FR2526003A1 - Procede de fabrication de silane a partir de trichlorosilane - Google Patents
Procede de fabrication de silane a partir de trichlorosilane Download PDFInfo
- Publication number
- FR2526003A1 FR2526003A1 FR8207620A FR8207620A FR2526003A1 FR 2526003 A1 FR2526003 A1 FR 2526003A1 FR 8207620 A FR8207620 A FR 8207620A FR 8207620 A FR8207620 A FR 8207620A FR 2526003 A1 FR2526003 A1 FR 2526003A1
- Authority
- FR
- France
- Prior art keywords
- compound
- trichlorosilane
- column
- silane
- dichlorosilane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 title claims abstract description 34
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 title claims abstract description 31
- 229910000077 silane Inorganic materials 0.000 title claims abstract description 28
- 238000000034 method Methods 0.000 title claims abstract description 27
- 239000005052 trichlorosilane Substances 0.000 title claims abstract description 27
- 150000001875 compounds Chemical class 0.000 claims abstract description 47
- MROCJMGDEKINLD-UHFFFAOYSA-N dichlorosilane Chemical compound Cl[SiH2]Cl MROCJMGDEKINLD-UHFFFAOYSA-N 0.000 claims abstract description 39
- 239000000203 mixture Substances 0.000 claims abstract description 26
- 238000007323 disproportionation reaction Methods 0.000 claims abstract description 20
- ODUCDPQEXGNKDN-UHFFFAOYSA-N nitroxyl Chemical group O=N ODUCDPQEXGNKDN-UHFFFAOYSA-N 0.000 claims abstract description 15
- 239000005046 Chlorosilane Substances 0.000 claims abstract description 12
- 238000004519 manufacturing process Methods 0.000 claims abstract description 9
- 238000007614 solvation Methods 0.000 claims abstract description 8
- -1 ether-oxides Chemical class 0.000 claims description 16
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 claims description 12
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 claims description 12
- 239000003085 diluting agent Substances 0.000 claims description 12
- KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical class Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 claims description 10
- 238000009835 boiling Methods 0.000 claims description 9
- 125000004432 carbon atom Chemical group C* 0.000 claims description 9
- AVQQQNCBBIEMEU-UHFFFAOYSA-N 1,1,3,3-tetramethylurea Chemical compound CN(C)C(=O)N(C)C AVQQQNCBBIEMEU-UHFFFAOYSA-N 0.000 claims description 8
- RFFLAFLAYFXFSW-UHFFFAOYSA-N 1,2-dichlorobenzene Chemical compound ClC1=CC=CC=C1Cl RFFLAFLAYFXFSW-UHFFFAOYSA-N 0.000 claims description 8
- 239000004215 Carbon black (E152) Substances 0.000 claims description 8
- 229930195733 hydrocarbon Natural products 0.000 claims description 8
- 239000008246 gaseous mixture Substances 0.000 claims description 7
- 239000007791 liquid phase Substances 0.000 claims description 6
- XDTMQSROBMDMFD-UHFFFAOYSA-N Cyclohexane Chemical compound C1CCCCC1 XDTMQSROBMDMFD-UHFFFAOYSA-N 0.000 claims description 5
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 claims description 5
- 150000001338 aliphatic hydrocarbons Chemical class 0.000 claims description 4
- 150000004945 aromatic hydrocarbons Chemical class 0.000 claims description 4
- 239000003153 chemical reaction reagent Substances 0.000 claims description 4
- SNDGLCYYBKJSOT-UHFFFAOYSA-N 1,1,3,3-tetrabutylurea Chemical compound CCCCN(CCCC)C(=O)N(CCCC)CCCC SNDGLCYYBKJSOT-UHFFFAOYSA-N 0.000 claims description 3
- OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 claims description 3
- 239000011541 reaction mixture Substances 0.000 claims description 3
- ZFPGARUNNKGOBB-UHFFFAOYSA-N 1-Ethyl-2-pyrrolidinone Chemical compound CCN1CCCC1=O ZFPGARUNNKGOBB-UHFFFAOYSA-N 0.000 claims description 2
- 150000004657 carbamic acid derivatives Chemical class 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims description 2
- 150000002576 ketones Chemical class 0.000 claims description 2
- 239000007788 liquid Substances 0.000 claims description 2
- 208000004880 Polyuria Diseases 0.000 claims 1
- 238000004821 distillation Methods 0.000 abstract description 8
- 238000000926 separation method Methods 0.000 abstract description 6
- 229910052710 silicon Inorganic materials 0.000 abstract description 2
- 239000010703 silicon Substances 0.000 abstract description 2
- 229910018540 Si C Inorganic materials 0.000 description 30
- 238000006243 chemical reaction Methods 0.000 description 16
- 239000000047 product Substances 0.000 description 10
- 239000003054 catalyst Substances 0.000 description 5
- 238000010992 reflux Methods 0.000 description 5
- 230000003197 catalytic effect Effects 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 150000003254 radicals Chemical class 0.000 description 4
- 239000007795 chemical reaction product Substances 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 239000012071 phase Substances 0.000 description 3
- QPFMBZIOSGYJDE-UHFFFAOYSA-N 1,1,2,2-tetrachloroethane Chemical compound ClC(Cl)C(Cl)Cl QPFMBZIOSGYJDE-UHFFFAOYSA-N 0.000 description 2
- UWHSPZZUAYSGTB-UHFFFAOYSA-N 1,1,3,3-tetraethylurea Chemical compound CCN(CC)C(=O)N(CC)CC UWHSPZZUAYSGTB-UHFFFAOYSA-N 0.000 description 2
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 description 2
- 125000000217 alkyl group Chemical group 0.000 description 2
- MVPPADPHJFYWMZ-UHFFFAOYSA-N chlorobenzene Chemical compound ClC1=CC=CC=C1 MVPPADPHJFYWMZ-UHFFFAOYSA-N 0.000 description 2
- 238000009833 condensation Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- 238000004817 gas chromatography Methods 0.000 description 2
- 239000007792 gaseous phase Substances 0.000 description 2
- 239000012299 nitrogen atmosphere Substances 0.000 description 2
- 239000005049 silicon tetrachloride Substances 0.000 description 2
- AJDIZQLSFPQPEY-UHFFFAOYSA-N 1,1,2-Trichlorotrifluoroethane Chemical compound FC(F)(Cl)C(F)(Cl)Cl AJDIZQLSFPQPEY-UHFFFAOYSA-N 0.000 description 1
- IHBLBMDDUQOYLA-UHFFFAOYSA-N 1-octadecyl-3-[4-[[4-(octadecylcarbamoylamino)phenyl]methyl]phenyl]urea Chemical compound C1=CC(NC(=O)NCCCCCCCCCCCCCCCCCC)=CC=C1CC1=CC=C(NC(=O)NCCCCCCCCCCCCCCCCCC)C=C1 IHBLBMDDUQOYLA-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 1
- ONYVQKPEJBHLCI-UHFFFAOYSA-N ClC1=C(C=CC=C1)Cl.CN(C(N(C)C)=O)C Chemical compound ClC1=C(C=CC=C1)Cl.CN(C(N(C)C)=O)C ONYVQKPEJBHLCI-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 101100386054 Saccharomyces cerevisiae (strain ATCC 204508 / S288c) CYS3 gene Proteins 0.000 description 1
- CIUQDSCDWFSTQR-UHFFFAOYSA-N [C]1=CC=CC=C1 Chemical compound [C]1=CC=CC=C1 CIUQDSCDWFSTQR-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 239000003957 anion exchange resin Substances 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 235000013877 carbamide Nutrition 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 235000011089 carbon dioxide Nutrition 0.000 description 1
- 239000003610 charcoal Substances 0.000 description 1
- 238000001944 continuous distillation Methods 0.000 description 1
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 239000012263 liquid product Substances 0.000 description 1
- WCYWZMWISLQXQU-UHFFFAOYSA-N methyl Chemical compound [CH3] WCYWZMWISLQXQU-UHFFFAOYSA-N 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 239000003507 refrigerant Substances 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- FDNAPBUWERUEDA-UHFFFAOYSA-N silicon tetrachloride Chemical compound Cl[Si](Cl)(Cl)Cl FDNAPBUWERUEDA-UHFFFAOYSA-N 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 101150035983 str1 gene Proteins 0.000 description 1
- 150000003512 tertiary amines Chemical class 0.000 description 1
- 150000003672 ureas Chemical class 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/04—Hydrides of silicon
- C01B33/043—Monosilane
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/08—Compounds containing halogen
- C01B33/107—Halogenated silanes
- C01B33/10773—Halogenated silanes obtained by disproportionation and molecular rearrangement of halogenated silanes
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Silicon Compounds (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR8207620A FR2526003A1 (fr) | 1982-05-03 | 1982-05-03 | Procede de fabrication de silane a partir de trichlorosilane |
| EP19830400787 EP0093640B1 (fr) | 1982-05-03 | 1983-04-21 | Procédé de fabrication de silane à partir de trichlorosilane |
| DE8383400787T DE3364499D1 (en) | 1982-05-03 | 1983-04-21 | Process for the manufacture of silane from trichlorosilane |
| JP7631283A JPS5954617A (ja) | 1982-05-03 | 1983-05-02 | トリクロルシランからシランを製造する方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR8207620A FR2526003A1 (fr) | 1982-05-03 | 1982-05-03 | Procede de fabrication de silane a partir de trichlorosilane |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2526003A1 true FR2526003A1 (fr) | 1983-11-04 |
| FR2526003B1 FR2526003B1 (en:Method) | 1984-06-29 |
Family
ID=9273645
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR8207620A Granted FR2526003A1 (fr) | 1982-05-03 | 1982-05-03 | Procede de fabrication de silane a partir de trichlorosilane |
Country Status (4)
| Country | Link |
|---|---|
| EP (1) | EP0093640B1 (en:Method) |
| JP (1) | JPS5954617A (en:Method) |
| DE (1) | DE3364499D1 (en:Method) |
| FR (1) | FR2526003A1 (en:Method) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19860146A1 (de) | 1998-12-24 | 2000-06-29 | Bayer Ag | Verfahren und Anlage zur Herstellung von Silan |
| DE10017168A1 (de) * | 2000-04-07 | 2001-10-11 | Bayer Ag | Verfahren und Anlage zur Herstellung von Silan |
| DE102004045245B4 (de) * | 2004-09-17 | 2007-11-15 | Degussa Gmbh | Vorrichtung und Verfahren zur Herstellung von Silanen |
| DE102007028254A1 (de) * | 2007-06-20 | 2008-12-24 | Wacker Chemie Ag | Verfahren zur Herstellung von SiH-haltigen Silanen |
| CN112158848B (zh) * | 2020-08-24 | 2024-11-22 | 中国恩菲工程技术有限公司 | 四氯化硅冷氢化系统 |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2118725A5 (en:Method) * | 1970-12-17 | 1972-07-28 | Union Carbide Corp | |
| FR2261977A1 (en:Method) * | 1974-02-25 | 1975-09-19 | Union Carbide Corp | |
| FR2290448A1 (fr) * | 1974-11-07 | 1976-06-04 | Rhone Poulenc Ind | Dismutation du trichlorosilane en presence de tetraalcoyluree |
| FR2290447A1 (fr) * | 1974-11-07 | 1976-06-04 | Rhone Poulenc Ind | Dismutation du trichlorosilane en presence de pyrrolidone n substituee |
| JPS5617918A (en) * | 1979-07-23 | 1981-02-20 | Chisso Corp | Manufacture of dichlorosilane |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5514045A (en) * | 1978-07-17 | 1980-01-31 | Aaru Rabendaa Aadeisu | Concurrent system matter transmission gear |
| JPS6042751B2 (ja) * | 1978-07-19 | 1985-09-25 | 株式会社日立製作所 | 電動ミシン |
| FR2503125A1 (fr) * | 1981-04-03 | 1982-10-08 | Rhone Poulenc Spec Chim | Procede de fabrication de silane |
-
1982
- 1982-05-03 FR FR8207620A patent/FR2526003A1/fr active Granted
-
1983
- 1983-04-21 DE DE8383400787T patent/DE3364499D1/de not_active Expired
- 1983-04-21 EP EP19830400787 patent/EP0093640B1/fr not_active Expired
- 1983-05-02 JP JP7631283A patent/JPS5954617A/ja active Granted
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2118725A5 (en:Method) * | 1970-12-17 | 1972-07-28 | Union Carbide Corp | |
| FR2261977A1 (en:Method) * | 1974-02-25 | 1975-09-19 | Union Carbide Corp | |
| FR2290448A1 (fr) * | 1974-11-07 | 1976-06-04 | Rhone Poulenc Ind | Dismutation du trichlorosilane en presence de tetraalcoyluree |
| FR2290447A1 (fr) * | 1974-11-07 | 1976-06-04 | Rhone Poulenc Ind | Dismutation du trichlorosilane en presence de pyrrolidone n substituee |
| JPS5617918A (en) * | 1979-07-23 | 1981-02-20 | Chisso Corp | Manufacture of dichlorosilane |
Non-Patent Citations (1)
| Title |
|---|
| CHEMICAL ABSTRACTS, vol.95, no.4, page 119, colonne de gauche, résumé no.27241c & JP - A - 81 17 918 (CHISSO CORP.)(20-02-1981) * |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5954617A (ja) | 1984-03-29 |
| EP0093640B1 (fr) | 1986-07-16 |
| EP0093640A1 (fr) | 1983-11-09 |
| DE3364499D1 (en) | 1986-08-21 |
| FR2526003B1 (en:Method) | 1984-06-29 |
| JPS6212168B2 (en:Method) | 1987-03-17 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |