FR2620858B1 - Instrument de spectrometrie de masse d'ions secondaires avec formation directe de l'image - Google Patents

Instrument de spectrometrie de masse d'ions secondaires avec formation directe de l'image

Info

Publication number
FR2620858B1
FR2620858B1 FR888812138A FR8812138A FR2620858B1 FR 2620858 B1 FR2620858 B1 FR 2620858B1 FR 888812138 A FR888812138 A FR 888812138A FR 8812138 A FR8812138 A FR 8812138A FR 2620858 B1 FR2620858 B1 FR 2620858B1
Authority
FR
France
Prior art keywords
mass spectrometry
image formation
ion mass
secondary ion
direct image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR888812138A
Other languages
English (en)
Other versions
FR2620858A1 (fr
Inventor
Motohiro Naito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Publication of FR2620858A1 publication Critical patent/FR2620858A1/fr
Application granted granted Critical
Publication of FR2620858B1 publication Critical patent/FR2620858B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/28—Static spectrometers
    • H01J49/32—Static spectrometers using double focusing

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
FR888812138A 1987-09-18 1988-09-16 Instrument de spectrometrie de masse d'ions secondaires avec formation directe de l'image Expired - Fee Related FR2620858B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62234130A JPS6477853A (en) 1987-09-18 1987-09-18 Mapping type ion microanalyzer

Publications (2)

Publication Number Publication Date
FR2620858A1 FR2620858A1 (fr) 1989-03-24
FR2620858B1 true FR2620858B1 (fr) 1991-03-22

Family

ID=16966107

Family Applications (1)

Application Number Title Priority Date Filing Date
FR888812138A Expired - Fee Related FR2620858B1 (fr) 1987-09-18 1988-09-16 Instrument de spectrometrie de masse d'ions secondaires avec formation directe de l'image

Country Status (3)

