CN106989867A - The measuring circuit of vacuum instrument - Google Patents

The measuring circuit of vacuum instrument Download PDF

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Publication number
CN106989867A
CN106989867A CN201710367827.XA CN201710367827A CN106989867A CN 106989867 A CN106989867 A CN 106989867A CN 201710367827 A CN201710367827 A CN 201710367827A CN 106989867 A CN106989867 A CN 106989867A
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CN
China
Prior art keywords
resistance
pin
circuit
connection
operational amplifier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201710367827.XA
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Chinese (zh)
Inventor
于民东
彭树文
高亚男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Research Institute of Physical and Chemical Engineering of Nuclear Industry
Original Assignee
Research Institute of Physical and Chemical Engineering of Nuclear Industry
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Research Institute of Physical and Chemical Engineering of Nuclear Industry filed Critical Research Institute of Physical and Chemical Engineering of Nuclear Industry
Priority to CN201710367827.XA priority Critical patent/CN106989867A/en
Publication of CN106989867A publication Critical patent/CN106989867A/en
Pending legal-status Critical Current

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00Vacuum gauges

Abstract

The invention discloses a kind of measuring circuit of vacuum instrument, including measuring bridge circuit, the measuring bridge circuit includes the measuring bridge being connected with input signal and electric bridge control circuit, the voltage signal of the measuring bridge circuit output is input to air regulation circuit after burning voltage given circuit, the phase inverter in vacuum conditions circuit are returned to zero, differential amplifier in the air regulation circuit is input to function amplifier, the output signal of the function amplifier linearization after voltage signal is adjusted.Circuit immunity to interference of the present invention is strong, and measurement accuracy is high, and measurement range is wide, can accurately carry out vacuum measurement;Circuit design uses common component, designs simple and easy to apply, reduces product cost.

Description

The measuring circuit of vacuum instrument
Technical field
The invention belongs to a kind of measuring circuit, and in particular to a kind of measuring circuit of vacuum instrument.
Background technology
Vacuum instrument is general by measuring system, signal processing system, control system, electric power system and mechanical system group Into.Vacuum measurement system is made up of the part of vacuum transducer, measuring circuit and vacuum indicator etc. three.Vacuum transducer is vacuum The core of instrument, determines the operation principle of instrument.Measuring circuit carries out signal conversion and amplification, will characterize the quantitative change of gas pressure Into electricity.Vacuum indicator is used for showing and recording measurement result.
But, current measuring circuit be also faced with there are problems that some design defect and.
The content of the invention
The present invention proposes that the purpose is to provide a kind of measurement electricity of vacuum instrument to solve the problem of prior art is present Road.
The technical scheme is that:A kind of measuring circuit of vacuum instrument, including measuring bridge circuit, the measurement electricity Bridge circuit includes the measuring bridge being connected with input signal and electric bridge control circuit, the voltage of the measuring bridge circuit output Signal is input to air regulation electricity after burning voltage given circuit, the phase inverter in vacuum conditions circuit are returned to zero Differential amplifier in road, the air regulation circuit is input to function amplifier, the letter after voltage signal is adjusted The output signal of number amplifier output.
1 pin, resistance R2 and the resistance RU11 of resistance R1 one end connection binding post CN1 in the measuring bridge circuit, The resistance R1 other ends are connected with binding post CN1 4 pin, potentiometer W1, resistance RU26, triode Q2 emitter e, resistance RU11 other ends connection electric capacity C1, electric capacity C2 and operational amplifier U1 2 pin, resistance R3 one end connection potentiometer W1, electric capacity C1, Electric capacity C3, resistance RU12 and operational amplifier U1 3 pin, the resistance R3 other ends are connected GND with resistance R2, electric capacity C2;Resistance RU13 one end connection resistance RU12, electric capacity C3 and operational amplifier U1 1 pin, the negative electrode of the resistance RU13 other ends and diode D1 Connection;Diode D1 anode is connected with resistance RU14, triode Q1 base stage b;Resistance RU15 one end connection+12V power supplys, electricity The resistance RU15 other ends are connected with resistance RU14, triode Q1 colelctor electrode c, triode Q2 colelctor electrode c;Triode Q1 transmitting Pole e connecting triodes Q2 base stage b.
Resistance RU22 one end connection resistance RU21, the electric capacity C4 and voltage-regulator diode D2 the moon of the vacuum conditions circuit Pole, the resistance RU22 other ends are connected with resistance RU24 and operational amplifier U2 2 pin, resistance RU21 other end connections+12V electricity Source, resistance RU24 other ends connection potentiometer W2;Resistance RU23 one end concatenation operation amplifiers U2 3 pin, resistance RU23 is another End is connected GND with electric capacity C4 and voltage-regulator diode D2 anode.
Resistance RU25 one end of the air regulation circuit connects potentiometer W2 and operational amplifier U2 1 pin, resistance The RU25 other ends are connected with resistance RU26, resistance RU31, and the resistance RU31 other ends are connected with operational amplifier U3 3 pin;Resistance RU32 one end connection electric capacity C5, resistance RU33 and operational amplifier U3 2 pin, resistance RU32 other ends connection potentiometer W3, electricity Hinder RU33 other ends connection GND.
Resistance RU41 one end connection electric capacity C5, potentiometer W3 and operational amplifier U3 1 pin, electricity in the function amplifier The resistance RU41 other ends are connected with resistance RU43, resistance RU44, resistance RU47 and operational amplifier U4 2 pin;Resistance RU43 is another End is connected with resistance RU45 and diode D4 anode, and the negative electrode of the resistance RU44 other ends and resistance RU46 and diode D3 connects Connect, the resistance RU47 other ends are connected with resistance RU48, resistance RU49 and voltage-regulator diode D5 anode, the resistance RU48 other ends It is connected with -12V power supplys, voltage-regulator diode D5 negative electrode is connected with GND;Resistance RU42 one end concatenation operation amplifiers U4 3 pin, The resistance RU42 other ends connect GND;Diode D3 anode is connected with diode D4 negative electrode, operational amplifier U4 1 pin;Electricity Hinder RU52 one end connection resistance RU45, resistance RU46, resistance RU49 and operational amplifier U5 2 pin, the resistance RU52 other ends with The 1 pin connection of operational amplifier U5 1 pin, binding post CN2;Resistance RU51 one end concatenation operation amplifiers U5 3 pin, resistance The RU51 other ends connect GND.
The 5 pin connection -12V power supplys of the binding post CN2, binding post the CN2 connection of 4 pin GND, binding post CN2 3 pin connection+12V power supplys.
Circuit immunity to interference of the present invention is strong, and measurement accuracy is high, and measurement range is wide, can accurately carry out vacuum measurement;Circuit design Using common component, design simple and easy to apply, reduce product cost.
Brief description of the drawings
Fig. 1 is the circuit theory diagrams of the present invention;
Fig. 2 is the circuit diagram of the present invention;
Wherein:
The air of 1 measuring bridge circuit 2 adjusts circuit
The vacuum conditions circuit of 3 function amplifier 4.
