FR2593657B2 - Dispositif de balayage optico-mecanique. - Google Patents
Dispositif de balayage optico-mecanique.Info
- Publication number
- FR2593657B2 FR2593657B2 FR7702161A FR7702161A FR2593657B2 FR 2593657 B2 FR2593657 B2 FR 2593657B2 FR 7702161 A FR7702161 A FR 7702161A FR 7702161 A FR7702161 A FR 7702161A FR 2593657 B2 FR2593657 B2 FR 2593657B2
- Authority
- FR
- France
- Prior art keywords
- optico
- scanning device
- mechanical scanning
- mechanical
- scanning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N3/00—Scanning details of television systems; Combination thereof with generation of supply voltages
- H04N3/02—Scanning details of television systems; Combination thereof with generation of supply voltages by optical-mechanical means only
- H04N3/08—Scanning details of television systems; Combination thereof with generation of supply voltages by optical-mechanical means only having a moving reflector
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/12—Scanning systems using multifaceted mirrors
- G02B26/125—Details of the optical system between the polygonal mirror and the image plane
- G02B26/126—Details of the optical system between the polygonal mirror and the image plane including curved mirrors
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- Lenses (AREA)
- Mechanical Optical Scanning Systems (AREA)
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7702161A FR2593657B2 (fr) | 1977-01-26 | 1977-01-26 | Dispositif de balayage optico-mecanique. |
IT3040877A IT1203128B (it) | 1977-01-26 | 1977-12-06 | Dispositivo di scansione ottico-meccanico |
GB5145677A GB1605268A (en) | 1977-01-26 | 1977-12-09 | Optical scanning device |
US05/859,997 US4687933A (en) | 1976-12-14 | 1977-12-09 | Optical and mechanical scanning device |
NL7714501A NL190769C (nl) | 1977-01-26 | 1977-12-28 | Verbetering van een optisch aftaststelsel. |
DE2802950A DE2802950A1 (de) | 1977-01-26 | 1978-01-24 | Vorrichtung zur opto-mechanischen abtastung eines gesichtsfeldes |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7702161A FR2593657B2 (fr) | 1977-01-26 | 1977-01-26 | Dispositif de balayage optico-mecanique. |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2593657A2 FR2593657A2 (fr) | 1987-07-31 |
FR2593657B2 true FR2593657B2 (fr) | 1988-05-13 |
Family
ID=9185923
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7702161A Expired FR2593657B2 (fr) | 1976-12-14 | 1977-01-26 | Dispositif de balayage optico-mecanique. |
Country Status (5)
Country | Link |
---|---|
DE (1) | DE2802950A1 (nl) |
FR (1) | FR2593657B2 (nl) |
GB (1) | GB1605268A (nl) |
IT (1) | IT1203128B (nl) |
NL (1) | NL190769C (nl) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2634903B1 (fr) * | 1979-07-25 | 1991-05-10 | Trt Telecom Radio Electr | Radar a laser infrarouge |
US7109497B2 (en) | 1998-05-05 | 2006-09-19 | Carl Zeiss Smt Ag | Illumination system particularly for microlithography |
US6438199B1 (en) * | 1998-05-05 | 2002-08-20 | Carl-Zeiss-Stiftung | Illumination system particularly for microlithography |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2009312B2 (de) * | 1969-02-28 | 1977-07-07 | National Research Development Corp, London | Optische abtasteinrichtung |
DE2011883B1 (de) * | 1970-03-13 | 1971-09-09 | Eltro Gmbh & Co Ges F Strahlungstechnik | Optoelektronisches System zur zeilen weisen Bildfeldabtastung |
US3764192A (en) * | 1971-05-28 | 1973-10-09 | Hughes Aircraft Co | Optical raster scan generator |
US3790246A (en) * | 1971-10-26 | 1974-02-05 | Eastman Kodak Co | X-y optical scanning system |
FR2245970B1 (nl) * | 1973-08-07 | 1977-05-13 | Trt Telecom Radio Electr | |
GB1478761A (en) * | 1975-04-15 | 1977-07-06 | Hughes Aircraft Co | Thermal imaging system with redundant object space scanning |
-
1977
- 1977-01-26 FR FR7702161A patent/FR2593657B2/fr not_active Expired
- 1977-12-06 IT IT3040877A patent/IT1203128B/it active
- 1977-12-09 GB GB5145677A patent/GB1605268A/en not_active Expired
- 1977-12-28 NL NL7714501A patent/NL190769C/nl not_active IP Right Cessation
-
1978
- 1978-01-24 DE DE2802950A patent/DE2802950A1/de active Granted
Also Published As
Publication number | Publication date |
---|---|
NL7714501A (nl) | 1986-12-01 |
DE2802950C2 (nl) | 1988-06-23 |
FR2593657A2 (fr) | 1987-07-31 |
NL190769C (nl) | 1994-08-01 |
IT1203128B (it) | 1989-02-15 |
GB1605268A (en) | 1987-02-04 |
DE2802950A1 (de) | 1987-12-10 |
NL190769B (nl) | 1994-03-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
CL | Concession to grant licenses |