FR2576426B1 - Miroir deformable - Google Patents

Miroir deformable

Info

Publication number
FR2576426B1
FR2576426B1 FR868600758A FR8600758A FR2576426B1 FR 2576426 B1 FR2576426 B1 FR 2576426B1 FR 868600758 A FR868600758 A FR 868600758A FR 8600758 A FR8600758 A FR 8600758A FR 2576426 B1 FR2576426 B1 FR 2576426B1
Authority
FR
France
Prior art keywords
deformable mirror
deformable
mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR868600758A
Other languages
English (en)
Other versions
FR2576426A1 (fr
Inventor
Helmut Kriz
Hansjorg Stadler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Diehl Verwaltungs Stiftung
Original Assignee
Diehl GmbH and Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Diehl GmbH and Co filed Critical Diehl GmbH and Co
Publication of FR2576426A1 publication Critical patent/FR2576426A1/fr
Application granted granted Critical
Publication of FR2576426B1 publication Critical patent/FR2576426B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/06—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the phase of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0825—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a flexible sheet or membrane, e.g. for varying the focus
FR868600758A 1985-01-23 1986-01-21 Miroir deformable Expired - Fee Related FR2576426B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19853502025 DE3502025A1 (de) 1985-01-23 1985-01-23 Verformbarer spiegel

Publications (2)

Publication Number Publication Date
FR2576426A1 FR2576426A1 (fr) 1986-07-25
FR2576426B1 true FR2576426B1 (fr) 1990-04-27

Family

ID=6260466

Family Applications (1)

Application Number Title Priority Date Filing Date
FR868600758A Expired - Fee Related FR2576426B1 (fr) 1985-01-23 1986-01-21 Miroir deformable

Country Status (5)

Country Link
US (1) US4679915A (fr)
DE (1) DE3502025A1 (fr)
FR (1) FR2576426B1 (fr)
GB (1) GB2170323B (fr)
IL (1) IL77550A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110764211A (zh) * 2019-10-21 2020-02-07 中国科学院国家天文台南京天文光学技术研究所 密集点阵分布的螺纹调节夹持机构