Embodiment
Hereinafter, referring to the drawings and embodiment the present invention is described in detail:
As shown in Figure 1 and 2, a kind of measuring circuit of vacuum instrument, including measuring bridge circuit 1, the measuring bridge circuit 1 is wrapped Include the measuring bridge and electric bridge control circuit being connected with input signal, the voltage signal warp that the measuring bridge circuit 1 is exported Cross and air regulation circuit 2, institute are input to after burning voltage given circuit, phase inverter in vacuum conditions circuit 4 are returned to zero State after voltage signal is adjusted the differential amplifier in air regulation circuit 2 and be input to function amplifier 3, the function is put The output signal of the big linearization of device 3.
1 pin, resistance R2 and the resistance RU11 of resistance R1 one end connection binding post CN1 in the measuring bridge circuit 1, The resistance R1 other ends are connected with binding post CN1 4 pin, potentiometer W1, resistance RU26, triode Q2 emitter e, resistance RU11 other ends connection electric capacity C1, electric capacity C2 and operational amplifier U1 2 pin, resistance R3 one end connection potentiometer W1, electric capacity C1, Electric capacity C3, resistance RU12 and operational amplifier U1 3 pin, the resistance R3 other ends are connected GND with resistance R2, electric capacity C2;Resistance RU13 one end connection resistance RU12, electric capacity C3 and operational amplifier U1 1 pin, the negative electrode of the resistance RU13 other ends and diode D1 Connection;Diode D1 anode is connected with resistance RU14, triode Q1 base stage b;Resistance RU15 one end connection+12V power supplys, electricity The resistance RU15 other ends are connected with resistance RU14, triode Q1 colelctor electrode c, triode Q2 colelctor electrode c;Triode Q1 transmitting Pole e connecting triodes Q2 base stage b.
Resistance RU22 one end connection resistance RU21, the electric capacity C4 and voltage-regulator diode D2 the moon of the vacuum conditions circuit 4 Pole, the resistance RU22 other ends are connected with resistance RU24 and operational amplifier U2 2 pin, resistance RU21 other end connections+12V electricity Source, resistance RU24 other ends connection potentiometer W2;Resistance RU23 one end concatenation operation amplifiers U2 3 pin, resistance RU23 is another End is connected GND with electric capacity C4 and voltage-regulator diode D2 anode.
Resistance RU25 one end of the air regulation circuit 2 connects potentiometer W2 and operational amplifier U2 1 pin, resistance The RU25 other ends are connected with resistance RU26, resistance RU31, and the resistance RU31 other ends are connected with operational amplifier U3 3 pin;Resistance RU32 one end connection electric capacity C5, resistance RU33 and operational amplifier U3 2 pin, resistance RU32 other ends connection potentiometer W3, electricity Hinder RU33 other ends connection GND.
Resistance RU41 one end connection electric capacity C5, potentiometer W3 and operational amplifier U3 1 pin in the function amplifier 3, The resistance RU41 other ends are connected with resistance RU43, resistance RU44, resistance RU47 and operational amplifier U4 2 pin;Resistance RU43 is another One end is connected with resistance RU45 and diode D4 anode, and the negative electrode of the resistance RU44 other ends and resistance RU46 and diode D3 connects Connect, the resistance RU47 other ends are connected with resistance RU48, resistance RU49 and voltage-regulator diode D5 anode, the resistance RU48 other ends It is connected with -12V power supplys, voltage-regulator diode D5 negative electrode is connected with GND;Resistance RU42 one end concatenation operation amplifiers U4 3 pin, The resistance RU42 other ends connect GND;Diode D3 anode is connected with diode D4 negative electrode, operational amplifier U4 1 pin;Electricity Hinder RU52 one end connection resistance RU45, resistance RU46, resistance RU49 and operational amplifier U5 2 pin, the resistance RU52 other ends with The 1 pin connection of operational amplifier U5 1 pin, binding post CN2;Resistance RU51 one end concatenation operation amplifiers U5 3 pin, resistance The RU51 other ends connect GND.
The 5 pin connection -12V power supplys of the binding post CN2, binding post the CN2 connection of 4 pin GND, binding post CN2 3 pin connection+12V power supplys.
The course of work of the present invention is as follows:
When tested pressure change(It is raised and lowered)When, cause the change in resistance for regulating heater resistance R1(It is down or up), by The measuring bridge disequilibrium of R1 ~ R3, W1 composition, exports a voltage signal to electric bridge control circuit, changes its output voltage (Increased or decrease), i.e. measuring bridge power supply voltage signal change(Increased or decrease).Output voltage signal passes through vacuum conditions Circuit 4, i.e., the group such as the burning voltage given circuit being made up of resistance RU21 and voltage-stabiliser tube D2, operational amplifier U2 and RU24 and W2 Into phase inverter returned to zero.Again circuit 2, i.e., the difference being made up of operational amplifier U3 and RU32 and W3 etc. are adjusted by air Dynamic amplifier carries out adjusting full.Again pass through by operational amplifier U4, U5, diode D3, D4 and resistance RU41 ~ RU49, RU51, The function amplifier 4 of the compositions such as RU52 realizes linearisation.Final output signal realizes the measurement of vacuum to binding post CN2.
Circuit immunity to interference of the present invention is strong, and measurement accuracy is high, and measurement range is wide, can accurately carry out vacuum measurement;Circuit design Using common component, design simple and easy to apply, reduce product cost.

Claims (6)

1. a kind of measuring circuit of vacuum instrument, including measuring bridge circuit(1), it is characterised in that:The measuring bridge circuit (1)Including the measuring bridge and electric bridge control circuit being connected with input signal, the measuring bridge circuit(1)The voltage of output Signal passes through vacuum conditions circuit(4)In burning voltage given circuit, phase inverter be input to after being returned to zero air regulation Circuit(2), the air regulation circuit(2)In differential amplifier voltage signal is adjusted after be input to function amplifier (3), the function amplifier(3)The output signal of linearization.
2. the measuring circuit of vacuum instrument according to claim 1, it is characterised in that:The measuring bridge circuit(1)In Resistance R1 one end connection binding post CN1 1 pin, resistance R2 and resistance RU11, the resistance R1 other ends are with binding post CN1's 4 pin, potentiometer W1, resistance RU26, triode Q2 emitter e connection, resistance RU11 other ends connection electric capacity C1, electric capacity C2 and Operational amplifier U1 2 pin, resistance R3 one end connection potentiometer W1, electric capacity C1, electric capacity C3, resistance RU12 and operational amplifier U1 3 pin, the resistance R3 other ends are connected GND with resistance R2, electric capacity C2;Resistance RU13 one end connection resistance RU12, electric capacity C3 and fortune Amplifier U1 1 pin is calculated, the resistance RU13 other ends are connected with diode D1 negative electrode;Diode D1 anode and resistance RU14, Triode Q1 base stage b connections;Resistance RU15 one end connection+12V power supplys, the resistance RU15 other ends and resistance RU14, triode Q1 colelctor electrode c, triode Q2 colelctor electrode c connections;Triode Q1 emitter e connecting triode Q2 base stage b.
3. the measuring circuit of vacuum instrument according to claim 1, it is characterised in that:The vacuum conditions circuit(4)'s Resistance RU22 one end connection resistance RU21, electric capacity C4 and voltage-regulator diode D2 negative electrode, the resistance RU22 other ends and resistance RU24 And operational amplifier U2 2 pin connection, resistance RU21 other end connection+12V power supplys, resistance RU24 other ends connection potentiometer W2;Resistance RU23 one end concatenation operation amplifiers U2 3 pin, the sun of the resistance RU23 other ends and electric capacity C4 and voltage-regulator diode D2 Pole connects GND.
4. the measuring circuit of vacuum instrument according to claim 1, it is characterised in that:The air adjusts circuit(2)'s Resistance RU25 one end connects potentiometer W2 and operational amplifier U2 1 pin, the resistance RU25 other ends and resistance RU26, resistance RU31 Connection, the resistance RU31 other ends are connected with operational amplifier U3 3 pin;Resistance RU32 one end connection electric capacity C5, resistance RU33 and Operational amplifier U3 2 pin, resistance RU32 other ends connection potentiometer W3, resistance RU33 other ends connection GND.
5. the measuring circuit of vacuum instrument according to claim 1, it is characterised in that:The function amplifier(3)Middle electricity Hinder RU41 one end connection electric capacity C5, potentiometer W3 and operational amplifier U3 1 pin, the resistance RU41 other ends and resistance RU43, electricity Hinder RU44, resistance RU47 and operational amplifier U4 2 pin connection;The sun of the resistance RU43 other ends and resistance RU45 and diode D4 Pole is connected, and the resistance RU44 other ends are connected with resistance RU46 and diode D3 negative electrode, the resistance RU47 other ends and resistance RU48, Resistance RU49 and voltage-regulator diode D5 anode connection, the resistance RU48 other ends are connected with -12V power supplys, voltage-regulator diode D5's Negative electrode is connected with GND;Resistance RU42 one end concatenation operation amplifiers U4 3 pin, resistance RU42 other ends connection GND;Diode D3 anode is connected with diode D4 negative electrode, operational amplifier U4 1 pin;Resistance RU52 one end connection resistance RU45, resistance RU46, resistance RU49 and operational amplifier U5 2 pin, 1 pin, the binding post of the resistance RU52 other ends and operational amplifier U5 CN2 1 pin connection;Resistance RU51 one end concatenation operation amplifiers U5 3 pin, resistance RU51 other ends connection GND.
6. the measuring circuit of vacuum instrument according to claim 5, it is characterised in that:5 pin of the binding post CN2 connect Connect -12V power supplys, binding post CN2 4 pin connection GND, binding post CN2 3 pin connection+12V power supplys.
CN201710367827.XA 2017-05-23 2017-05-23 The measuring circuit of vacuum instrument Pending CN106989867A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201710367827.XA CN106989867A (en) 2017-05-23 2017-05-23 The measuring circuit of vacuum instrument

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201710367827.XA CN106989867A (en) 2017-05-23 2017-05-23 The measuring circuit of vacuum instrument

Publications (1)

Publication Number Publication Date
CN106989867A true CN106989867A (en) 2017-07-28

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CN201710367827.XA Pending CN106989867A (en) 2017-05-23 2017-05-23 The measuring circuit of vacuum instrument

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2105472A (en) * 1981-08-08 1983-03-23 Leybold Heraeus Gmbh & Co Kg Pirani vacuum gauge
CN86106973A (en) * 1986-10-22 1987-04-22 吉林省梨树县计量仪器研究所 Electrically controlled standard piston-type pressure vacuum gauge
CN2233082Y (en) * 1994-07-16 1996-08-14 中国石化齐鲁石油化工公司 Air leakage alarm for vacuum system
CN202511939U (en) * 2012-03-27 2012-10-31 淄博飞雁先行测控技术有限公司 Signal conditioning circuit of 0-5V output pressure sensor
CN203011621U (en) * 2012-12-04 2013-06-19 姚文利 Resistance vacuum gauge
CN207280674U (en) * 2017-05-23 2018-04-27 核工业理化工程研究院 A kind of measuring circuit of vacuum instrument

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2105472A (en) * 1981-08-08 1983-03-23 Leybold Heraeus Gmbh & Co Kg Pirani vacuum gauge
CN86106973A (en) * 1986-10-22 1987-04-22 吉林省梨树县计量仪器研究所 Electrically controlled standard piston-type pressure vacuum gauge
CN2233082Y (en) * 1994-07-16 1996-08-14 中国石化齐鲁石油化工公司 Air leakage alarm for vacuum system
CN202511939U (en) * 2012-03-27 2012-10-31 淄博飞雁先行测控技术有限公司 Signal conditioning circuit of 0-5V output pressure sensor
CN203011621U (en) * 2012-12-04 2013-06-19 姚文利 Resistance vacuum gauge
CN207280674U (en) * 2017-05-23 2018-04-27 核工业理化工程研究院 A kind of measuring circuit of vacuum instrument

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Application publication date: 20170728

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