FR2477769A1 - Dispositif pour microscope electronique permettant un traitement in situ d'echantillons - Google Patents

Dispositif pour microscope electronique permettant un traitement in situ d'echantillons Download PDF

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Publication number
FR2477769A1
FR2477769A1 FR8005037A FR8005037A FR2477769A1 FR 2477769 A1 FR2477769 A1 FR 2477769A1 FR 8005037 A FR8005037 A FR 8005037A FR 8005037 A FR8005037 A FR 8005037A FR 2477769 A1 FR2477769 A1 FR 2477769A1
Authority
FR
France
Prior art keywords
sample
treatment
electron microscope
microscope
sample carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR8005037A
Other languages
English (en)
French (fr)
Other versions
FR2477769B1 (enExample
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
GONCHOND JEAN PIERRE
Original Assignee
GONCHOND JEAN PIERRE
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by GONCHOND JEAN PIERRE filed Critical GONCHOND JEAN PIERRE
Priority to FR8005037A priority Critical patent/FR2477769A1/fr
Priority to JP2893581U priority patent/JPS579159U/ja
Publication of FR2477769A1 publication Critical patent/FR2477769A1/fr
Application granted granted Critical
Publication of FR2477769B1 publication Critical patent/FR2477769B1/fr
Granted legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261—Details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Sampling And Sample Adjustment (AREA)
FR8005037A 1980-03-06 1980-03-06 Dispositif pour microscope electronique permettant un traitement in situ d'echantillons Granted FR2477769A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR8005037A FR2477769A1 (fr) 1980-03-06 1980-03-06 Dispositif pour microscope electronique permettant un traitement in situ d'echantillons
JP2893581U JPS579159U (enExample) 1980-03-06 1981-03-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8005037A FR2477769A1 (fr) 1980-03-06 1980-03-06 Dispositif pour microscope electronique permettant un traitement in situ d'echantillons

Publications (2)

Publication Number Publication Date
FR2477769A1 true FR2477769A1 (fr) 1981-09-11
FR2477769B1 FR2477769B1 (enExample) 1982-09-24

Family

ID=9239385

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8005037A Granted FR2477769A1 (fr) 1980-03-06 1980-03-06 Dispositif pour microscope electronique permettant un traitement in situ d'echantillons

Country Status (2)

Country Link
JP (1) JPS579159U (enExample)
FR (1) FR2477769A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0369913A1 (fr) * 1988-11-18 1990-05-23 CHAIXMECA, Sàrl Dispositif pour le transfert et des réactions in-situ sous atmosphère contrôlée d'échantillons destinés à l'examen en microscopie électronique en transmission

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3858049A (en) * 1973-09-17 1974-12-31 Etec Corp Method and apparatus for sem specimen coating and transfer
DE2511449A1 (de) * 1975-03-15 1976-09-16 Leybold Heraeus Gmbh & Co Kg Probenschleuse

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3858049A (en) * 1973-09-17 1974-12-31 Etec Corp Method and apparatus for sem specimen coating and transfer
DE2511449A1 (de) * 1975-03-15 1976-09-16 Leybold Heraeus Gmbh & Co Kg Probenschleuse

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
EXRV/76 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0369913A1 (fr) * 1988-11-18 1990-05-23 CHAIXMECA, Sàrl Dispositif pour le transfert et des réactions in-situ sous atmosphère contrôlée d'échantillons destinés à l'examen en microscopie électronique en transmission

Also Published As

Publication number Publication date
FR2477769B1 (enExample) 1982-09-24
JPS579159U (enExample) 1982-01-18

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