FR2623291B1 - Dispositif de caracterisation electrique d'echantillons et application a la cartographie electrique d'echantillons semi-conducteurs de grande surface - Google Patents

Dispositif de caracterisation electrique d'echantillons et application a la cartographie electrique d'echantillons semi-conducteurs de grande surface

Info

Publication number
FR2623291B1
FR2623291B1 FR8715858A FR8715858A FR2623291B1 FR 2623291 B1 FR2623291 B1 FR 2623291B1 FR 8715858 A FR8715858 A FR 8715858A FR 8715858 A FR8715858 A FR 8715858A FR 2623291 B1 FR2623291 B1 FR 2623291B1
Authority
FR
France
Prior art keywords
samples
application
large surface
surface semiconductor
electrical mapping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR8715858A
Other languages
English (en)
Other versions
FR2623291A1 (fr
Inventor
Le Cleac H Xavier
Pierre-Noeel Favennec
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Universite de Rennes 1
Etat Francais
Original Assignee
Universite de Rennes 1
Etat Francais
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Universite de Rennes 1, Etat Francais filed Critical Universite de Rennes 1
Priority to FR8715858A priority Critical patent/FR2623291B1/fr
Priority to EP88910050A priority patent/EP0389529A1/fr
Priority to US07/490,558 priority patent/US5049812A/en
Priority to PCT/FR1988/000563 priority patent/WO1989004969A1/fr
Publication of FR2623291A1 publication Critical patent/FR2623291A1/fr
Application granted granted Critical
Publication of FR2623291B1 publication Critical patent/FR2623291B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N22/00—Investigating or analysing materials by the use of microwaves or radio waves, i.e. electromagnetic waves with a wavelength of one millimetre or more
FR8715858A 1987-11-17 1987-11-17 Dispositif de caracterisation electrique d'echantillons et application a la cartographie electrique d'echantillons semi-conducteurs de grande surface Expired - Lifetime FR2623291B1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR8715858A FR2623291B1 (fr) 1987-11-17 1987-11-17 Dispositif de caracterisation electrique d'echantillons et application a la cartographie electrique d'echantillons semi-conducteurs de grande surface
EP88910050A EP0389529A1 (fr) 1987-11-17 1988-11-16 Dispositif de caracterisation electrique d'echantillons et application a la cartographie electrique d'echantillons semi-conducteurs de grande surface
US07/490,558 US5049812A (en) 1987-11-17 1988-11-16 Device for the electric characterization of samples and application to electric mapping of large area semiconductor samples
PCT/FR1988/000563 WO1989004969A1 (fr) 1987-11-17 1988-11-16 Dispositif de caracterisation electrique d'echantillons et application a la cartographie electrique d'echantillons semi-conducteurs de grande surface

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8715858A FR2623291B1 (fr) 1987-11-17 1987-11-17 Dispositif de caracterisation electrique d'echantillons et application a la cartographie electrique d'echantillons semi-conducteurs de grande surface

Publications (2)

Publication Number Publication Date
FR2623291A1 FR2623291A1 (fr) 1989-05-19
FR2623291B1 true FR2623291B1 (fr) 1990-03-16

Family

ID=9356867

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8715858A Expired - Lifetime FR2623291B1 (fr) 1987-11-17 1987-11-17 Dispositif de caracterisation electrique d'echantillons et application a la cartographie electrique d'echantillons semi-conducteurs de grande surface

Country Status (4)

Country Link
US (1) US5049812A (fr)
EP (1) EP0389529A1 (fr)
FR (1) FR2623291B1 (fr)
WO (1) WO1989004969A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10112499B4 (de) * 2001-03-15 2010-08-19 Hauni Maschinenbau Ag Resonatoreinrichtung, insbesondere Mikrowellenresonatoreinrichtung

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3136946A (en) * 1960-09-29 1964-06-09 Itt Microwave resistance measuring system including thermoplastic microstrip coupler
FR1372886A (fr) * 1963-10-21 1964-09-18 Eltro Gmbh Perfectionnements apportés aux procédés et dispositifs pour la détermination desconstantes des matériaux en haute fréquence
GB1146598A (en) * 1965-09-02 1969-03-26 Microwave Instr Ltd Improvements in the measurement of moisture in sheet materials
FR90148E (fr) * 1966-06-17 1967-10-20 Eltro Gmbh Perfectionnements apportés aux procédés et dispositifs pour la détermination des constantes des matériaux en haute fréquence
US3942107A (en) * 1974-08-26 1976-03-02 Western Electric Company, Inc. Method and apparatus employing thin conductive films on flexible nonconductive sheets for non-destructive measurement of electrical characteristics
US4123703A (en) * 1977-09-02 1978-10-31 Sri International Microwave method of and apparatus for flaw detection
US4220915A (en) * 1978-06-28 1980-09-02 Rca Corporation Resistivity measurement system
US4190799A (en) * 1978-08-21 1980-02-26 Bell Telephone Laboratories, Incorporated Noncontacting measurement of hall effect in a wafer
DE3123427C2 (de) * 1981-06-12 1985-10-24 Siemens AG, 1000 Berlin und 8000 München Anordnung zum Messen des elektrischen Widerstandes und der Temperatur von durch Aufdampfen oder Aufstäuben auf Substraten abgeschiedenen dünnen, metallischleitenden Schichten während der Schichtherstellung
US4621233A (en) * 1984-01-13 1986-11-04 Rensselaer Polytechnic Institute Non-destructive testing of semiconductors using acoustic wave method
US4605893A (en) * 1984-09-06 1986-08-12 International Business Machines Corporation Contactless measurement of electrical properties of wafer shaped materials
EP0284909B1 (fr) * 1987-03-31 1993-05-26 Siemens Aktiengesellschaft Détecteur pour la mesure du courant ou de la tension de couches électroconductrices sur un chip de référence
US4841224A (en) * 1987-11-10 1989-06-20 Washington Technology Center Gap width probe and method
US4891584A (en) * 1988-03-21 1990-01-02 Semitest, Inc. Apparatus for making surface photovoltage measurements of a semiconductor
EP0325341B1 (fr) * 1988-01-22 1992-05-13 United Kingdom Atomic Energy Authority Caractérisation des matériaux
US4896096A (en) * 1988-03-31 1990-01-23 Wiltron Company Reflected signal measurement blanking circuit
US4833396A (en) * 1988-04-04 1989-05-23 Hughes Aircraft Company Lead frame short tester

Also Published As

Publication number Publication date
FR2623291A1 (fr) 1989-05-19
WO1989004969A1 (fr) 1989-06-01
US5049812A (en) 1991-09-17
EP0389529A1 (fr) 1990-10-03

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Legal Events

Date Code Title Description
TP Transmission of property
ST Notification of lapse