FR2635377B3 - Dispositif pour le traitement en phases gazeuses de pieces d'oeuvre en forme de plaques, notamment des reacteurs pour le depot chimique sous plasma - Google Patents

Dispositif pour le traitement en phases gazeuses de pieces d'oeuvre en forme de plaques, notamment des reacteurs pour le depot chimique sous plasma

Info

Publication number
FR2635377B3
FR2635377B3 FR898910295A FR8910295A FR2635377B3 FR 2635377 B3 FR2635377 B3 FR 2635377B3 FR 898910295 A FR898910295 A FR 898910295A FR 8910295 A FR8910295 A FR 8910295A FR 2635377 B3 FR2635377 B3 FR 2635377B3
Authority
FR
France
Prior art keywords
workpieces
plates
treatment
chemical deposition
deposition under
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR898910295A
Other languages
English (en)
Other versions
FR2635377A3 (fr
Inventor
Rainer Moeller
Dietmar Resch
Lutz Fabian
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Elektromat Dresden VEB
Elektromat VEB
Original Assignee
Elektromat Dresden VEB
Elektromat VEB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Elektromat Dresden VEB, Elektromat VEB filed Critical Elektromat Dresden VEB
Publication of FR2635377A3 publication Critical patent/FR2635377A3/fr
Application granted granted Critical
Publication of FR2635377B3 publication Critical patent/FR2635377B3/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
    • C23C16/4408—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber by purging residual gases from the reaction chamber or gas lines
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
    • C23C16/509—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using internal electrodes
    • C23C16/5096—Flat-bed apparatus

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Drying Of Semiconductors (AREA)
  • Chemical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
FR898910295A 1988-08-12 1989-07-31 Dispositif pour le traitement en phases gazeuses de pieces d'oeuvre en forme de plaques, notamment des reacteurs pour le depot chimique sous plasma Expired - Fee Related FR2635377B3 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD88318880A DD274830A1 (de) 1988-08-12 1988-08-12 Vorrichtung zur gasphasenbearbeitung von scheibenfoermigen werkstuecken

Publications (2)

Publication Number Publication Date
FR2635377A3 FR2635377A3 (fr) 1990-02-16
FR2635377B3 true FR2635377B3 (fr) 1990-07-20

Family

ID=5601697

Family Applications (1)

Application Number Title Priority Date Filing Date
FR898910295A Expired - Fee Related FR2635377B3 (fr) 1988-08-12 1989-07-31 Dispositif pour le traitement en phases gazeuses de pieces d'oeuvre en forme de plaques, notamment des reacteurs pour le depot chimique sous plasma

Country Status (6)

Country Link
US (1) US4981722A (fr)
JP (1) JPH02101169A (fr)
DD (1) DD274830A1 (fr)
DE (1) DE3923538A1 (fr)
FR (1) FR2635377B3 (fr)
GB (1) GB2222182B (fr)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5213650A (en) * 1989-08-25 1993-05-25 Applied Materials, Inc. Apparatus for removing deposits from backside and end edge of semiconductor wafer while preventing removal of materials from front surface of wafer
JPH0525648A (ja) * 1991-07-15 1993-02-02 Matsushita Electric Ind Co Ltd プラズマｃｖｄ成膜方法
US6379466B1 (en) * 1992-01-17 2002-04-30 Applied Materials, Inc. Temperature controlled gas distribution plate
JP2581487B2 (ja) * 1992-06-15 1997-02-12 中外炉工業株式会社 プラズマ成膜装置における成膜方法
US5716494A (en) * 1992-06-22 1998-02-10 Matsushita Electric Industrial Co., Ltd. Dry etching method, chemical vapor deposition method, and apparatus for processing semiconductor substrate
CH687987A5 (de) * 1993-05-03 1997-04-15 Balzers Hochvakuum Verfahren zur Erhoehung der Beschichtungsrate in einem Plasmaentladungsraum und Plasmakammer.
US5384008A (en) * 1993-06-18 1995-01-24 Applied Materials, Inc. Process and apparatus for full wafer deposition
US5449410A (en) * 1993-07-28 1995-09-12 Applied Materials, Inc. Plasma processing apparatus
ATE181969T1 (de) * 1994-03-29 1999-07-15 Schott Glas Pcvd-verfahren und vorrichtung zur beschichtung von gewölbten substraten
US5485935A (en) * 1994-04-01 1996-01-23 Xerox Corporation Capture system employing diverter fluid nozzle
US5460284A (en) * 1994-04-01 1995-10-24 Xerox Corporation Capture system employing annular fluid stream
US5976310A (en) * 1995-01-03 1999-11-02 Applied Materials, Inc. Plasma etch system
JP3925566B2 (ja) * 1996-11-15 2007-06-06 キヤノンアネルバ株式会社 薄膜形成装置
US5972078A (en) * 1997-07-31 1999-10-26 Fsi International, Inc. Exhaust rinse manifold for use with a coating apparatus
US6051099A (en) * 1997-10-14 2000-04-18 International Business Machines Corporation Apparatus for achieving etch rate uniformity
US6261524B1 (en) 1999-01-12 2001-07-17 Advanced Technology Materials, Inc. Advanced apparatus for abatement of gaseous pollutants
US6153150A (en) 1998-01-12 2000-11-28 Advanced Technology Materials, Inc. Apparatus and method for controlled decomposition oxidation of gaseous pollutants
JPH11297681A (ja) * 1998-04-07 1999-10-29 Mitsubishi Electric Corp 高誘電率薄膜形成用ｃｖｄ装置および高誘電率薄膜の形成方法
DE19851824C2 (de) * 1998-11-10 2002-04-04 Infineon Technologies Ag CVD-Reaktor
KR100319494B1 (ko) * 1999-07-15 2002-01-09 김용일 원자층 에피택시 공정을 위한 반도체 박막 증착장치
US6446572B1 (en) * 2000-08-18 2002-09-10 Tokyo Electron Limited Embedded plasma source for plasma density improvement
TWI224815B (en) * 2001-08-01 2004-12-01 Tokyo Electron Ltd Gas processing apparatus and gas processing method
US7569193B2 (en) * 2003-12-19 2009-08-04 Applied Materials, Inc. Apparatus and method for controlled combustion of gaseous pollutants
US7736599B2 (en) * 2004-11-12 2010-06-15 Applied Materials, Inc. Reactor design to reduce particle deposition during process abatement
US8095240B2 (en) * 2004-11-18 2012-01-10 Applied Materials, Inc. Methods for starting and operating a thermal abatement system
US7682574B2 (en) * 2004-11-18 2010-03-23 Applied Materials, Inc. Safety, monitoring and control features for thermal abatement reactor
KR101036734B1 (ko) * 2005-10-31 2011-05-24 어플라이드 머티어리얼스, 인코포레이티드 공정 저감 반응로
DE102008026000B4 (de) * 2008-05-29 2012-03-22 Von Ardenne Anlagentechnik Gmbh Verfahren und Vorrichtung zur Beschichtung flächiger Substrate
US20220235466A1 (en) * 2019-06-06 2022-07-28 Picosun Oy Porous inlet

