FR2557930A1 - Pompe cryogenique perfectionnee. - Google Patents

Pompe cryogenique perfectionnee. Download PDF

Info

Publication number
FR2557930A1
FR2557930A1 FR8500096A FR8500096A FR2557930A1 FR 2557930 A1 FR2557930 A1 FR 2557930A1 FR 8500096 A FR8500096 A FR 8500096A FR 8500096 A FR8500096 A FR 8500096A FR 2557930 A1 FR2557930 A1 FR 2557930A1
Authority
FR
France
Prior art keywords
panel
pump according
temperature
envelope
cryogenic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
FR8500096A
Other languages
English (en)
French (fr)
Inventor
Richard Derek Amos
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOC Group Ltd
Original Assignee
BOC Group Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOC Group Ltd filed Critical BOC Group Ltd
Publication of FR2557930A1 publication Critical patent/FR2557930A1/fr
Pending legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
FR8500096A 1984-01-07 1985-01-04 Pompe cryogenique perfectionnee. Pending FR2557930A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB848400349A GB8400349D0 (en) 1984-01-07 1984-01-07 Cryogenic pumps

Publications (1)

Publication Number Publication Date
FR2557930A1 true FR2557930A1 (fr) 1985-07-12

Family

ID=10554663

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8500096A Pending FR2557930A1 (fr) 1984-01-07 1985-01-04 Pompe cryogenique perfectionnee.

Country Status (4)

Country Link
JP (1) JPS60228779A (enrdf_load_stackoverflow)
DE (1) DE3500320A1 (enrdf_load_stackoverflow)
FR (1) FR2557930A1 (enrdf_load_stackoverflow)
GB (2) GB8400349D0 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8526191D0 (en) * 1985-10-23 1985-11-27 Boc Group Plc Cryopumps
JP6466226B2 (ja) 2015-03-31 2019-02-06 住友重機械工業株式会社 クライオポンプ

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2455712A1 (de) * 1974-11-25 1976-08-12 Eckhard Kellner Cryo-sorptionspumpe
GB1603527A (en) * 1978-05-12 1981-11-25 Sciex Inc Multiple stage cryogenic pump and method of pumping
DE3216591A1 (de) * 1982-05-04 1983-11-10 Leybold-Heraeus GmbH, 5000 Köln Kryopumpe mit jalousieartigem baffle
EP0119451A1 (en) * 1983-02-14 1984-09-26 Helix Technology Corporation Multiport cryopump

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3360949A (en) * 1965-09-20 1968-01-02 Air Reduction Cryopumping configuration
DE1816981A1 (de) * 1968-01-02 1969-08-21 Internat Res & Dev Company Ltd Kryogenpumpe
DE2620880C2 (de) * 1976-05-11 1984-07-12 Leybold-Heraeus GmbH, 5000 Köln Kryopumpe
DE2830943C2 (de) * 1978-07-14 1986-06-12 Leybold-Heraeus GmbH, 5000 Köln Kryopumpenanordnung
US4311018A (en) * 1979-12-17 1982-01-19 Varian Associates, Inc. Cryogenic pump
US4438632A (en) * 1982-07-06 1984-03-27 Helix Technology Corporation Means for periodic desorption of a cryopump
US4449373A (en) * 1983-02-28 1984-05-22 Helix Technology Corporation Reduced vacuum cryopump

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2455712A1 (de) * 1974-11-25 1976-08-12 Eckhard Kellner Cryo-sorptionspumpe
GB1603527A (en) * 1978-05-12 1981-11-25 Sciex Inc Multiple stage cryogenic pump and method of pumping
DE3216591A1 (de) * 1982-05-04 1983-11-10 Leybold-Heraeus GmbH, 5000 Köln Kryopumpe mit jalousieartigem baffle
EP0119451A1 (en) * 1983-02-14 1984-09-26 Helix Technology Corporation Multiport cryopump

Also Published As

Publication number Publication date
JPH0451669B2 (enrdf_load_stackoverflow) 1992-08-19
GB8400349D0 (en) 1984-02-08
GB8500291D0 (en) 1985-02-13
GB2153914A (en) 1985-08-29
JPS60228779A (ja) 1985-11-14
GB2153914B (en) 1987-08-05
DE3500320A1 (de) 1985-08-01

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