Country Link
US (1) US4912326A (fr)
JP (1) JPS6477853A (fr)
FR (1) FR2620858B1 (fr)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2523781B2 (ja) * 1988-04-28 1996-08-14 日本電子株式会社 飛行時間型／偏向二重収束型切換質量分析装置
GB8912580D0 (en) * 1989-06-01 1989-07-19 Vg Instr Group Charged particle energy analyzer and mass spectrometer incorporating it
US5128543A (en) * 1989-10-23 1992-07-07 Charles Evans & Associates Particle analyzer apparatus and method
US5513002A (en) * 1994-03-17 1996-04-30 The A.R.T. Group, Inc. Optical corona monitoring system
US5764823A (en) * 1994-03-17 1998-06-09 A R T Group Inc Optical switch for isolating multiple fiber optic strands
US5550629A (en) * 1994-03-17 1996-08-27 A R T Group Inc Method and apparatus for optically monitoring an electrical generator
US5886783A (en) * 1994-03-17 1999-03-23 Shapanus; Vincent F. Apparatus for isolating light signals from adjacent fiber optical strands
US5552880A (en) * 1994-03-17 1996-09-03 A R T Group Inc Optical radiation probe
US5550631A (en) * 1994-03-17 1996-08-27 A R T Group Inc Insulation doping system for monitoring the condition of electrical insulation
DE69920182T2 (de) * 1998-12-17 2005-02-17 Fei Co., Hillsboro Korpuskularstrahloptisches gerät mit auger-elektronendetektion
US7349090B2 (en) * 2000-09-20 2008-03-25 Kla-Tencor Technologies Corp. Methods and systems for determining a property of a specimen prior to, during, or subsequent to lithography
US6782337B2 (en) * 2000-09-20 2004-08-24 Kla-Tencor Technologies Corp. Methods and systems for determining a critical dimension an a presence of defects on a specimen
US6694284B1 (en) 2000-09-20 2004-02-17 Kla-Tencor Technologies Corp. Methods and systems for determining at least four properties of a specimen
US7130029B2 (en) 2000-09-20 2006-10-31 Kla-Tencor Technologies Corp. Methods and systems for determining an adhesion characteristic and a thickness of a specimen
US6891627B1 (en) 2000-09-20 2005-05-10 Kla-Tencor Technologies Corp. Methods and systems for determining a critical dimension and overlay of a specimen
US6919957B2 (en) 2000-09-20 2005-07-19 Kla-Tencor Technologies Corp. Methods and systems for determining a critical dimension, a presence of defects, and a thin film characteristic of a specimen
US7106425B1 (en) 2000-09-20 2006-09-12 Kla-Tencor Technologies Corp. Methods and systems for determining a presence of defects and a thin film characteristic of a specimen
US6812045B1 (en) 2000-09-20 2004-11-02 Kla-Tencor, Inc. Methods and systems for determining a characteristic of a specimen prior to, during, or subsequent to ion implantation
US6806951B2 (en) 2000-09-20 2004-10-19 Kla-Tencor Technologies Corp. Methods and systems for determining at least one characteristic of defects on at least two sides of a specimen
US6673637B2 (en) 2000-09-20 2004-01-06 Kla-Tencor Technologies Methods and systems for determining a presence of macro defects and overlay of a specimen
US8212206B2 (en) * 2003-09-04 2012-07-03 Griffin Analytical Technologies, L.L.C. Analysis methods, analysis device waveform generation methods, analysis devices, and articles of manufacture
DE112005000660T5 (de) * 2004-03-22 2007-02-08 Kla-Tencor Technologies Corp., Milpitas Methoden und Systeme zum Messen einer Eigenschaften eines Substrats oder zur Vorbereitung eines Substrats zur Analyse
WO2006002027A2 (fr) * 2004-06-15 2006-01-05 Griffin Analytical Technologies, Inc. Instruments analytiques, assemblages et methodes associees
US8680461B2 (en) 2005-04-25 2014-03-25 Griffin Analytical Technologies, L.L.C. Analytical instrumentation, apparatuses, and methods
US7992424B1 (en) 2006-09-14 2011-08-09 Griffin Analytical Technologies, L.L.C. Analytical instrumentation and sample analysis methods
WO2016042578A2 (fr) * 2014-09-19 2016-03-24 Indian Institute Of Technology Delhi Système et méthode de détection ou d'identification de substances et de leur composition
WO2017075470A1 (fr) * 2015-10-28 2017-05-04 Duke University Spectromètres de masse à électrodes segmentées et procédés associés
CN108538699B (zh) * 2018-05-14 2019-11-26 北京卫星环境工程研究所 质谱-能谱一体化高层中性大气探测装置
CN111146070B (zh) * 2019-12-25 2023-06-16 兰州空间技术物理研究所 一种小型高性能空间探测质谱计

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1318200A (en) * 1969-11-07 1973-05-23 Ass Elect Ind Mass spectrometers
US3984682A (en) * 1974-07-12 1976-10-05 Nihon Denshi Kabushiki Kaisha Mass spectrometer with superimposed electric and magnetic fields
US4521687A (en) * 1983-01-17 1985-06-04 Jeol Ltd. Mass spectrometer
FR2544914B1 (fr) * 1983-04-19 1986-02-21 Cameca Perfectionnements apportes aux spectrometres de masse
FR2558988B1 (fr) * 1984-01-27 1987-08-28 Onera (Off Nat Aerospatiale) Spectrometre de masse, a grande clarte, et capable de detection multiple simultanee
US4588889A (en) * 1984-02-10 1986-05-13 Jeol Ltd. Sweeping process for mass spectrometer having superimposed fields
JPS61179050A (ja) * 1985-02-01 1986-08-11 Jeol Ltd 二重集束質量分析装置

Also Published As

Publication number Publication date
FR2620858A1 (fr) 1989-03-24
US4912326A (en) 1990-03-27
JPS6477853A (en) 1989-03-23

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Legal Events

Date Code Title Description
ST Notification of lapse