FR2538110A1 - Jauge piezoresistive et son procede de fabrication - Google Patents
Jauge piezoresistive et son procede de fabrication Download PDFInfo
- Publication number
- FR2538110A1 FR2538110A1 FR8221445A FR8221445A FR2538110A1 FR 2538110 A1 FR2538110 A1 FR 2538110A1 FR 8221445 A FR8221445 A FR 8221445A FR 8221445 A FR8221445 A FR 8221445A FR 2538110 A1 FR2538110 A1 FR 2538110A1
- Authority
- FR
- France
- Prior art keywords
- piezoresistive
- gauge according
- organic compound
- support
- gauge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 7
- 238000000034 method Methods 0.000 title claims description 9
- 150000002894 organic compounds Chemical class 0.000 claims abstract description 18
- 230000005611 electricity Effects 0.000 claims abstract description 8
- 238000012546 transfer Methods 0.000 claims abstract description 7
- 150000001875 compounds Chemical class 0.000 claims description 16
- 239000004020 conductor Substances 0.000 claims description 9
- 238000000151 deposition Methods 0.000 claims description 8
- -1 radical ion salt Chemical class 0.000 claims description 8
- 239000011521 glass Substances 0.000 claims description 6
- 239000000843 powder Substances 0.000 claims description 5
- 150000003839 salts Chemical class 0.000 claims description 5
- PCCVSPMFGIFTHU-UHFFFAOYSA-N tetracyanoquinodimethane Chemical compound N#CC(C#N)=C1C=CC(=C(C#N)C#N)C=C1 PCCVSPMFGIFTHU-UHFFFAOYSA-N 0.000 claims description 5
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 4
- 229910052737 gold Inorganic materials 0.000 claims description 4
- 239000010931 gold Substances 0.000 claims description 4
- 239000000203 mixture Substances 0.000 claims description 4
- 238000007789 sealing Methods 0.000 claims description 4
- 229910052709 silver Inorganic materials 0.000 claims description 4
- 239000004332 silver Substances 0.000 claims description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- 229910045601 alloy Inorganic materials 0.000 claims description 3
- 239000000956 alloy Substances 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- 229920000642 polymer Polymers 0.000 claims description 3
- 239000004593 Epoxy Substances 0.000 claims description 2
- 239000003822 epoxy resin Substances 0.000 claims description 2
- 238000009413 insulation Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 claims description 2
- 229920000647 polyepoxide Polymers 0.000 claims description 2
- 239000010453 quartz Substances 0.000 claims description 2
- 150000003242 quaternary ammonium salts Chemical class 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- 238000007738 vacuum evaporation Methods 0.000 claims description 2
- 239000012808 vapor phase Substances 0.000 claims description 2
- 150000001768 cations Chemical class 0.000 claims 4
- 150000001649 bromium compounds Chemical group 0.000 claims 1
- 239000003795 chemical substances by application Substances 0.000 claims 1
- 239000003792 electrolyte Substances 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 claims 1
- BZWKPZBXAMTXNQ-UHFFFAOYSA-N sulfurocyanidic acid Chemical compound OS(=O)(=O)C#N BZWKPZBXAMTXNQ-UHFFFAOYSA-N 0.000 claims 1
- CPELXLSAUQHCOX-UHFFFAOYSA-M Bromide Chemical compound [Br-] CPELXLSAUQHCOX-UHFFFAOYSA-M 0.000 abstract 1
- HGOTVGUTJPNVDR-UHFFFAOYSA-N 2-(4,5-dimethyl-1,3-dithiol-2-ylidene)-4,5-dimethyl-1,3-dithiole Chemical compound S1C(C)=C(C)SC1=C1SC(C)=C(C)S1 HGOTVGUTJPNVDR-UHFFFAOYSA-N 0.000 description 10
- 230000008020 evaporation Effects 0.000 description 9
- 238000001704 evaporation Methods 0.000 description 9
- 239000010445 mica Substances 0.000 description 8
- 229910052618 mica group Inorganic materials 0.000 description 8
- 238000012360 testing method Methods 0.000 description 6
- 229920003319 Araldite® Polymers 0.000 description 5
- NLZUEZXRPGMBCV-UHFFFAOYSA-N Butylhydroxytoluene Chemical compound CC1=CC(C(C)(C)C)=C(O)C(C(C)(C)C)=C1 NLZUEZXRPGMBCV-UHFFFAOYSA-N 0.000 description 5