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5243620A (en) * 1982-08-10 1993-09-07 Wisotzki Juergen High power reflectors for laser technology
DE3740515A1 (de) * 1987-11-30 1989-06-08 Diehl Gmbh & Co Justiereinrichtung fuer deformierbaren spiegel
US4844603A (en) * 1987-12-24 1989-07-04 United Technologies Corporation Cooled flexible mirror arrangement
DE3808150A1 (de) * 1988-03-11 1989-09-28 Diehl Gmbh & Co Moduliereinrichtung fuer eine verformbare spiegelplatte
DE3809921A1 (de) * 1988-03-24 1989-10-12 Diehl Gmbh & Co Grossflaechiger hochenergie-laserspiegel und verfahren zum herstellen eines solchen spiegels
US4944580A (en) * 1988-07-27 1990-07-31 Thermo Electron Technologies Corp. Active segmented mirror including a plurality of piezoelectric drivers
US4940318A (en) * 1988-11-03 1990-07-10 Itek Corporation Gradient membrane deformable mirror having replaceable actuators
DE3900467C2 (de) * 1989-01-10 1995-09-07 Trumpf Lasertechnik Gmbh Vorrichtung mit einem Spiegelkopf
DE3916264A1 (de) * 1989-05-18 1990-11-22 Diehl Gmbh & Co Einrichtung zur strahlfuehrung bei der laser-werkstueckbearbeitung
US4906087A (en) * 1989-06-16 1990-03-06 Litton Systems, Inc. Magneto-retractive deformable mirror
US5037184A (en) * 1989-12-18 1991-08-06 United Technologies Corporation Deformable mirror actuator attachment
US5204784A (en) * 1990-12-06 1993-04-20 The United States Of America As Represented By The Secretary Of The Air Force Deformable mirror with pneumatic actuator pre-load
DE4108419C2 (de) * 1991-03-15 1995-03-16 Diehl Gmbh & Co Einrichtung zur Beeinflussung der Divergenz eines Laserstrahles
DE4137832A1 (de) * 1991-11-16 1993-05-19 Kugler Gmbh Feinmechanik & Opt Vorrichtung zum lagern einer gesteuert deformierbaren platte geringer dicke, insbesondere eines spiegels als reflektionseinrichtung fuer laserstrahlen o. dgl.
DE4138557A1 (de) * 1991-11-23 1993-05-27 Diehl Gmbh & Co Deformierbarer spiegel
DE4208229A1 (de) * 1992-03-14 1993-09-16 Krupp Industrietech Formeinstellbarer teleskopspiegel
US5210653A (en) * 1992-06-08 1993-05-11 Schell John D External actuator for a deformable mirror
WO1993025929A1 (fr) * 1992-06-08 1993-12-23 United Technologies Corporation Dispositif coaxial integre de commande et de retraction d'un miroir deformable
DE4304059A1 (de) * 1993-02-11 1994-08-18 Diehl Gmbh & Co Spiegeleinrichtung mit einem deformierbaren Spiegelelement
US5359252A (en) * 1993-03-30 1994-10-25 The United States Of America As Represented By The United States Department Of Energy Lead magnesium niobate actuator for micropositioning
DE9409869U1 (de) * 1994-06-17 1995-10-12 Diehl Gmbh & Co Deformierbarer Spiegel, insbesondere für eine Laserstrahl-Materialbearbeitungseinrichtung
DE19725353B4 (de) * 1997-06-16 2004-07-01 Trumpf Gmbh & Co. Einrichtung zur Strahlbeeinflussung eines Laserstrahls
DE19909450A1 (de) * 1999-03-04 2000-09-07 Bosch Gmbh Robert Piezoelektrischer Aktor
DE10002437A1 (de) * 2000-01-21 2001-08-16 Bosch Gmbh Robert Piezoaktor
US6407363B2 (en) 2000-03-30 2002-06-18 Electro Scientific Industries, Inc. Laser system and method for single press micromachining of multilayer workpieces
DE10160893A1 (de) 2001-12-12 2003-07-17 Diehl Munitionssysteme Gmbh Verformbarer Spiegel
US6803994B2 (en) * 2002-06-21 2004-10-12 Nikon Corporation Wavefront aberration correction system
US6897940B2 (en) * 2002-06-21 2005-05-24 Nikon Corporation System for correcting aberrations and distortions in EUV lithography
US20050236915A1 (en) * 2004-04-23 2005-10-27 Nikon Corporation Electromagnetic force actuator
US8292441B2 (en) 2009-02-10 2012-10-23 Optical Physics Company Deformable mirror
FR2958415B1 (fr) * 2010-04-06 2012-08-17 Alpao Miroir deformable a faible empreinte de collage et procede de fabrication d'un tel miroir
GB2490143B (en) * 2011-04-20 2013-03-13 Rolls Royce Plc Method of manufacturing a component
US10216093B2 (en) 2013-01-28 2019-02-26 Asml Netherlands B.V. Projection system and minor and radiation source for a lithographic apparatus
DE202013103001U1 (de) * 2013-07-08 2014-10-10 Zumtobel Lighting Gmbh Reflexionselement mit einstellbarem Reflexionswinkel

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3620606A (en) * 1968-03-10 1971-11-16 Nasa Optical system support apparatus
US4295710A (en) * 1979-09-04 1981-10-20 Rockwell International Corporation Deformable mirror with dither
US4408832A (en) * 1981-12-07 1983-10-11 United Technologies Corporation Mirror adjusting fixture
US4500170A (en) * 1982-06-14 1985-02-19 Ford Aerospace & Communications Corporation Gravity and temperature compensating reflector support actuator
DE3422232A1 (de) * 1984-06-15 1985-12-19 Diehl GmbH & Co, 8500 Nürnberg Verfahren und einrichtung zur ziel-suche und ziel-nachfuehrung mittels eines fokussierbaren strahles
FR2584824B1 (fr) * 1985-07-10 1987-09-25 Commissariat Energie Atomique Miroir deformable

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110764211A (zh) * 2019-10-21 2020-02-07 中国科学院国家天文台南京天文光学技术研究所 密集点阵分布的螺纹调节夹持机构
CN110764211B (zh) * 2019-10-21 2021-06-22 中国科学院国家天文台南京天文光学技术研究所 密集点阵分布的螺纹调节夹持机构

Also Published As

Publication number Publication date
IL77550A (en) 1989-10-31
GB2170323B (en) 1989-06-14
US4679915A (en) 1987-07-14
GB2170323A (en) 1986-07-30
FR2576426A1 (fr) 1986-07-25
DE3502025C2 (fr) 1991-10-31
GB8601260D0 (en) 1986-02-26
DE3502025A1 (de) 1986-07-24

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Legal Events

Date Code Title Description
ST Notification of lapse