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4435445A (en) * 1982-05-13 1984-03-06 Energy Conversion Devices, Inc. Photo-assisted CVD
JPS60166030A (ja) * 1984-02-09 1985-08-29 Mitsubishi Electric Corp 光化学反応による膜形成装置
JPS61196529A (ja) * 1985-02-25 1986-08-30 Semiconductor Energy Lab Co Ltd 薄膜形成装置
DE3772659D1 (de) * 1986-06-28 1991-10-10 Ulvac Corp Verfahren und vorrichtung zum beschichten unter anwendung einer cvd-beschichtungstechnik.
DE3751755T2 (de) * 1986-06-30 1997-04-03 Nihon Sinku Gijutsu K K Verfahren und Vorrichtung zum Abscheiden aus der Gasphase
US4800105A (en) * 1986-07-22 1989-01-24 Nihon Shinku Gijutsu Kabushiki Kaisha Method of forming a thin film by chemical vapor deposition
EP0255454A3 (fr) * 1986-07-26 1991-11-21 Nihon Shinku Gijutsu Kabushiki Kaisha Dispositif pour déposition chimique en phase vapeur
ATE133006T1 (de) * 1987-06-26 1996-01-15 Applied Materials Inc Verfahren zur selbstreinigung einer reaktionskammer

Also Published As

Publication number Publication date
FR2635377A3 (fr) 1990-02-16
JPH02101169A (ja) 1990-04-12
GB2222182A (en) 1990-02-28
GB2222182B (en) 1992-11-18
GB8917677D0 (en) 1989-09-20
DD274830A1 (de) 1990-01-03
US4981722A (en) 1991-01-01
DE3923538A1 (de) 1990-02-22

Similar Documents

Publication Publication Date Title
FR2635377B3 (fr) Dispositif pour le traitement en phases gazeuses de pieces d'oeuvre en forme de plaques, notamment des reacteurs pour le depot chimique sous plasma
EP0438727A3 (en) Process and solution for liquid phase treatment of semiconductor surfaces
EP0211593A3 (en) Process for the removal of polynuclear aromatic hydrocarbon compounds from admixtures of liquid hydrocarbon compounds
PT69949A (fr) Procede et dispositif pour le traitement de substances se presentant sous des phases differents tel que traitement de substances sous forme liquide semi-liquide ou pateuse par une autre phase notamment gazeuse
FR2689515B1 (fr) Procédé pour la préparation des pigments composites.
EP0433129A3 (en) Process for the purification of 1,1-dichloro-1-fluoroethane
FR2635376B3 (fr) Procede pour nettoyer des reacteurs destines au traitement en phases gazeuses de pieces d'oeuvre, notamment des reacteurs pour le depot chimique sous plasma
HU9401695D0 (en) Process for preparation of amines from aldehydes
BE893140A (fr) Porte-bicyclette destine notamment a equiper des vehicules pour le traitement des cycles
FR2652759B1 (fr) Catalyseurs pour le traitement des effluents gazeux et procede de traitement de ces effluents.
OA09457A (fr) Procédé pour la valorisation des boues d'épuration.
AU4996690A (en) Process for the metallization of ceramics and apparatus for carrying out the process
EP0260634A3 (en) Process for the simultaneous synthesis of several peptides in the solid phase
GB8919479D0 (en) Process for the separation of solid phase from liquid substance,particularly for waste water purification
FR2708418B1 (fr) Procédé pour le traitement de moules et emballages contenant des moules.
FR2689885B1 (fr) Procédé pour inhiber la décomposition du 1,1-dichloro-1-fluoréthane.
DZ1328A1 (fr) Procédé d'oxydation d'une charge oxydable en phasegazeuse et réacteur pour la mise en oeuvre de ce procédé.
GB2234451B (en) Process for the fine purification of gases
ZA901414B (en) Process and apparatus for the vacuum treatment of metals
EP0221428A3 (en) Liquid for the treatment of a photoresist composition, and process therefor
JPS5228179A (en) Grinding, cleansing ' desiccating process ' apparatus for solid wastes
FR2649995B1 (fr) Procede de siliciuration d'aciers par depot chimique en phase gazeuse
ITMI910003A0 (it) Recipiente di trattamento per il trattamento di metalli fusi
FR2566001B1 (fr) Agent pour le traitement de surface chimique des metaux
EP0245600A3 (en) Process for the plasma synthesis of hydride compounds and apparatus for carrying out said process

Legal Events

Date Code Title Description
ST Notification of lapse