CN2233082Y - Air leakage alarm for vacuum system - Google Patents
Air leakage alarm for vacuum system Download PDFInfo
- Publication number
- CN2233082Y CN2233082Y CN 94241003 CN94241003U CN2233082Y CN 2233082 Y CN2233082 Y CN 2233082Y CN 94241003 CN94241003 CN 94241003 CN 94241003 U CN94241003 U CN 94241003U CN 2233082 Y CN2233082 Y CN 2233082Y
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- CN
- China
- Prior art keywords
- vacuum system
- integrated circuit
- pin
- vacuum
- alarm
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Abstract
The utility model relates to an air leakage alarm for vacuum system, comprising a power supply circuit, a monitoring device, a signal indication switch device and an alarm device. The utility model is characterized in that the signal indication switch device uses a temperature indication accommodometer, the alarm device (4) uses a light coupling sound alarm, the monitoring device uses a thermoelectric couple gaugehead (1) as the sensing element for monitoring air leakage of a vacuum system, and the opening end of the gaugehead is sealed on the vacuum system; ends C and D of the thermoelectric couple gaugehead (1) are connected with a filament power supply, ends A and B are connected with the input end of the temperature indication accommodometer (2) and the output end thereof is connected with the input ends A' and B' of a photocoupler (3), and the output end of the photocoupler (3) is connected with the alarm device (4).
Description
The utility model relates to a kind of instrument, in particular for the instrument of monitoring the vacuum system principal fault and reporting to the police at once.
Be equipped with the electric contact type pressure vacuum gauge of metal shell in the existing vacuum system, the electric contact of this table can connect alarm apparatus, this vacuum meter uses the thin-walled sensing element of sealing as sensor, the sensing element mechanical deformation that detection is caused by the formed pressure reduction of vacuum to an atmospheric pressure, because the pressure reduction due to the gas leakage causes that the deformation quantity of sensing element is less, and the rigidity of solid sensing element is its inherent characteristic.Therefore, this instrument accuracy of detection is relatively poor, and indicated vacuum values precision not high (this class accuracy of instrument grade generally is 2.5 grades), and the vacuum meter of this metal shell is difficult to be connected with glass vacuum system has limited its application at glass vacuum system.
The purpose of this utility model provides the warning instrument of higher, the sensitive online detection vacuum system principal fault of a kind of accuracy of detection, this vacuum system leak alarm both can indicate vacuum tightness at that time, can report to the police again during gas leakage, and alarm threshold can freely be set in range ability.Because sensing element is a glass shell, is specially adapted to glass vacuum system.If adopt special-purpose connecting pipe, also can be applicable to the metal vacuum system.Use this vacuum system leak alarm in time to find and get rid of principal fault, guarantee the safe operation of vacuum system.
The purpose of this utility model realizes in the following way:
This vacuum system leak alarm, comprise power circuit, monitoring device, signal indication conversion equipment and warning device, it is characterized in that: signal indication conversion equipment adopts temperature indication adjusting apparatus, warning device adopts photoelectricity coupling and audible alarm, monitoring device is regulated 1 sensing element as the gas leakage of monitoring vacuum system with thermopair, its openend sealing-in is on vacuum system, thermopair is regulated 1 C, D termination filament supply, A, B terminates to the input end of temperature indication adjusting apparatus 2, the output terminal of temperature indication adjusting apparatus 2 and the input end A ' of photoelectrical coupler 3, B ' links to each other, and the output terminal of photoelectrical coupler 3 links to each other with warning device 4.
The purpose of this utility model can also realize in the following way:
Described warning device 4 is by photoelectrical coupler 3, potentiometer RV
1, integrated circuit (IC), resistance R
1, R
2, R
3, capacitor C
1, loudspeaker SP forms, the output terminal of photoelectrical coupler 3 links to each other with 2 pin of integrated circuit (IC), 5 pin of integrated circuit (IC) pass through resistance R
1Connect power positive end, 3 pin earth terminals, 1 pin of integrated circuit (IC) passes through capacitor C
1Ground connection, 4 pin of integrated circuit (IC) and loudspeaker SP, resistance R
3Link to each other resistance R
2One end links to each other with power supply, the other end links to each other with loudspeaker SP.
Vacuum system leak alarm principal feature of the present utility model is that pick-up unit adopts thermopair as sensing element, promptly regulates the vacuum tightness of detection system with thermopair, the principal fault of discovery vacuum plant that can be more promptly and accurately.It is various vacuum plants of 0.1Pa-135Pa and system that this vacuum system leak alarm is widely used in vacuum tightness, particularly glass vacuum system (is not suitable for the less components and parts of volume, as high-pressure vacuum switch, electron tube etc.), this vacuum system leak alarm selects for use thermopair to do sensing element, is the change transitions of vacuum tightness voltage signal, than the electric contact type instrument of doing sensing element by the diaphragm mechanical deformation, accuracy of detection greatly improves, and (brings up to 0.5 grade by 2.5 grades.At least below 1 grade).Therefore more accurate to the principal fault detection reaction of vacuum system, react sensitiveer.Guarantee the safe operation of vacuum plant more reliably.Described vacuum system leak alarm brings glad tidings for the vacuum plant operating personnel that are in high temperature, radiation, the environment such as poisonous.Make operating personnel away from adverse environment, by the running status of this vacuum system leak alarm long distance observing and controlling vacuum plant.To glass vacuum system, the sensing element of this vacuum system leak alarm is easier to connect than the electric contact vacuum meter of metal shell, tube is installed just in addition.After principal fault was got rid of, this vacuum system leak alarm can automatically terminate warning.This vacuum system leak alarm can be set critical vacuum tightness alarming value according to specific process conditions, in case report to the police at once because of gas leakage causes vacuum tightness subcritical alarming value for the device that adopts vacuum technique.
The utility model is described in further detail below in conjunction with accompanying drawing:
Fig. 1 is the workflow block diagram of vacuum system leak alarm;
Fig. 2 is the profile installation diagram of vacuum system leak alarm;
Fig. 3 is the circuit theory diagrams of vacuum system leak alarm;
Fig. 4 is a thermopair typical case calibration curve.
Below in conjunction with Fig. 4 the utility model principle is illustrated:
Fig. 4 is thermocouple meter typical case calibration curve, represented system vacuum degree and thermocouple output voltage Relation. When the system vacuum degree 133 * 10-1—133×10
-2Between the time, heat conduction and the pressure of gas have Close. Regulate in 1 at thermocouple, the pyrometer fire-end test point is welded in the mid point of heater strip, works as heating current When constant, the temperature of heater strip is relevant with the pressure of gas, and (establishing Eo is the gas energy mobility, is table Face adjustment factor, Ao are free gas molecule conductivities, and P is system's air pressure-vacuum, and Ts is heater strip Surface temperature, Ti is gas temperature, then Eo=2AoP (273/Ti) (Ts-Ti), for appointment Thermocouple is regulated, because Ao, Ti and Eo remain unchanged, so temperature T s is exactly measuring of P). Therefore, Detect thermocouple and regulate the height of 1 differential thermal voltage, just predicted the vacuum of system. Voltage and vacuum Although degree is not linear relationship, can mark corresponding vacuum non-linear scale value in indicating meter. The differential thermal voltage swing that thermocouple is regulated output depends on the height of system vacuum degree, this output voltage warp Indicating meter changes current output signal into, by the work of optocoupler components control voice guard State.
Fig. 1-the 3rd, most preferred embodiment of the present utility model.
The utility model is described in further detail below in conjunction with Fig. 1-3.
Among Fig. 1: the 1st, thermopair is regulated, according to the principle of work of thermopair as can be known, the size of its working end output voltage depends on the height of the environment temperature of popping one's head in, and when thermopair regulate 1 filament current constant after, gas concentration and heat-conduction coefficient thereof around the height of thermopair working end temperature just depends on.
When air-extractor normally moves, gas molecule quantity gradually reduces in the vacuum system, when internal pressure descends thereupon, the corresponding minimizing of taking away by gas molecule of heat, thermopair working end temperature raises, respective output voltages increases, the pointer A deflection of the temperature indication adjusting apparatus 2 that driving is attached thereto, when system reaches certain vacuum and spends, thermopair is regulated 1 output voltage also a fixing respective value, and drive needle deflection to corresponding scale, can be the meter dial indicating value corresponding vacuum tightness value (non-linear scale) through demarcating.Adjust the setting pointer B of temperature indication adjusting apparatus 2, make setting value less than the output voltage indicated value, according to the output characteristics of instrument, at this moment its output current is zero, and then the light emitting diode in the photoelectrical coupler 3 is not luminous, and warning device 4 is not worked.And when vacuum system is leaked gas, because gas molecule increases, the vacuum system air pressure inside rises, cause thermocouple probe heat conduction on every side to increase, thermopair working end temperature reduces, and its output voltage is reduced, the also descending thereupon variation of pointer A indicating value of temperature indication adjusting apparatus 2, when its indicated value during less than setting value, with regard to exporting certain electric current the diode in the photoelectrical coupler 3 is lighted, trigger warning device 4 and give the alarm.
After fault was got rid of, vacuum tightness rose to initial value, and thermopair is regulated indicated value that the output voltage of 1 increase makes temperature indication adjusting apparatus 2 again greater than setting value, and its output current reverts to zero, and warning automatically terminates.Because of used temperature indication adjusting apparatus can be set the alarm threshold value arbitrarily in its range, so the alarm threshold of vacuum system also can be according to the feelings setting.
This device can indicate temperature adjusting apparatus 2 or warning device 4 to be installed in the pulpit, can implement remote measurement or than long-distance alarm, also can adopt sound and light alarm, loudspeaker or pilot lamp.
5 is casings of temperature indication adjusting apparatus among Fig. 2, and 6 is index dials on the casing, the 7th, and filament current table, the 8th, pilot lamp, the 9th, filament current regulator potentiometer, the 10th, power switch K, the 11st, potentiometer RV
1, the 12nd, body case of annunciator, the 13rd, the connection lead between temperature indication adjusting apparatus and the alarm, the 14th, thermopair is regulated 1 and is indicated stube cable between the adjusting apparatus 2 (in establish compensating wire) with temperature, and the 15th, thermopair is regulated 1 interface, links to each other with vacuum system.
16 is temperature indication adjusting apparatus terminal blocks among Fig. 3, the 17, the 18th, integrated package of pressure-stabilizing, the 19th, power transformer, the 70th, fuse, the 71, the 77th, rectifying device, more than all be installed in the casing 5.IC is the integrated circuit of warning device 4, and SP is an alarming horn, R
1, R
2, R
3, R
4Be resistance, C
1, C
2, C
3, C
4, C
5Be capacitor, integrated circuit loudspeaker and resistance capacitance are installed in the warning device 4, R regulates 1 compensating resistance outward for thermopair, directly link on the temperature indication adjusting apparatus terminal block 16, wiring A, B link to each other with corresponding terminals in the temperature indication adjusting apparatus terminal block 16 respectively in the photoelectronic coupler 3, thermopair is regulated 1 C, D end and thermopair and is regulated 1 filament supply and link to each other potentiometer RV
1Be the warning regulator potentiometer, the 9th, RV
2Thermopair is regulated 1 filament current regulator potentiometer.
For guaranteeing vacuum system leak alarm accuracy of detection, to be connected with compensating wire between thermopair output terminal and the indicating instrument, and in indicating instrument, adopt electric-bridge circuit that thermocouple cold junction is compensated, because thermopair is 0.5 ℃ to the detection error of temperature, 0.1 ℃ of single Zhi Keda, guaranteed the accuracy of detection of sensor to vacuum tightness, adopted the high precision indicating instrument, the error that can make package unit is less than 0.5.
Each component parameter and model are as follows:
16 is XTC type temperature indication adjusting apparatus terminal block, and photoelectrical coupler 3 is 4N30, IC=TWH8751 or 97887, SP=5W/8 Ω, R
1=1K, R
2=20 Ω, R
3=15K, R
4=15 Ω, RV
1=100K Ω, RV
2It is DL-3 that=100 Ω, thermopair regulate 1, C
1=4.7 μ F, C
2=2200PF/16V, C
3=1 μ F/16V, C
4-1000PF/16V, C
5-2.2 μ F/10V, integrated regulator 17 is LM7812, and integrated regulator 18 is LM7806, and bridge rectifier circuit 21,22 respectively is made up of 4 1N4004 diodes, outside the R=and 15 Ω, 8 is the 8V/0.3A bulb, the secondary coil L of power transformer 19
2Be 15V, L
3Be 8V.
Claims (2)
1, a kind of vacuum system leak alarm, comprise power circuit, monitoring device, signal indication conversion equipment and warning device, it is characterized in that: signal indication conversion equipment adopts temperature indication adjusting apparatus, warning device adopts photoelectricity coupling audible alarm, monitoring device is regulated (1) sensing element as the gas leakage of monitoring vacuum system with thermopair, its openend sealing-in is on vacuum system, thermopair is regulated the C of (1), D termination filament supply, A, B terminates to the input end of temperature indication adjusting apparatus (2), the output terminal of temperature indication adjusting apparatus (2) and the input end A ' of photoelectrical coupler (3), B ' links to each other, and the output terminal of photoelectrical coupler (3) links to each other with warning device (4).
2, vacuum system leak alarm as claimed in claim 1 is characterized in that: described warning device (4) is by photoelectrical coupler (3), potentiometer RV
1, integrated circuit (IC), resistance R
1, R
2, R
3, capacitor C
1, loudspeaker SP forms, the output terminal of photoelectrical coupler (3) links to each other with 2 pin of integrated circuit (IC), 5 pin of integrated circuit (IC) pass through resistance R
1Connect power positive end, 3 pin earth terminals, 1 pin of integrated circuit (IC) passes through capacitor C
1Ground connection, 4 pin of integrated circuit (IC) and loudspeaker SP, resistance R
3Link to each other resistance R
2One end links to each other with power supply, the other end links to each other with loudspeaker SP.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 94241003 CN2233082Y (en) | 1994-07-16 | 1994-07-16 | Air leakage alarm for vacuum system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 94241003 CN2233082Y (en) | 1994-07-16 | 1994-07-16 | Air leakage alarm for vacuum system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2233082Y true CN2233082Y (en) | 1996-08-14 |
Family
ID=33847881
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 94241003 Expired - Fee Related CN2233082Y (en) | 1994-07-16 | 1994-07-16 | Air leakage alarm for vacuum system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2233082Y (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102478444A (en) * | 2010-11-26 | 2012-05-30 | 益科博能源科技（上海）有限公司 | Method for detecting vacuum degree of vacuum pipeline |
| CN103196628A (en) * | 2013-03-08 | 2013-07-10 | 成都倍特科技有限责任公司 | Vacuum degree on-line detecting system |
| CN104697731A (en) * | 2013-12-03 | 2015-06-10 | 萨马拉国立航空航天大学 | Space station module leaks detector |
| CN106989867A (en) * | 2017-05-23 | 2017-07-28 | 核工业理化工程研究院 | The measuring circuit of vacuum instrument |
| CN108981561A (en) * | 2018-08-02 | 2018-12-11 | 河北盛世天昕电子科技有限公司 | A kind of leakage hole determines method, vacuum motor and its adsorbent article detection method |
-
1994
- 1994-07-16 CN CN 94241003 patent/CN2233082Y/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102478444A (en) * | 2010-11-26 | 2012-05-30 | 益科博能源科技（上海）有限公司 | Method for detecting vacuum degree of vacuum pipeline |
| CN103196628A (en) * | 2013-03-08 | 2013-07-10 | 成都倍特科技有限责任公司 | Vacuum degree on-line detecting system |
| CN104697731A (en) * | 2013-12-03 | 2015-06-10 | 萨马拉国立航空航天大学 | Space station module leaks detector |
| CN106989867A (en) * | 2017-05-23 | 2017-07-28 | 核工业理化工程研究院 | The measuring circuit of vacuum instrument |
| CN108981561A (en) * | 2018-08-02 | 2018-12-11 | 河北盛世天昕电子科技有限公司 | A kind of leakage hole determines method, vacuum motor and its adsorbent article detection method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |