FR2580866B1 - Pompe ionique a courant proportionnel au debit - Google Patents

Pompe ionique a courant proportionnel au debit

Info

Publication number
FR2580866B1
FR2580866B1 FR8506160A FR8506160A FR2580866B1 FR 2580866 B1 FR2580866 B1 FR 2580866B1 FR 8506160 A FR8506160 A FR 8506160A FR 8506160 A FR8506160 A FR 8506160A FR 2580866 B1 FR2580866 B1 FR 2580866B1
Authority
FR
France
Prior art keywords
flow rate
ion pump
ion
pump
rate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8506160A
Other languages
English (en)
Other versions
FR2580866A1 (fr
Inventor
Patrice Le Baud
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Novatome SA
Original Assignee
Novatome SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Novatome SA filed Critical Novatome SA
Priority to FR8506160A priority Critical patent/FR2580866B1/fr
Priority to DE8686400885T priority patent/DE3665112D1/de
Priority to EP19860400885 priority patent/EP0200641B1/fr
Publication of FR2580866A1 publication Critical patent/FR2580866A1/fr
Application granted granted Critical
Publication of FR2580866B1 publication Critical patent/FR2580866B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
FR8506160A 1985-04-23 1985-04-23 Pompe ionique a courant proportionnel au debit Expired FR2580866B1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
FR8506160A FR2580866B1 (fr) 1985-04-23 1985-04-23 Pompe ionique a courant proportionnel au debit
DE8686400885T DE3665112D1 (en) 1985-04-23 1986-04-23 Ion pump with a current proportional to the pumped quantity
EP19860400885 EP0200641B1 (fr) 1985-04-23 1986-04-23 Pompe ionique à courant proportionnel au débit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8506160A FR2580866B1 (fr) 1985-04-23 1985-04-23 Pompe ionique a courant proportionnel au debit

Publications (2)

Publication Number Publication Date
FR2580866A1 FR2580866A1 (fr) 1986-10-24
FR2580866B1 true FR2580866B1 (fr) 1989-01-06

Family

ID=9318571

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8506160A Expired FR2580866B1 (fr) 1985-04-23 1985-04-23 Pompe ionique a courant proportionnel au debit

Country Status (3)

Country Link
EP (1) EP0200641B1 (fr)
DE (1) DE3665112D1 (fr)
FR (1) FR2580866B1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2740607B1 (fr) * 1995-10-27 1997-11-21 Commissariat Energie Atomique Pompe ionique a anode ajouree
US11615948B1 (en) * 2021-11-08 2023-03-28 Hamilton Sundstrand Corporation Ion pump for use in low gravity environments

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2993638A (en) * 1957-07-24 1961-07-25 Varian Associates Electrical vacuum pump apparatus and method
DE1539132A1 (de) * 1966-01-18 1969-09-18 Leybold Heraeus Gmbh & Co Kg Ionenvakuumpumpe
JPS6011423B2 (ja) * 1982-03-25 1985-03-26 日本真空技術株式会社 カソ−ド面清浄化手段を有するスパツタイオンポンプ

Also Published As

Publication number Publication date
EP0200641A1 (fr) 1986-11-05
DE3665112D1 (en) 1989-09-21
FR2580866A1 (fr) 1986-10-24
EP0200641B1 (fr) 1989-08-16

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Legal Events

Date Code Title Description
TP Transmission of property
ST Notification of lapse