FR2523319B1 - Appareil de mise au point automatique - Google Patents

Appareil de mise au point automatique

Info

Publication number
FR2523319B1
FR2523319B1 FR8303783A FR8303783A FR2523319B1 FR 2523319 B1 FR2523319 B1 FR 2523319B1 FR 8303783 A FR8303783 A FR 8303783A FR 8303783 A FR8303783 A FR 8303783A FR 2523319 B1 FR2523319 B1 FR 2523319B1
Authority
FR
France
Prior art keywords
automatic focusing
focusing apparatus
automatic
focusing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8303783A
Other languages
English (en)
Other versions
FR2523319A1 (fr
Inventor
Tomohide Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Publication of FR2523319A1 publication Critical patent/FR2523319A1/fr
Application granted granted Critical
Publication of FR2523319B1 publication Critical patent/FR2523319B1/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
    • G03F9/7023—Aligning or positioning in direction perpendicular to substrate surface
    • G03F9/7026—Focusing

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automatic Focus Adjustment (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
FR8303783A 1982-03-08 1983-03-08 Appareil de mise au point automatique Expired FR2523319B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57035260A JPS58153327A (ja) 1982-03-08 1982-03-08 パタ−ン検査装置

Publications (2)

Publication Number Publication Date
FR2523319A1 FR2523319A1 (fr) 1983-09-16
FR2523319B1 true FR2523319B1 (fr) 1986-09-26

Family

ID=12436833

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8303783A Expired FR2523319B1 (fr) 1982-03-08 1983-03-08 Appareil de mise au point automatique

Country Status (4)

Country Link
US (1) US4577095A (fr)
JP (1) JPS58153327A (fr)
DE (1) DE3308191A1 (fr)
FR (1) FR2523319B1 (fr)

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0610694B2 (ja) * 1985-04-12 1994-02-09 株式会社日立製作所 自動焦点合せ方法及び装置
US4769551A (en) * 1986-06-27 1988-09-06 Nippon Kogaku K.K. Pattern detecting apparatus utilizing energy beam
US4978220A (en) * 1988-03-04 1990-12-18 Cimflex Teknowledge Corporation Compensating system for inspecting potentially warped printed circuit boards
US4931630A (en) * 1989-04-04 1990-06-05 Wyko Corporation Apparatus and method for automatically focusing an interference microscope
JPH03194673A (ja) * 1989-12-22 1991-08-26 Sumitomo Electric Ind Ltd 記号読取装置
US5122648A (en) * 1990-06-01 1992-06-16 Wyko Corporation Apparatus and method for automatically focusing an interference microscope
WO1992006359A1 (fr) * 1990-10-09 1992-04-16 Metronics, Inc. Procede et appareil d'autofocalisation a laser
US5144122A (en) * 1990-10-19 1992-09-01 Square D Company Scanning radiation sensor with automatic focus control for optimal focus and method
US5912699A (en) * 1992-02-18 1999-06-15 Neopath, Inc. Method and apparatus for rapid capture of focused microscopic images
WO1993016439A1 (fr) * 1992-02-18 1993-08-19 Neopath, Inc. Procede et appareil de prise rapide d'images microscopiques focalisees
DE4226523B4 (de) * 1992-08-11 2005-01-05 Universität Stuttgart Verfahren und Vorrichtung zum automatischen Fokussieren auf Objekte
IL111229A (en) * 1994-10-10 1998-06-15 Nova Measuring Instr Ltd Autofocusing microscope
US5642433A (en) * 1995-07-31 1997-06-24 Neopath, Inc. Method and apparatus for image contrast quality evaluation
US5784164A (en) * 1997-03-20 1998-07-21 Zygo Corporation Method and apparatus for automatically and simultaneously determining best focus and orientation of objects to be measured by broad-band interferometric means
DE19726696A1 (de) * 1997-06-24 1999-01-07 Jenoptik Jena Gmbh Verfahren zur Fokussierung bei der Abbildung strukturierter Oberflächen von scheibenförmigen Objekten
US6677565B1 (en) 1998-08-18 2004-01-13 Veeco Tucson Inc. High speed autofocus and tilt for an optical imaging system
DE10112639A1 (de) * 2001-03-16 2002-09-19 Zeiss Carl Jena Gmbh Mikroskop mit Autofokussiereinrichtung
JP2002287017A (ja) * 2001-03-28 2002-10-03 Fuji Photo Optical Co Ltd 撮影レンズのピント状態検出装置
JP4215454B2 (ja) * 2001-07-12 2009-01-28 株式会社日立製作所 試料の凹凸判定方法、及び荷電粒子線装置
DE10233087A1 (de) * 2002-07-19 2004-02-05 Roche Diagnostics Gmbh Reflexionsphotometrisches Analysesystem
US20080135774A1 (en) * 2006-12-08 2008-06-12 Asml Netherlands B.V. Scatterometer, a lithographic apparatus and a focus analysis method
DE102007003059A1 (de) * 2007-01-15 2008-07-24 Technische Universität Ilmenau Verfahren zur objektivierten Fokussierung für die optische Längenmesstechnik
EP2048543B1 (fr) * 2007-10-09 2013-12-04 ASML Netherlands B.V. Capteur de foyer optique, appareil d'inspection et appareil lithographique
GB201113071D0 (en) * 2011-07-29 2011-09-14 Ffei Ltd Method and apparatus for image scanning
CN102566023B (zh) * 2012-01-11 2015-09-30 麦克奥迪实业集团有限公司 一种数字切片实时扫描自动聚焦系统及其方法
CN103323939A (zh) * 2012-03-20 2013-09-25 麦克奥迪实业集团有限公司 数字切片实时扫描自动聚焦系统及方法
US20140168402A1 (en) * 2012-12-13 2014-06-19 Vala Sciences, Inc. Continuous-Scanning Image Acquisition in Automated Microscopy Using Reflective Autofocus
US9689804B2 (en) * 2013-12-23 2017-06-27 Kla-Tencor Corporation Multi-channel backside wafer inspection
US10014228B2 (en) * 2014-11-24 2018-07-03 Rudolph Technologies, Inc. Method and apparatus to assist the processing of deformed substrates
CN108351506B (zh) 2015-11-11 2020-12-04 斯科皮奥实验室有限公司 用于计算显微镜的自动聚焦系统
CN105866132B (zh) * 2016-05-27 2018-08-24 中国铁道科学研究院 一种车载信号机外观检测系统及方法
CN105866131B (zh) * 2016-05-27 2018-03-27 中国铁道科学研究院 一种车载隧道内通信漏缆外观检测系统及方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1015186A (en) * 1973-09-21 1977-08-09 Lynn G. Amos Automatic focusing system
US3967110A (en) * 1973-09-21 1976-06-29 Corning Glass Works Automatic focusing system
US4012634A (en) * 1974-04-29 1977-03-15 Geometric Data Corporation Automatic focusing system including quantizing means
JPS53116852A (en) * 1977-03-23 1978-10-12 Olympus Optical Co Ltd Automatic focus adjusting system
JPS5413330A (en) * 1977-07-01 1979-01-31 Olympus Optical Co Ltd Automatic focus adjusting system
US4230940A (en) * 1977-07-22 1980-10-28 Tokyo Shibaura Denki Kabushiki Kaisha Automatic focusing apparatus
US4220850A (en) * 1978-09-29 1980-09-02 Abbott Laboratories Bimodal autofocusing apparatus
JPS5576312A (en) * 1978-12-04 1980-06-09 Canon Inc Focus detecting system of image
US4349254A (en) * 1979-02-13 1982-09-14 Asahi Kogaku Kogyo Kabushiki Kaisha Camera focus detecting device
DE3005044C2 (de) * 1979-02-13 1984-09-20 Asahi Kogaku Kogyo K.K., Tokio/Tokyo Fokussierungsermittlungseinrichtung für eine Kamera
JPS55155308A (en) * 1979-05-23 1980-12-03 Canon Inc Focusing position detecting system

Also Published As

Publication number Publication date
FR2523319A1 (fr) 1983-09-16
DE3308191A1 (de) 1983-09-22
US4577095A (en) 1986-03-18
JPS58153327A (ja) 1983-09-12

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Legal Events

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CD Change of name or company name
ST Notification of lapse