- 230000008021 deposition Effects 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 4
- 150000003254 radicals Chemical class 0.000 description 4
- 230000003068 static effect Effects 0.000 description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- 230000006835 compression Effects 0.000 description 3
- 238000007906 compression Methods 0.000 description 3
- 230000006837 decompression Effects 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 2
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 description 2
- 229910052794 bromium Inorganic materials 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 229910052801 chlorine Inorganic materials 0.000 description 2
- 239000000460 chlorine Substances 0.000 description 2
- 238000010668 complexation reaction Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000005292 diamagnetic effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 2
- IOLCXVTUBQKXJR-UHFFFAOYSA-M potassium bromide Chemical compound [K+].[Br-] IOLCXVTUBQKXJR-UHFFFAOYSA-M 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- XZPNVGKRRGOOMS-UHFFFAOYSA-N 10-methyl-5h-phenazine Chemical compound C1=CC=C2N(C)C3=CC=CC=C3NC2=C1 XZPNVGKRRGOOMS-UHFFFAOYSA-N 0.000 description 1
- YMWLPMGFZYFLRP-UHFFFAOYSA-N 2-(4,5-dimethyl-1,3-diselenol-2-ylidene)-4,5-dimethyl-1,3-diselenole Chemical compound [Se]1C(C)=C(C)[Se]C1=C1[Se]C(C)=C(C)[Se]1 YMWLPMGFZYFLRP-UHFFFAOYSA-N 0.000 description 1
- VRSXBMGXAHSMFB-UHFFFAOYSA-N 2-(5,6-dihydro-4h-cyclopenta[d][1,3]diselenol-2-ylidene)-5,6-dihydro-4h-cyclopenta[d][1,3]diselenole Chemical compound C1CCC([Se]2)=C1[Se]C2=C([Se]1)[Se]C2=C1CCC2 VRSXBMGXAHSMFB-UHFFFAOYSA-N 0.000 description 1
- DTJPUCUJANTIIU-UHFFFAOYSA-N 2-(5,6-dihydro-4h-cyclopenta[d][1,3]dithiol-2-ylidene)-5,6-dihydro-4h-cyclopenta[d][1,3]dithiole Chemical compound C1CCC(S2)=C1SC2=C(S1)SC2=C1CCC2 DTJPUCUJANTIIU-UHFFFAOYSA-N 0.000 description 1
- KBZALDXXIMXRBJ-UHFFFAOYSA-N 5-methylphenazin-5-ium Chemical compound C1=CC=C2[N+](C)=C(C=CC=C3)C3=NC2=C1 KBZALDXXIMXRBJ-UHFFFAOYSA-N 0.000 description 1
- 229910001316 Ag alloy Inorganic materials 0.000 description 1
- 244000062175 Fittonia argyroneura Species 0.000 description 1
- CPELXLSAUQHCOX-UHFFFAOYSA-N Hydrogen bromide Chemical compound Br CPELXLSAUQHCOX-UHFFFAOYSA-N 0.000 description 1
- 241001061127 Thione Species 0.000 description 1
- DZBUGLKDJFMEHC-UHFFFAOYSA-O acridine;hydron Chemical class C1=CC=CC2=CC3=CC=CC=C3[NH+]=C21 DZBUGLKDJFMEHC-UHFFFAOYSA-O 0.000 description 1
- 230000009056 active transport Effects 0.000 description 1
- 125000002947 alkylene group Chemical group 0.000 description 1
- 238000012669 compression test Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 150000002118 epoxides Chemical class 0.000 description 1
- XEOSBIMHSUFHQH-UHFFFAOYSA-N fulvalene Chemical compound C1=CC=CC1=C1C=CC=C1 XEOSBIMHSUFHQH-UHFFFAOYSA-N 0.000 description 1
- PQTCMBYFWMFIGM-UHFFFAOYSA-N gold silver Chemical compound [Ag].[Au] PQTCMBYFWMFIGM-UHFFFAOYSA-N 0.000 description 1
- 230000005283 ground state Effects 0.000 description 1
- 150000004820 halides Chemical class 0.000 description 1
- 125000004836 hexamethylene group Chemical group [H]C([H])([*:2])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[*:1] 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- SMWDFEZZVXVKRB-UHFFFAOYSA-O hydron;quinoline Chemical class [NH+]1=CC=CC2=CC=CC=C21 SMWDFEZZVXVKRB-UHFFFAOYSA-O 0.000 description 1
- 230000002706 hydrostatic effect Effects 0.000 description 1
- 150000008040 ionic compounds Chemical class 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229920003223 poly(pyromellitimide-1,4-diphenyl ether) Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 125000002577 pseudohalo group Chemical group 0.000 description 1
- 150000005838 radical anions Chemical class 0.000 description 1
- 150000005839 radical cations Chemical class 0.000 description 1
- 150000005837 radical ions Chemical class 0.000 description 1
- 238000006479 redox reaction Methods 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 230000027756 respiratory electron transport chain Effects 0.000 description 1
- 229910052711 selenium Inorganic materials 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 238000000859 sublimation Methods 0.000 description 1
- 230000008022 sublimation Effects 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 125000003698 tetramethyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C10/00—Adjustable resistors
- H01C10/10—Adjustable resistors adjustable by mechanical pressure or force
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Measuring Fluid Pressure (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR8221445A FR2538110A1 (fr) | 1982-12-21 | 1982-12-21 | Jauge piezoresistive et son procede de fabrication |
| EP83402464A EP0112257B1 (fr) | 1982-12-21 | 1983-12-19 | Jauge piézorésistive et son procédé de fabrication |
| DE8383402464T DE3370862D1 (en) | 1982-12-21 | 1983-12-19 | Piezo-resistive gauge and process for its production |
| US06/562,523 US4535317A (en) | 1982-12-21 | 1983-12-19 | Piezoresistive gauge formed by an electrically conductive organic compound |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR8221445A FR2538110A1 (fr) | 1982-12-21 | 1982-12-21 | Jauge piezoresistive et son procede de fabrication |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2538110A1 true FR2538110A1 (fr) | 1984-06-22 |
| FR2538110B1 FR2538110B1 (enExample) | 1985-05-24 |
Family
ID=9280346
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR8221445A Granted FR2538110A1 (fr) | 1982-12-21 | 1982-12-21 | Jauge piezoresistive et son procede de fabrication |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US4535317A (enExample) |
| EP (1) | EP0112257B1 (enExample) |
| DE (1) | DE3370862D1 (enExample) |
| FR (1) | FR2538110A1 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2613169B1 (fr) * | 1987-03-24 | 1989-06-09 | Commissariat Energie Atomique | Procede microlithographique de realisation de circuits utilisant des films organiques, conducteurs, sensibles aux rayonnements electromagnetiques et aux particules chargees et les circuits et composants obtenus par ce procede |
| GB2222258A (en) * | 1988-07-29 | 1990-02-28 | David Coates | Tactile pressure sensor |
| US5099738A (en) * | 1989-01-03 | 1992-03-31 | Hotz Instruments Technology, Inc. | MIDI musical translator |
| ES2299392B1 (es) * | 2006-11-14 | 2009-04-16 | Consejo Superior Investigaciones Cientificas | Dispositivo sensor organico y sus aplicaciones. |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0065419A1 (en) * | 1981-05-16 | 1982-11-24 | Crystalate Electronics Limited | Strain gauge |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4026905A (en) * | 1972-12-26 | 1977-05-31 | Monsanto Company | Electrically conducting organic salts |
| JPS56106302A (en) * | 1980-01-24 | 1981-08-24 | Matsushita Electric Industrial Co Ltd | Electrode for conductive high molecular material |
-
1982
- 1982-12-21 FR FR8221445A patent/FR2538110A1/fr active Granted
-
1983
- 1983-12-19 DE DE8383402464T patent/DE3370862D1/de not_active Expired
- 1983-12-19 US US06/562,523 patent/US4535317A/en not_active Expired - Fee Related
- 1983-12-19 EP EP83402464A patent/EP0112257B1/fr not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0065419A1 (en) * | 1981-05-16 | 1982-11-24 | Crystalate Electronics Limited | Strain gauge |
Non-Patent Citations (1)
| Title |
|---|
| SOLID STATE COMMUNICATIONS, vol. 28, no. 1, octobre 1978, pages 113-117, Oxford, GB * |
Also Published As
| Publication number | Publication date |
|---|---|
| DE3370862D1 (en) | 1987-05-14 |
| US4535317A (en) | 1985-08-13 |
| EP0112257A1 (fr) | 1984-06-27 |
| EP0112257B1 (fr) | 1987-04-08 |
| FR2538110B1 (enExample) | 1985-05-24 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |