CN109974931A - A kind of accurate electron vacuum gage of reverse-filling - Google Patents
A kind of accurate electron vacuum gage of reverse-filling Download PDFInfo
- Publication number
- CN109974931A CN109974931A CN201910364631.4A CN201910364631A CN109974931A CN 109974931 A CN109974931 A CN 109974931A CN 201910364631 A CN201910364631 A CN 201910364631A CN 109974931 A CN109974931 A CN 109974931A
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- China
- Prior art keywords
- vacuum
- reverse
- power supply
- conversion circuit
- lani
- Prior art date
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- 238000006243 chemical reaction Methods 0.000 claims abstract description 21
- 239000004973 liquid crystal related substance Substances 0.000 claims abstract description 11
- 230000001105 regulatory effect Effects 0.000 claims description 3
- 238000005259 measurement Methods 0.000 abstract description 7
- 230000000007 visual effect Effects 0.000 abstract description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 10
- 229910052753 mercury Inorganic materials 0.000 description 10
- 238000010586 diagram Methods 0.000 description 7
- 230000005611 electricity Effects 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- CWYNVVGOOAEACU-UHFFFAOYSA-N Fe2+ Chemical compound [Fe+2] CWYNVVGOOAEACU-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000001915 proofreading effect Effects 0.000 description 1
- 210000002345 respiratory system Anatomy 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 230000001988 toxicity Effects 0.000 description 1
- 231100000419 toxicity Toxicity 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
- G01L21/10—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured
- G01L21/12—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured measuring changes in electric resistance of measuring members, e.g. of filaments; Vacuum gauges of the Pirani type
Abstract
The invention discloses a kind of accurate electron vacuum gages of reverse-filling, including power supply, Pi Lani vacuum transducer, operational amplifier, A/D conversion circuit, eprom memory, processor, liquid crystal display and digital control and interface circuit, the power supply is used for as Pi Lani vacuum transducer, operational amplifier, A/D conversion circuit and the power supply of digital control and interface circuit, digital control and interface circuit is separately connected A/D conversion circuit, eprom memory, processor and liquid crystal display, and A/D conversion circuit also connects Pi Lani vacuum transducer by operational amplifier.The present invention not only can accurate measurement of vacuum, also eliminate MaLeod gauge security risk, shown using liquid crystal display, not only good visual effect, crash resistance is also strong.
Description
Technical field
The present invention relates to a kind of electron vacuum gage, specifically a kind of accurate electron vacuum gage of reverse-filling.
Background technique
In recent years, with the continuous development of power grid, GIS device gradually increases.GIS electrical equipment is installed at the scene and large size
It in service work, needs to vacuumize GIS, nitrogen washes processing.The survey found that the evacuator that each substation matches is true
Empty measuring instrument is MaLeod gauge.
" 18 great anti-accident measures of power grid (revised edition) of State Grid Corporation of China clearly propose, to prevent vacuum meter water
Silver, which flows backward, to be entered in equipment, and MaLeod gauge is forbidden to use.When reading vacuum degree using MaLeod gauge, mercury is probably fallen
It is poured into GIS gas chamber, mercury distribution fog-like in a device, it is extremely difficult to clean, and the dielectric strength of gas chamber can be reduced, set to GIS
Security risk has been buried in standby safe and stable operation.On the other hand, mercury is liquid silvery white non-ferrous metal, can be evaporated under room temperature,
Mercury vapour has very big toxicity.MaLeod gauge is in use, often need to add mercury manually.Mercury is evaporate into air, is led to
It crosses respiratory tract and enters human body, our health can be damaged.
Summary of the invention
The purpose of the present invention is to provide a kind of accurate electron vacuum gages of reverse-filling, to solve to propose in above-mentioned background technique
The problem of.
To achieve the above object, the invention provides the following technical scheme:
A kind of accurate electron vacuum gage of reverse-filling, including power supply, Pi Lani vacuum transducer, operational amplifier, A/D conversion
Circuit, eprom memory, processor, liquid crystal display and digital control and interface circuit, the power supply are used to be Pi Lani
Vacuum transducer, operational amplifier, A/D conversion circuit and the power supply of digital control and interface circuit, digital control and interface electricity
Road is separately connected A/D conversion circuit, eprom memory, processor and liquid crystal display, and A/D conversion circuit is also put by operation
Big device connects Pi Lani vacuum transducer；The processor and voltage reference chip, voltage comparable chip interconnect.
