FR2523113B1 - - Google Patents

Info

Publication number
FR2523113B1
FR2523113B1 FR8204020A FR8204020A FR2523113B1 FR 2523113 B1 FR2523113 B1 FR 2523113B1 FR 8204020 A FR8204020 A FR 8204020A FR 8204020 A FR8204020 A FR 8204020A FR 2523113 B1 FR2523113 B1 FR 2523113B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8204020A
Other languages
French (fr)
Other versions
FR2523113A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
G PI
Original Assignee
G PI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by G PI filed Critical G PI
Priority to FR8204020A priority Critical patent/FR2523113A1/fr
Publication of FR2523113A1 publication Critical patent/FR2523113A1/fr
Application granted granted Critical
Publication of FR2523113B1 publication Critical patent/FR2523113B1/fr
Granted legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/021—Preparation
    • C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
    • C01B33/035—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition or reduction of gaseous or vaporised silicon compounds in the presence of heated filaments of silicon, carbon or a refractory metal, e.g. tantalum or tungsten, or in the presence of heated silicon rods on which the formed silicon is deposited, a silicon rod being obtained, e.g. Siemens process

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Silicon Compounds (AREA)
FR8204020A 1982-03-10 1982-03-10 Procede de regeneration des chlorosilanes et de l'hydrogene non entres en reaction lors de l'obtention de silicium semi-conducteur polycristallin; chlorosilanes et hydrogene regeneres par ledit procede Granted FR2523113A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR8204020A FR2523113A1 (fr) 1982-03-10 1982-03-10 Procede de regeneration des chlorosilanes et de l'hydrogene non entres en reaction lors de l'obtention de silicium semi-conducteur polycristallin; chlorosilanes et hydrogene regeneres par ledit procede

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8204020A FR2523113A1 (fr) 1982-03-10 1982-03-10 Procede de regeneration des chlorosilanes et de l'hydrogene non entres en reaction lors de l'obtention de silicium semi-conducteur polycristallin; chlorosilanes et hydrogene regeneres par ledit procede

Publications (2)

Publication Number Publication Date
FR2523113A1 FR2523113A1 (fr) 1983-09-16
FR2523113B1 true FR2523113B1 (el) 1985-03-08

Family

ID=9271828

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8204020A Granted FR2523113A1 (fr) 1982-03-10 1982-03-10 Procede de regeneration des chlorosilanes et de l'hydrogene non entres en reaction lors de l'obtention de silicium semi-conducteur polycristallin; chlorosilanes et hydrogene regeneres par ledit procede

Country Status (1)

Country Link
FR (1) FR2523113A1 (el)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6332925B1 (en) 1996-05-23 2001-12-25 Ebara Corporation Evacuation system
US7033561B2 (en) 2001-06-08 2006-04-25 Dow Corning Corporation Process for preparation of polycrystalline silicon
US20020187096A1 (en) * 2001-06-08 2002-12-12 Kendig James Edward Process for preparation of polycrystalline silicon

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD48582A (el) *
FR1267519A (fr) * 1959-09-28 1961-07-21 Siemens Ag Procédé et dispositif pour récupérer les matières de départ non consommées lors de la préparation du silicium extra pur par réduction de silanes au moyen d'hydrogène
GB1144855A (en) * 1966-04-04 1969-03-12 Motorola Inc System for making silicon
DE2918060A1 (de) * 1979-05-04 1980-11-13 Siemens Ag Verfahren zur rueckgewinnung von bei der abscheidung von silicium durch thermische zersetzung anfallenden restgasen
DE2918078A1 (de) * 1979-05-04 1980-11-13 Siemens Ag Verfahren zur rueckgewinnung von bei der abscheidung von silicium durch thermische zersetzung anfallenden restgasen

Also Published As

Publication number Publication date
FR2523113A1 (fr) 1983-09-16

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Legal Events

Date Code Title Description
ST Notification of lapse