FR2489589B1 - - Google Patents

Info

Publication number
FR2489589B1
FR2489589B1 FR8018836A FR8018836A FR2489589B1 FR 2489589 B1 FR2489589 B1 FR 2489589B1 FR 8018836 A FR8018836 A FR 8018836A FR 8018836 A FR8018836 A FR 8018836A FR 2489589 B1 FR2489589 B1 FR 2489589B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8018836A
Other versions
FR2489589A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Office National dEtudes et de Recherches Aerospatiales ONERA
Original Assignee
Office National dEtudes et de Recherches Aerospatiales ONERA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Office National dEtudes et de Recherches Aerospatiales ONERA filed Critical Office National dEtudes et de Recherches Aerospatiales ONERA
Priority to FR8018836A priority Critical patent/FR2489589A1/fr
Priority to US06/296,549 priority patent/US4405865A/en
Priority to JP1981126679U priority patent/JPS57198861U/ja
Publication of FR2489589A1 publication Critical patent/FR2489589A1/fr
Application granted granted Critical
Publication of FR2489589B1 publication Critical patent/FR2489589B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Microscoopes, Condenser (AREA)
FR8018836A 1980-08-29 1980-08-29 Dispositif de reglage de la position et de l'orientation autour d'un axe d'un porte-echantillon pour microscope electronique Granted FR2489589A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
FR8018836A FR2489589A1 (fr) 1980-08-29 1980-08-29 Dispositif de reglage de la position et de l'orientation autour d'un axe d'un porte-echantillon pour microscope electronique
US06/296,549 US4405865A (en) 1980-08-29 1981-08-26 Device for adjusting the position and the orientation around an axis of a sample holder for an electron microscope
JP1981126679U JPS57198861U (fr) 1980-08-29 1981-08-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8018836A FR2489589A1 (fr) 1980-08-29 1980-08-29 Dispositif de reglage de la position et de l'orientation autour d'un axe d'un porte-echantillon pour microscope electronique

Publications (2)

Publication Number Publication Date
FR2489589A1 FR2489589A1 (fr) 1982-03-05
FR2489589B1 true FR2489589B1 (fr) 1983-09-09

Family

ID=9245526

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8018836A Granted FR2489589A1 (fr) 1980-08-29 1980-08-29 Dispositif de reglage de la position et de l'orientation autour d'un axe d'un porte-echantillon pour microscope electronique

Country Status (3)

Country Link
US (1) US4405865A (fr)
JP (1) JPS57198861U (fr)
FR (1) FR2489589A1 (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59196549A (ja) * 1983-04-22 1984-11-07 Jeol Ltd 電子線装置等用試料装置
DE3546095A1 (de) * 1985-12-24 1987-06-25 Zeiss Carl Fa Goniometertisch
JPS6431337A (en) * 1987-07-28 1989-02-01 Hitachi Ltd Sample shifting/inclining device for electron microscope or the like
JP2561699B2 (ja) * 1988-04-28 1996-12-11 日本電子株式会社 電子顕微鏡用試料装置
JP3736772B2 (ja) * 1994-10-20 2006-01-18 日本電子株式会社 電子顕微鏡用試料保持装置
JP5476087B2 (ja) * 2008-12-03 2014-04-23 日本電子株式会社 荷電粒子線装置の物体位置決め装置
US8604445B2 (en) * 2011-12-28 2013-12-10 Jeol Ltd. Method of evacuating sample holder, pumping system, and electron microscope
JP6108674B2 (ja) * 2012-03-16 2017-04-05 株式会社日立ハイテクサイエンス 荷電粒子ビーム装置及び試料搬送装置
WO2016052776A1 (fr) * 2014-09-30 2016-04-07 한국기초과학지원연구원 Dispositif de support triaxial de microscope électronique à structure simple

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL93272C (fr) * 1957-01-15
FR2102553A5 (fr) * 1970-08-07 1972-04-07 Sopelem
DE2542351A1 (de) * 1975-09-19 1977-03-24 Siemens Ag Korpuskularstrahloptisches geraet mit einem stabfoermigen objekthalter

Also Published As

Publication number Publication date
JPS57198861U (fr) 1982-12-17
US4405865A (en) 1983-09-20
FR2489589A1 (fr) 1982-03-05

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Legal Events

Date Code Title Description
ST Notification of lapse