As a further solution of the present invention: the Pi Lani vacuum transducer uses VSP841 type vacuum sensor.
The eprom memory selects 4L08EPROM.The regulated power supply that the power supply selects chip 78L10A to constitute.The processor
Select 16 high-precision microprocessors of the M430F427 of Texas Instrument as control CPU.The voltage reference chip is selected
385B12 benchmark IC.The voltage comparable chip selects 1013D.
Compared with prior art, the beneficial effects of the present invention are: the present invention not only can accurate measurement of vacuum, also disappear
It except the security risk of MaLeod gauge, is shown using liquid crystal display, not only good visual effect, crash resistance is also strong, improves vacuum degree
Measuring speed, conventionally employed MaLeod gauge needs 1min that could complete vacuum measurement, can using 1s after electron vacuum gage
To complete vacuum measurement, measurement accuracy is improved, MaLeod gauge uses for a long time, and mercury can go bad, and then lead to mercury
Variable density, then the vacuum degree that MaLeod gauge is measured is also inaccurate；On the other hand, when using MaLeod gauge, it is
Prevent mercury from flowing backward into GIS electrical equipment, the mercury on MaLeod gauge both sides is unable to reach level, and this reduces Maxwells
The measurement accuracy of vacuum meter, after electron vacuum gage, the measurement accuracy of vacuum degree is up to 1Pa.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the accurate electron vacuum gage of reverse-filling.
Fig. 2 is the circuit diagram of Pi Lani vacuum transducer.
Fig. 3 is the circuit diagram of operational amplifier.
Fig. 4 is the circuit diagram of A/D conversion circuit.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
Referring to Fig. 1, the accurate electron vacuum gage of a kind of reverse-filling of the invention, including power supply, Pi Lani vacuum transducer,
Operational amplifier, A/D conversion circuit, eprom memory, processor, liquid crystal display and digital control and interface circuit, institute
Power supply is stated for for Pi Lani vacuum transducer, operational amplifier, A/D conversion circuit and the confession of digital control and interface circuit
Electricity, digital control and interface circuit are separately connected A/D conversion circuit, eprom memory, processor and liquid crystal display, and A/D turns
It changes circuit and Pi Lani vacuum transducer is also connected by operational amplifier；The processor is compared with voltage reference chip, voltage
Chip interactive connection.
The Pi Lani vacuum transducer uses VSP841 type vacuum sensor.The eprom memory is selected
4L08EPROM.The regulated power supply that the power supply selects chip 78L10A to constitute.The processor selects Texas Instrument
16 high-precision microprocessors of M430F427 are as control CPU.The voltage reference chip selects 385B12 benchmark IC.It is described
Voltage comparable chip selects 1013D.
The present invention converts simulation for physical quantity air pressure at work, by Pi Lani vacuum transducer and its driving circuit
Semaphore is amplified and is transferred to A/D conversion circuit by operational amplifier by signal, analog signal, will by A/D conversion circuit
AC signal is converted to direct current signal, and digital control and interface circuit obtains direct current signal, carries out operation by control CPU, will
The digital signal that digital control and interface circuit receives, compares with the tables of data in eprom memory, to obtain true
Reciprocal of duty cycle value, and timing refreshes display on liquid crystal display.
In above-described embodiment, the circuit diagram of the Pi Lani vacuum transducer is as shown in Fig. 2, in Fig. 2, R: resistance, SV: electricity
Table switching switch is pressed, VAC: isolation switching switch, R ': resistance and slide rheostat, G: balanced balanced current table.
The working principle of the Pi Lani vacuum transducer are as follows:
The temperature of filament can change with the variation of vacuum pressure in sensor contact, since filament is high resistance temperature
Coefficient material, the change of the temperature of filament will lead to filament resistance value and change, and measure electricity by the sensing of resistance bridge
The change of resistance, so as to prove out the variation of vacuum pressure.
On the right side of in Fig. 2, rightmost has a sensing head lamp silk and one with reference to sensing head lamp silk in Wheatstone bridge.With reference to sense
Gauge head has and senses a very much like construction, but has been evacuated to quite high vacuum state inside it and has been sealed, and to the greatest extent
It is possibly close to the position of sensing head sensing pressure, there is ambient temperature compensation.The another side of electric bridge has in order
One variable resistance and fixed resistance.On the electric bridge parallel connection and a power supply, and plug into one between two resistance between two inductive heads
A balanced balanced current table G.
When sensing the vacuum pressure in head and changing, sense the resistance value of head filament resistance also can with changing,
The reading for the balanced balanced current table that will lead in electric bridge is not varied for zero.It can adjust the variable resistance in electric bridge at this time
R, make the reading of balanced balanced current table is zero again.It, can be with by the variation of two sections of voltage of electric bridge when the electric current that power supply provides is constant
The variation for perceiving filament resistance can read vacuum pressure from the voltmeter for being connected across electric bridge with proof-reading via being conversion
Force value.
In above-described embodiment, the circuit diagram of the operational amplifier is as shown in figure 3, in Fig. 3, R: resistance, C: capacitor.
The working principle of the operational amplifier are as follows: for operational amplifier there are two input terminal, one of input terminal is electricity
The common end and an output end that pressure is zero.Also the non-inverting input end in inverting input end and output end are known respectively as.Work as voltage
U is added between the end a and common end (common end is the point that voltage is zero, it is equivalent to the datum node in circuit), and its reality
Both when direction is higher than common end from the end a, output voltage U actual direction is then directed toward the end o from common end, i.e., direction just phase
Instead.When input voltage U+ is added between the end b and common end, U is opposite with the actual direction of both U+, and common end is just identical.In order to
For the sake of difference, the end a and the end b use "-" and "+" number to mark respectively.
In above-described embodiment, the circuit diagram of the A/D conversion circuit is as shown in figure 4, in Fig. 4, R: resistance, C: capacitor,
D: thyristor.
The working principle of the A/D conversion circuit are as follows: rectification circuit is made of diode D and resistance R.Input voltage is one
The sine voltage that a direction and size all change over time.In 0~T time, positive half cycle voltage is positive, and minus half shaft voltage is
It is negative.Diode bears the conducting of forward voltage face at this time, and voltage is added on load resistance R, and within next cycle time, voltage is positive and negative
Relationship changes.At this moment D bears backward voltage, is not turned on, no-voltage on load resistance.In rest period, negative the half of alternating current
Week just " is cut ", and only positive half cycle obtains an one direction voltage by R on R, has achieved the purpose that rectification.
It is obvious to a person skilled in the art that invention is not limited to the details of the above exemplary embodiments, Er Qie
In the case where without departing substantially from spirit or essential attributes of the invention, the present invention can be realized in other specific forms.Therefore, no matter
From the point of view of which point, the present embodiments are to be considered as illustrative and not restrictive, and the scope of the present invention is by appended power
Benefit requires rather than above description limits, it is intended that all by what is fallen within the meaning and scope of the equivalent elements of the claims
Variation is included within the present invention.Any reference signs in the claims should not be construed as limiting the involved claims.
In addition, it should be understood that although this specification is described in terms of embodiments, but not each embodiment is only wrapped
Containing an independent technical solution, this description of the specification is merely for the sake of clarity, and those skilled in the art should
It considers the specification as a whole, the technical solutions in the various embodiments may also be suitably combined, forms those skilled in the art
The other embodiments being understood that.
Claims (7)
1. a kind of accurate electron vacuum gage of reverse-filling, which is characterized in that including power supply, Pi Lani vacuum transducer, operation amplifier
Device, A/D conversion circuit, eprom memory, processor, liquid crystal display and digital control and interface circuit, the power supply are used
It is controlled in for Pi Lani vacuum transducer, operational amplifier, A/D conversion circuit and the power supply of digital control and interface circuit, number
System and interface circuit are separately connected A/D conversion circuit, eprom memory, processor and liquid crystal display, and A/D conversion circuit is also
Pi Lani vacuum transducer is connected by operational amplifier；The processor is interacted with voltage reference chip, voltage comparable chip
Connection.
2. the accurate electron vacuum gage of reverse-filling according to claim 1, which is characterized in that the Pi Lani vacuum transducer
Using VSP841 type vacuum sensor.
3. the accurate electron vacuum gage of reverse-filling according to claim 1, which is characterized in that the eprom memory is selected
4L08EPROM。
4. the accurate electron vacuum gage of reverse-filling according to claim 1, which is characterized in that the power supply selects chip
The regulated power supply that 78L10A is constituted.
5. the accurate electron vacuum gage of reverse-filling according to claim 1, which is characterized in that the processor selects Dezhou instrument
16 high-precision microprocessors of the M430F427 of device are as control CPU.
6. the accurate electron vacuum gage of reverse-filling according to claim 1, which is characterized in that the voltage reference chip is selected
385B12 benchmark IC.
7. the accurate electron vacuum gage of reverse-filling according to claim 1, which is characterized in that the voltage comparable chip is selected
1013D。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910364631.4A CN109974931A (en) | 2019-04-30 | 2019-04-30 | A kind of accurate electron vacuum gage of reverse-filling |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910364631.4A CN109974931A (en) | 2019-04-30 | 2019-04-30 | A kind of accurate electron vacuum gage of reverse-filling |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109974931A true CN109974931A (en) | 2019-07-05 |
Family
ID=67087512
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910364631.4A Pending CN109974931A (en) | 2019-04-30 | 2019-04-30 | A kind of accurate electron vacuum gage of reverse-filling |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109974931A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111721469A (en) * | 2020-06-17 | 2020-09-29 | 中国计量大学 | High-sensitivity miniature Pirani gauge |
| CN112097991A (en) * | 2020-09-11 | 2020-12-18 | 无锡物联网创新中心有限公司 | Pirani vacuum gauge system |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2105472A (en) * | 1981-08-08 | 1983-03-23 | Leybold Heraeus Gmbh & Co Kg | Pirani vacuum gauge |
| JP2007285947A (en) * | 2006-04-19 | 2007-11-01 | Shimadzu Corp | Vacuum gauge |
| JP2012026995A (en) * | 2010-07-28 | 2012-02-09 | Ulvac Japan Ltd | Transducer type vacuum gauge and single crystal pulling method using the same |
| CN206546229U (en) * | 2017-01-24 | 2017-10-10 | 合肥华瑞真空科技有限公司 | A kind of precision resister vacuum meter sampling system |
| CN109425463A (en) * | 2017-08-31 | 2019-03-05 | 苏州润桐专利运营有限公司 | A kind of high-precision antidetonation Pi Lani vacuum transducer |
| CN208595998U (en) * | 2018-08-17 | 2019-03-12 | 杭州盘古自动化系统有限公司 | A kind of resistance vacuum gauge with digital calibration function |
| CN209559401U (en) * | 2019-04-30 | 2019-10-29 | 国网安徽省电力有限公司培训中心 | A kind of accurate electron vacuum gage of reverse-filling |
-
2019
- 2019-04-30 CN CN201910364631.4A patent/CN109974931A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2105472A (en) * | 1981-08-08 | 1983-03-23 | Leybold Heraeus Gmbh & Co Kg | Pirani vacuum gauge |
| JP2007285947A (en) * | 2006-04-19 | 2007-11-01 | Shimadzu Corp | Vacuum gauge |
| JP2012026995A (en) * | 2010-07-28 | 2012-02-09 | Ulvac Japan Ltd | Transducer type vacuum gauge and single crystal pulling method using the same |
| CN206546229U (en) * | 2017-01-24 | 2017-10-10 | 合肥华瑞真空科技有限公司 | A kind of precision resister vacuum meter sampling system |
| CN109425463A (en) * | 2017-08-31 | 2019-03-05 | 苏州润桐专利运营有限公司 | A kind of high-precision antidetonation Pi Lani vacuum transducer |
| CN208595998U (en) * | 2018-08-17 | 2019-03-12 | 杭州盘古自动化系统有限公司 | A kind of resistance vacuum gauge with digital calibration function |
| CN209559401U (en) * | 2019-04-30 | 2019-10-29 | 国网安徽省电力有限公司培训中心 | A kind of accurate electron vacuum gage of reverse-filling |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111721469A (en) * | 2020-06-17 | 2020-09-29 | 中国计量大学 | High-sensitivity miniature Pirani gauge |
| CN112097991A (en) * | 2020-09-11 | 2020-12-18 | 无锡物联网创新中心有限公司 | Pirani vacuum gauge system |
| CN112097991B (en) * | 2020-09-11 | 2021-06-08 | 无锡物联网创新中心有限公司 | Pirani vacuum gauge system |
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