FR2638840B1 - - Google Patents
Info
- Publication number
- FR2638840B1 FR2638840B1 FR8814740A FR8814740A FR2638840B1 FR 2638840 B1 FR2638840 B1 FR 2638840B1 FR 8814740 A FR8814740 A FR 8814740A FR 8814740 A FR8814740 A FR 8814740A FR 2638840 B1 FR2638840 B1 FR 2638840B1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
- G01L27/007—Malfunction diagnosis, i.e. diagnosing a sensor defect
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- Biomedical Technology (AREA)
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8814740A FR2638840A1 (fr) | 1988-11-09 | 1988-11-09 | Manometre de mesure des pressions de 103 mbars a 10´9 mbars |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8814740A FR2638840A1 (fr) | 1988-11-09 | 1988-11-09 | Manometre de mesure des pressions de 103 mbars a 10´9 mbars |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2638840A1 FR2638840A1 (fr) | 1990-05-11 |
FR2638840B1 true FR2638840B1 (ja) | 1994-12-30 |
Family
ID=9371795
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR8814740A Granted FR2638840A1 (fr) | 1988-11-09 | 1988-11-09 | Manometre de mesure des pressions de 103 mbars a 10´9 mbars |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR2638840A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19651487A1 (de) * | 1996-12-11 | 1998-06-18 | Forschungszentrum Juelich Gmbh | Verfahren und Vorrichtung zur Erfassung von im Vakuumbereich liegenden Gasdrücken |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58124079A (ja) * | 1982-01-20 | 1983-07-23 | Furukawa Electric Co Ltd:The | 真空ポンプにおける圧力調整方法 |
JPS62213043A (ja) * | 1986-03-14 | 1987-09-18 | Sumitomo Heavy Ind Ltd | イオン源装置 |
JPS62238381A (ja) * | 1986-04-08 | 1987-10-19 | Kokusai Electric Co Ltd | 真空容器の圧力制御装置 |
-
1988
- 1988-11-09 FR FR8814740A patent/FR2638840A1/fr active Granted
Also Published As
Publication number | Publication date |
---|---|
FR2638840A1 (fr) | 1990-05-11 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse | ||
RN | Application for restoration | ||
FC | Decision of inpi director general to approve request for restoration | ||
ST | Notification of lapse |