FR2638840A1 - Manometre de mesure des pressions de 103 mbars a 10´9 mbars - Google Patents

Manometre de mesure des pressions de 103 mbars a 10´9 mbars Download PDF

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Publication number
FR2638840A1
FR2638840A1 FR8814740A FR8814740A FR2638840A1 FR 2638840 A1 FR2638840 A1 FR 2638840A1 FR 8814740 A FR8814740 A FR 8814740A FR 8814740 A FR8814740 A FR 8814740A FR 2638840 A1 FR2638840 A1 FR 2638840A1
Authority
FR
France
Prior art keywords
fact
pressure
pump
mbar
valves
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR8814740A
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English (en)
French (fr)
Other versions
FR2638840B1 (enrdf_load_stackoverflow
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Individual
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Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to FR8814740A priority Critical patent/FR2638840A1/fr
Publication of FR2638840A1 publication Critical patent/FR2638840A1/fr
Application granted granted Critical
Publication of FR2638840B1 publication Critical patent/FR2638840B1/fr
Granted legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
    • G01L27/007—Malfunction diagnosis, i.e. diagnosing a sensor defect

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Biomedical Technology (AREA)
  • Measuring Fluid Pressure (AREA)
FR8814740A 1988-11-09 1988-11-09 Manometre de mesure des pressions de 103 mbars a 10´9 mbars Granted FR2638840A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR8814740A FR2638840A1 (fr) 1988-11-09 1988-11-09 Manometre de mesure des pressions de 103 mbars a 10´9 mbars

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8814740A FR2638840A1 (fr) 1988-11-09 1988-11-09 Manometre de mesure des pressions de 103 mbars a 10´9 mbars

Publications (2)

Publication Number Publication Date
FR2638840A1 true FR2638840A1 (fr) 1990-05-11
FR2638840B1 FR2638840B1 (enrdf_load_stackoverflow) 1994-12-30

Family

ID=9371795

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8814740A Granted FR2638840A1 (fr) 1988-11-09 1988-11-09 Manometre de mesure des pressions de 103 mbars a 10´9 mbars

Country Status (1)

Country Link
FR (1) FR2638840A1 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19651487A1 (de) * 1996-12-11 1998-06-18 Forschungszentrum Juelich Gmbh Verfahren und Vorrichtung zur Erfassung von im Vakuumbereich liegenden Gasdrücken

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58124079A (ja) * 1982-01-20 1983-07-23 Furukawa Electric Co Ltd:The 真空ポンプにおける圧力調整方法
JPS62213043A (ja) * 1986-03-14 1987-09-18 Sumitomo Heavy Ind Ltd イオン源装置
JPS62238381A (ja) * 1986-04-08 1987-10-19 Kokusai Electric Co Ltd 真空容器の圧力制御装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58124079A (ja) * 1982-01-20 1983-07-23 Furukawa Electric Co Ltd:The 真空ポンプにおける圧力調整方法
JPS62213043A (ja) * 1986-03-14 1987-09-18 Sumitomo Heavy Ind Ltd イオン源装置
JPS62238381A (ja) * 1986-04-08 1987-10-19 Kokusai Electric Co Ltd 真空容器の圧力制御装置

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 007, no. 230 (M-249)12 Octobre 1983 & JP-A-58 124 079 ( FURUKAWA DENKI KOGYO ) 23 Juillet 1983 *
PATENT ABSTRACTS OF JAPAN vol. 012, no. 069 (E-587)3 Mars 1988 & JP-A-62 213 043 ( SUMITOMO HEAVY IND. LTD. ) 18 Septembre 1987 *
PATENT ABSTRACTS OF JAPAN vol. 012, no. 117 (C-487)13 Avril 1988 & JP-A-62 238 381 ( KOKUSAI ELECTRIC CO. LTD. ) 19 Octobre 1987 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19651487A1 (de) * 1996-12-11 1998-06-18 Forschungszentrum Juelich Gmbh Verfahren und Vorrichtung zur Erfassung von im Vakuumbereich liegenden Gasdrücken

Also Published As

Publication number Publication date
FR2638840B1 (enrdf_load_stackoverflow) 1994-12-30

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Legal Events

Date Code Title Description
ST Notification of lapse
RN Application for restoration
FC Decision of inpi director general to approve request for restoration
ST Notification of lapse