FR2511152B1 - METHOD OF USING A SET PIRANI VACUOMETER AND APPROPRIATE PIRANI VACUOMETER - Google Patents

METHOD OF USING A SET PIRANI VACUOMETER AND APPROPRIATE PIRANI VACUOMETER

Info

Publication number
FR2511152B1
FR2511152B1 FR8213711A FR8213711A FR2511152B1 FR 2511152 B1 FR2511152 B1 FR 2511152B1 FR 8213711 A FR8213711 A FR 8213711A FR 8213711 A FR8213711 A FR 8213711A FR 2511152 B1 FR2511152 B1 FR 2511152B1
Authority
FR
France
Prior art keywords
vacuometer
pirani
appropriate
set pirani
pirani vacuometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8213711A
Other languages
French (fr)
Other versions
FR2511152A1 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold Heraeus GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus GmbH filed Critical Leybold Heraeus GmbH
Publication of FR2511152A1 publication Critical patent/FR2511152A1/en
Application granted granted Critical
Publication of FR2511152B1 publication Critical patent/FR2511152B1/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/10—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured
    • G01L21/12—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured measuring changes in electric resistance of measuring members, e.g. of filaments; Vacuum gauges of the Pirani type
FR8213711A 1981-08-08 1982-08-05 METHOD OF USING A SET PIRANI VACUOMETER AND APPROPRIATE PIRANI VACUOMETER Expired FR2511152B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19813131506 DE3131506A1 (en) 1981-08-08 1981-08-08 METHOD FOR OPERATING A CONTROLLED PIRANI VACUUM METER AND PIRANI VACUUM METER SUITABLE FOR THIS

Publications (2)

Publication Number Publication Date
FR2511152A1 FR2511152A1 (en) 1983-02-11
FR2511152B1 true FR2511152B1 (en) 1985-07-19

Family

ID=6138945

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8213711A Expired FR2511152B1 (en) 1981-08-08 1982-08-05 METHOD OF USING A SET PIRANI VACUOMETER AND APPROPRIATE PIRANI VACUOMETER

Country Status (5)

Country Link
JP (1) JPS5830633A (en)
CH (1) CH657703A5 (en)
DE (1) DE3131506A1 (en)
FR (1) FR2511152B1 (en)
GB (1) GB2105472A (en)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3518388A1 (en) * 1985-05-22 1986-11-27 Leybold-Heraeus GmbH, 5000 Köln MEASURING HEAD
US4793181A (en) * 1987-06-02 1988-12-27 Djorup Robert Sonny Constant temperature sorption hygrometer
EP0312195A3 (en) * 1987-08-19 1989-08-30 Genevac Limited Method and device for measuring gas pressure
DE4205551A1 (en) * 1992-02-24 1993-08-26 Leybold Ag Temp. compensation circuit for regulated heat conductance vacuum meter - has Wheatstone bridge circuit with regulated supply voltage and further circuit carrying current independent of bridge supply voltage
DE4308433A1 (en) * 1993-03-17 1994-09-22 Leybold Ag Thermal conduction vacuum meter with measuring cell, measuring device and connecting cable
DE4308434A1 (en) * 1993-03-17 1994-09-22 Leybold Ag Temperature compensation with a regulated heat conduction vacuum meter
US6023979A (en) * 1997-07-21 2000-02-15 Helix Technology Apparatus and methods for heat loss pressure measurement
US6938493B2 (en) 1997-07-21 2005-09-06 Helix Technology Corporation Apparatus and methods for heat loss pressure measurement
US6658941B1 (en) 1997-07-21 2003-12-09 Helix Technology Corporation Apparatus and methods for heat loss pressure measurement
CN106989867A (en) * 2017-05-23 2017-07-28 核工业理化工程研究院 The measuring circuit of vacuum instrument
JP7039327B2 (en) * 2018-02-27 2022-03-22 新コスモス電機株式会社 Gas sensor and gas detection method
EP3690417A1 (en) 2019-02-01 2020-08-05 Sens4 A/S Apparatus for heat-loss vacuum measurement with improved temperature compensation and extended measurement range
CN109974931A (en) * 2019-04-30 2019-07-05 国网安徽省电力有限公司培训中心 A kind of accurate electron vacuum gage of reverse-filling

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1425001A (en) * 1965-02-19 1966-01-14 Thomson Houston Comp Francaise Improvements to vacuum measuring devices
GB1143002A (en) * 1965-09-08 1969-02-19 Servomex Controls Ltd Improvements in or relating to wheatstone bridge circuit arrangements
GB1210432A (en) * 1968-02-20 1970-10-28 Quicfit & Quartz Ltd Improvements in and relating to electronic circuits for temperature control
US3646815A (en) * 1970-03-26 1972-03-07 Bailey Meter Co Silicon pressure transducer circuit

Also Published As

Publication number Publication date
JPS5830633A (en) 1983-02-23
DE3131506A1 (en) 1983-03-17
CH657703A5 (en) 1986-09-15
FR2511152A1 (en) 1983-02-11
GB2105472A (en) 1983-03-23

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Legal Events

Date Code Title Description
ST Notification of lapse