DE3665112D1 - Ion pump with a current proportional to the pumped quantity - Google Patents

Ion pump with a current proportional to the pumped quantity

Info

Publication number
DE3665112D1
DE3665112D1 DE8686400885T DE3665112T DE3665112D1 DE 3665112 D1 DE3665112 D1 DE 3665112D1 DE 8686400885 T DE8686400885 T DE 8686400885T DE 3665112 T DE3665112 T DE 3665112T DE 3665112 D1 DE3665112 D1 DE 3665112D1
Authority
DE
Germany
Prior art keywords
current proportional
ion pump
pumped quantity
pumped
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8686400885T
Other languages
English (en)
Inventor
Baud Patrice Le
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Areva NP SAS
Original Assignee
Novatome SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Novatome SA filed Critical Novatome SA
Application granted granted Critical
Publication of DE3665112D1 publication Critical patent/DE3665112D1/de
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
DE8686400885T 1985-04-23 1986-04-23 Ion pump with a current proportional to the pumped quantity Expired DE3665112D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8506160A FR2580866B1 (fr) 1985-04-23 1985-04-23 Pompe ionique a courant proportionnel au debit

Publications (1)

Publication Number Publication Date
DE3665112D1 true DE3665112D1 (en) 1989-09-21

Family

ID=9318571

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8686400885T Expired DE3665112D1 (en) 1985-04-23 1986-04-23 Ion pump with a current proportional to the pumped quantity

Country Status (3)

Country Link
EP (1) EP0200641B1 (de)
DE (1) DE3665112D1 (de)
FR (1) FR2580866B1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2740607B1 (fr) * 1995-10-27 1997-11-21 Commissariat Energie Atomique Pompe ionique a anode ajouree
US11615948B1 (en) * 2021-11-08 2023-03-28 Hamilton Sundstrand Corporation Ion pump for use in low gravity environments

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2993638A (en) * 1957-07-24 1961-07-25 Varian Associates Electrical vacuum pump apparatus and method
DE1539132A1 (de) * 1966-01-18 1969-09-18 Leybold Heraeus Gmbh & Co Kg Ionenvakuumpumpe
JPS6011423B2 (ja) * 1982-03-25 1985-03-26 日本真空技術株式会社 カソ−ド面清浄化手段を有するスパツタイオンポンプ

Also Published As

Publication number Publication date
EP0200641A1 (de) 1986-11-05
FR2580866B1 (fr) 1989-01-06
FR2580866A1 (fr) 1986-10-24
EP0200641B1 (de) 1989-08-16

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: FRAMATOME, S.A., COURBEVOIE, FR

8328 Change in the person/name/address of the agent

Free format text: BEETZ, R., DIPL.-ING. DR.-ING. TIMPE, W., DR.-ING. SIEGFRIED, J., DIPL.-ING. SCHMITT-FUMIAN, W., PROF. DIPL.-CHEM. DR.RER.NAT. MAYR, C., DIPL.-PHYS.DR.RER.NAT., PAT.-ANWAELTE, 8000 MUENCHEN

8339 Ceased/non-payment of the annual fee