DE (1) DE3801969A1 (fr)
FR (1) FR2626208B1 (fr)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3311116B2 (ja) * 1993-10-28 2002-08-05 株式会社東芝 半導体製造装置
DE19651761A1 (de) * 1996-12-12 1998-06-18 Wacker Siltronic Halbleitermat Verfahren und Vorrichtung zum Polieren von Halbleiterscheiben
SG86415A1 (en) * 1999-07-09 2002-02-19 Applied Materials Inc Closed-loop control of wafer polishing in a chemical mechanical polishing system
US6776692B1 (en) 1999-07-09 2004-08-17 Applied Materials Inc. Closed-loop control of wafer polishing in a chemical mechanical polishing system
US20030199112A1 (en) 2002-03-22 2003-10-23 Applied Materials, Inc. Copper wiring module control
US7024268B1 (en) 2002-03-22 2006-04-04 Applied Materials Inc. Feedback controlled polishing processes
FR2843711B1 (fr) * 2002-08-22 2005-05-13 Europ De Systemes Optiques Soc Procede de polissage de finition
JP4777658B2 (ja) 2002-11-22 2011-09-21 アプライド マテリアルズ インコーポレイテッド 研磨制御のための方法および器具
US7074109B1 (en) 2003-08-18 2006-07-11 Applied Materials Chemical mechanical polishing control system and method
US6991516B1 (en) 2003-08-18 2006-01-31 Applied Materials Inc. Chemical mechanical polishing with multi-stage monitoring of metal clearing
DK1525947T3 (da) * 2003-10-23 2006-07-31 Seso Fremgangsmåde ved slutpolering
FR2932897B1 (fr) * 2008-06-20 2010-07-30 Europ De Systemes Optiques Soc Procede de faconnage d'un element optique aspherique
DE102014109654B4 (de) 2014-07-10 2022-05-12 Carl Zeiss Jena Gmbh Vorrichtungen zum Bearbeiten von optischen Werkstücken

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4128968A (en) * 1976-09-22 1978-12-12 The Perkin-Elmer Corporation Optical surface polisher
SU878530A1 (ru) * 1979-02-09 1981-11-07 Институт космических исследований АН СССР Способ формообразовани оптических поверхностей
DE3430499C2 (de) * 1984-08-18 1986-08-14 Fa. Carl Zeiss, 7920 Heidenheim Verfahren und Einrichtung zum Läppen oder Polieren von optischen Werkstücken

Also Published As

Publication number Publication date
JPH01222855A (ja) 1989-09-06
DE3801969A1 (de) 1989-07-27
FR2626208A1 (fr) 1989-07-28

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Legal Events

Date Code Title Description
ST Notification of lapse