FR2495192B1 - Procede de formation de dessins metalliques en couches minces par attaque chimique, notamment pour tetes d'enregistrement magnetique - Google Patents

Procede de formation de dessins metalliques en couches minces par attaque chimique, notamment pour tetes d'enregistrement magnetique

Info

Publication number
FR2495192B1
FR2495192B1 FR8122581A FR8122581A FR2495192B1 FR 2495192 B1 FR2495192 B1 FR 2495192B1 FR 8122581 A FR8122581 A FR 8122581A FR 8122581 A FR8122581 A FR 8122581A FR 2495192 B1 FR2495192 B1 FR 2495192B1
Authority
FR
France
Prior art keywords
thin film
magnetic recording
recording heads
chemical attack
forming thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8122581A
Other languages
English (en)
French (fr)
Other versions
FR2495192A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Memorex Corp
Original Assignee
Memorex Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Memorex Corp filed Critical Memorex Corp
Publication of FR2495192A1 publication Critical patent/FR2495192A1/fr
Application granted granted Critical
Publication of FR2495192B1 publication Critical patent/FR2495192B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/32—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying conductive, insulating or magnetic material on a magnetic film, specially adapted for a thin magnetic film
    • H01F41/34—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying conductive, insulating or magnetic material on a magnetic film, specially adapted for a thin magnetic film in patterns, e.g. by lithography
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
    • H05K3/061—Etching masks
    • H05K3/064—Photoresists
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109—Details
    • G11B5/3116—Shaping of layers, poles or gaps for improving the form of the electrical signal transduced, e.g. for shielding, contour effect, equalizing, side flux fringing, cross talk reduction between heads or between heads and information tracks
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/05—Patterning and lithography; Masks; Details of resist
    • H05K2203/0562—Details of resist
    • H05K2203/0597—Resist applied over the edges or sides of conductors, e.g. for protection during etching or plating
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/108—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by semi-additive methods; masks therefor
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/38—Improvement of the adhesion between the insulating substrate and the metal
    • H05K3/388—Improvement of the adhesion between the insulating substrate and the metal by the use of a metallic or inorganic thin film adhesion layer

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Magnetic Heads (AREA)
  • ing And Chemical Polishing (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Physical Vapour Deposition (AREA)
  • Laminated Bodies (AREA)
FR8122581A 1980-12-03 1981-12-02 Procede de formation de dessins metalliques en couches minces par attaque chimique, notamment pour tetes d'enregistrement magnetique Expired FR2495192B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US21235980A 1980-12-03 1980-12-03

Publications (2)

Publication Number Publication Date
FR2495192A1 FR2495192A1 (fr) 1982-06-04
FR2495192B1 true FR2495192B1 (fr) 1985-11-08

Family

ID=22790676

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8122581A Expired FR2495192B1 (fr) 1980-12-03 1981-12-02 Procede de formation de dessins metalliques en couches minces par attaque chimique, notamment pour tetes d'enregistrement magnetique

Country Status (5)

Country Link
JP (1) JPS57120675A (enrdf_load_stackoverflow)
DE (1) DE3147401A1 (enrdf_load_stackoverflow)
FR (1) FR2495192B1 (enrdf_load_stackoverflow)
GB (1) GB2088412B (enrdf_load_stackoverflow)
IE (1) IE51854B1 (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4707586A (en) * 1981-05-11 1987-11-17 Sierracin Corporation Electro conductive film system for aircraft windows
US4424271A (en) * 1982-09-15 1984-01-03 Magnetic Peripherals Inc. Deposition process
US4874930A (en) * 1983-09-07 1989-10-17 Sierracin Corporation Electroconductive film system for aircraft windows
JPS621552A (ja) * 1985-06-28 1987-01-07 Toshiba Corp 記録ヘツドの製造方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2209216B1 (enrdf_load_stackoverflow) * 1972-11-30 1977-09-30 Ibm
US3853715A (en) * 1973-12-20 1974-12-10 Ibm Elimination of undercut in an anodically active metal during chemical etching
DE2512115C3 (de) * 1975-03-19 1979-06-21 Siemens Ag, 1000 Berlin Und 8000 Muenchen Verfahren zur Herstellung mikroskopisch kleiner Metall- und Metallegierungs-Strukturen für einen Zylinderdomänenspeicher

Also Published As

Publication number Publication date
IE51854B1 (en) 1987-04-15
GB2088412A (en) 1982-06-09
DE3147401A1 (de) 1982-07-08
JPH037756B2 (enrdf_load_stackoverflow) 1991-02-04
JPS57120675A (en) 1982-07-27
GB2088412B (en) 1983-09-21
FR2495192A1 (fr) 1982-06-04
IE812691L (en) 1982-06-03
DE3147401C2 (enrdf_load_stackoverflow) 1990-09-06

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Legal Events

Date Code Title Description
ST Notification of lapse