FR2522534B1 - - Google Patents

Info

Publication number
FR2522534B1
FR2522534B1 FR8203787A FR8203787A FR2522534B1 FR 2522534 B1 FR2522534 B1 FR 2522534B1 FR 8203787 A FR8203787 A FR 8203787A FR 8203787 A FR8203787 A FR 8203787A FR 2522534 B1 FR2522534 B1 FR 2522534B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8203787A
Other languages
French (fr)
Other versions
FR2522534A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ATELIER ELECTRO THERMIE CONST
Original Assignee
ATELIER ELECTRO THERMIE CONST
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ATELIER ELECTRO THERMIE CONST filed Critical ATELIER ELECTRO THERMIE CONST
Priority to FR8203787A priority Critical patent/FR2522534A1/fr
Publication of FR2522534A1 publication Critical patent/FR2522534A1/fr
Application granted granted Critical
Publication of FR2522534B1 publication Critical patent/FR2522534B1/fr
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/12—Heating of the reaction chamber
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/10—Reaction chambers; Selection of materials therefor
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
    • C30B33/005—Oxydation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
FR8203787A 1982-03-05 1982-03-05 Procede de refroidissement et dispositif de traitement d'une charge telle que des substrats mettant en oeuvre ce procede de refroidissement Granted FR2522534A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR8203787A FR2522534A1 (fr) 1982-03-05 1982-03-05 Procede de refroidissement et dispositif de traitement d'une charge telle que des substrats mettant en oeuvre ce procede de refroidissement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8203787A FR2522534A1 (fr) 1982-03-05 1982-03-05 Procede de refroidissement et dispositif de traitement d'une charge telle que des substrats mettant en oeuvre ce procede de refroidissement

Publications (2)

Publication Number Publication Date
FR2522534A1 FR2522534A1 (fr) 1983-09-09
FR2522534B1 true FR2522534B1 (cg-RX-API-DMAC10.html) 1984-05-25

Family

ID=9271697

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8203787A Granted FR2522534A1 (fr) 1982-03-05 1982-03-05 Procede de refroidissement et dispositif de traitement d'une charge telle que des substrats mettant en oeuvre ce procede de refroidissement

Country Status (1)

Country Link
FR (1) FR2522534A1 (cg-RX-API-DMAC10.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2673273B1 (fr) * 1991-02-26 1994-01-28 Piezo Ceram Electronique Four continu multifonctions.

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1904790A1 (de) * 1969-01-31 1971-02-18 Licentia Gmbh Verfahren zum Eindiffundieren von Stoerstellen in Halbleiterkoerper
US3842794A (en) * 1973-06-29 1974-10-22 Ibm Apparatus for high temperature semiconductor processing

Also Published As

Publication number Publication date
FR2522534A1 (fr) 1983-09-09

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Legal Events

Date Code Title Description
ST Notification of lapse