FR2505712B1 - - Google Patents

Info

Publication number
FR2505712B1
FR2505712B1 FR8110183A FR8110183A FR2505712B1 FR 2505712 B1 FR2505712 B1 FR 2505712B1 FR 8110183 A FR8110183 A FR 8110183A FR 8110183 A FR8110183 A FR 8110183A FR 2505712 B1 FR2505712 B1 FR 2505712B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8110183A
Other languages
French (fr)
Other versions
FR2505712A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
PROCEDES EQUIP SCIENCES IND SA
Original Assignee
PROCEDES EQUIP SCIENCES IND SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by PROCEDES EQUIP SCIENCES IND SA filed Critical PROCEDES EQUIP SCIENCES IND SA
Priority to FR8110183A priority Critical patent/FR2505712A1/fr
Priority to JP57084679A priority patent/JPS57201168A/ja
Publication of FR2505712A1 publication Critical patent/FR2505712A1/fr
Application granted granted Critical
Publication of FR2505712B1 publication Critical patent/FR2505712B1/fr
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/34—Accessories
    • B24B37/345—Feeding, loading or unloading work specially adapted to lapping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/005—Feeding or manipulating devices specially adapted to grinding machines

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
FR8110183A 1981-05-18 1981-05-18 Machine a polir automatique, pour plaquettes minces, fragiles et deformables Granted FR2505712A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR8110183A FR2505712A1 (fr) 1981-05-18 1981-05-18 Machine a polir automatique, pour plaquettes minces, fragiles et deformables
JP57084679A JPS57201168A (en) 1981-05-18 1982-05-18 Automatic grinder for thin fragile wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8110183A FR2505712A1 (fr) 1981-05-18 1981-05-18 Machine a polir automatique, pour plaquettes minces, fragiles et deformables

Publications (2)

Publication Number Publication Date
FR2505712A1 FR2505712A1 (fr) 1982-11-19
FR2505712B1 true FR2505712B1 (en:Method) 1985-01-11

Family

ID=9258757

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8110183A Granted FR2505712A1 (fr) 1981-05-18 1981-05-18 Machine a polir automatique, pour plaquettes minces, fragiles et deformables

Country Status (2)

Country Link
JP (1) JPS57201168A (en:Method)
FR (1) FR2505712A1 (en:Method)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4653231A (en) * 1985-11-01 1987-03-31 Motorola, Inc. Polishing system with underwater Bernoulli pickup
US5117590A (en) * 1988-08-12 1992-06-02 Shin-Etsu Handotai Co., Ltd. Method of automatically chamfering a wafer and apparatus therefor
US5885138A (en) 1993-09-21 1999-03-23 Ebara Corporation Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device
US5830045A (en) 1995-08-21 1998-11-03 Ebara Corporation Polishing apparatus
FR2843320B1 (fr) * 2002-08-12 2005-05-06 Procedes & Equipement Pour Les Dispositif de preparation d'echantillons metallographiques automatique

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1238802B (de) * 1963-12-18 1967-04-13 Wilhelm Loh K G Optikmaschinen Beschickungseinrichtung an Linsenschleif-, insbesondere Linsenrandschleifmaschinen
US3680267A (en) * 1971-02-18 1972-08-01 Carmet Co Workpiece loading and unloading method and apparatus
US3841028A (en) * 1972-08-24 1974-10-15 Crane Packing Co Apparatus for handling workpieces to be polished
US4062463A (en) * 1976-05-11 1977-12-13 Machine Technology, Inc. Automated single cassette load mechanism for scrubber
US4141180A (en) * 1977-09-21 1979-02-27 Kayex Corporation Polishing apparatus

Also Published As

Publication number Publication date
FR2505712A1 (fr) 1982-11-19
JPS57201168A (en) 1982-12-09

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Legal Events

Date Code Title Description
ST Notification of lapse