FR2477709A1 - Capsule manometrique - Google Patents
Capsule manometrique Download PDFInfo
- Publication number
- FR2477709A1 FR2477709A1 FR8104040A FR8104040A FR2477709A1 FR 2477709 A1 FR2477709 A1 FR 2477709A1 FR 8104040 A FR8104040 A FR 8104040A FR 8104040 A FR8104040 A FR 8104040A FR 2477709 A1 FR2477709 A1 FR 2477709A1
- Authority
- FR
- France
- Prior art keywords
- membrane
- substrate
- capsule according
- manometric capsule
- manometric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002775 capsule Substances 0.000 title claims abstract description 35
- 239000012528 membrane Substances 0.000 claims abstract description 36
- 239000000758 substrate Substances 0.000 claims abstract description 17
- 238000000034 method Methods 0.000 claims abstract description 11
- 238000002485 combustion reaction Methods 0.000 claims abstract description 5
- 239000002184 metal Substances 0.000 claims description 10
- 239000011521 glass Substances 0.000 claims description 7
- 239000002241 glass-ceramic Substances 0.000 claims description 6
- 239000000919 ceramic Substances 0.000 claims description 3
- 238000005452 bending Methods 0.000 claims description 2
- 230000008018 melting Effects 0.000 claims description 2
- 238000002844 melting Methods 0.000 claims description 2
- 150000001768 cations Chemical class 0.000 claims 2
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 239000011796 hollow space material Substances 0.000 claims 1
- 239000007789 gas Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 239000003990 capacitor Substances 0.000 description 3
- 229910010293 ceramic material Inorganic materials 0.000 description 3
- 238000010411 cooking Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000005245 sintering Methods 0.000 description 2
- 240000000731 Fagus sylvatica Species 0.000 description 1
- 235000010099 Fagus sylvatica Nutrition 0.000 description 1
- 241000158147 Sator Species 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 238000010237 hybrid technique Methods 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 239000006259 organic additive Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 235000021178 picnic Nutrition 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000000779 smoke Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
- G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
- G01L9/0044—Constructional details of non-semiconductive diaphragms
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Analytical Chemistry (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19803008572 DE3008572C2 (de) | 1980-03-06 | 1980-03-06 | Druckmeßdose |
| DE19803009811 DE3009811A1 (de) | 1980-03-14 | 1980-03-14 | Druckmessdose |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2477709A1 true FR2477709A1 (fr) | 1981-09-11 |
| FR2477709B1 FR2477709B1 (en:Method) | 1984-05-25 |
Family
ID=25784117
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR8104040A Granted FR2477709A1 (fr) | 1980-03-06 | 1981-02-27 | Capsule manometrique |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US4382247A (en:Method) |
| FR (1) | FR2477709A1 (en:Method) |
| GB (1) | GB2071853B (en:Method) |
| IT (1) | IT1135557B (en:Method) |
Families Citing this family (31)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS597234A (ja) * | 1982-07-05 | 1984-01-14 | Aisin Seiki Co Ltd | 圧力センサ |
| USRE33518E (en) * | 1983-04-29 | 1991-01-15 | Baxter International, Inc. | Pressure transducer assembly |
| NO157119C (no) * | 1985-07-12 | 1988-01-20 | Warren M Brodey | Hndbetjent organ tilknyttet et kybernetisk system, samt anvendelse av organet. |
| DE8525588U1 (de) * | 1985-09-07 | 1987-01-08 | Robert Bosch Gmbh, 7000 Stuttgart | Drucksensor |
| IT1187900B (it) * | 1986-02-10 | 1987-12-23 | Marelli Autronica | Dispositivo sensore di pressione |
| US4984467A (en) * | 1988-03-15 | 1991-01-15 | Pfister Gmbh | Transducer for pressures and/or vibrations and method for manufacturing thereof |
| DE3829195A1 (de) * | 1988-08-29 | 1990-03-08 | Bosch Gmbh Robert | Temperaturfuehler |
| DE3829194A1 (de) * | 1988-08-29 | 1990-03-08 | Bosch Gmbh Robert | Einrichtung zur messung einer stroemenden luftmenge |
| US5099738A (en) * | 1989-01-03 | 1992-03-31 | Hotz Instruments Technology, Inc. | MIDI musical translator |
| DE3912217A1 (de) * | 1989-04-13 | 1990-10-18 | Endress Hauser Gmbh Co | Drucksensor |
| US5279040A (en) * | 1990-05-18 | 1994-01-18 | Robert Bosch Gmbh | Fluid-based acceleration and tilt sensor |
| US5189916A (en) * | 1990-08-24 | 1993-03-02 | Ngk Spark Plug Co., Ltd. | Pressure sensor |
| DE4121390C2 (de) * | 1991-06-28 | 1994-10-20 | Bosch Gmbh Robert | Verfahren zum Herstellen einer freitragenden Dickschichtstruktur |
| US5637802A (en) | 1995-02-28 | 1997-06-10 | Rosemount Inc. | Capacitive pressure sensor for a pressure transmitted where electric field emanates substantially from back sides of plates |
| US6484585B1 (en) | 1995-02-28 | 2002-11-26 | Rosemount Inc. | Pressure sensor for a pressure transmitter |
| GB2308447A (en) * | 1995-12-22 | 1997-06-25 | Ultra Hydraulics Ltd | Pressure sensing device |
| US5945605A (en) * | 1997-11-19 | 1999-08-31 | Sensym, Inc. | Sensor assembly with sensor boss mounted on substrate |
| JP4334139B2 (ja) * | 1997-12-23 | 2009-09-30 | インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング | 容量式の真空測定セルのためのダイヤフラム |
| WO1999034184A1 (de) | 1997-12-23 | 1999-07-08 | Unaxis Trading Ag | Kapazitive vakuummesszelle |
| US6536258B1 (en) * | 1998-11-04 | 2003-03-25 | The University Of Toledo | Blast load simulation system |
| GB2344179A (en) * | 1998-11-28 | 2000-05-31 | Ford Global Tech Inc | Spark plug with combustion pressure sensor |
| US6508129B1 (en) | 2000-01-06 | 2003-01-21 | Rosemount Inc. | Pressure sensor capsule with improved isolation |
| US6505516B1 (en) | 2000-01-06 | 2003-01-14 | Rosemount Inc. | Capacitive pressure sensing with moving dielectric |
| US6520020B1 (en) | 2000-01-06 | 2003-02-18 | Rosemount Inc. | Method and apparatus for a direct bonded isolated pressure sensor |
| WO2001050106A1 (en) | 2000-01-06 | 2001-07-12 | Rosemount Inc. | Grain growth of electrical interconnection for microelectromechanical systems (mems) |
| US6561038B2 (en) | 2000-01-06 | 2003-05-13 | Rosemount Inc. | Sensor with fluid isolation barrier |
| DE10203024B4 (de) * | 2002-01-26 | 2009-11-26 | Robert Bosch Gmbh | Verfahren zur Herstellung eines Keramiksubstrats |
| US6848316B2 (en) | 2002-05-08 | 2005-02-01 | Rosemount Inc. | Pressure sensor assembly |
| DE502004001604D1 (de) * | 2004-05-05 | 2006-11-09 | Schreiner Group Gmbh & Co Kg | Verfahren zum Abdecken und Belüften eines Funktionsbereichs und Folienanordnung zur Durchführung des Verfahrens |
| US7615834B2 (en) * | 2006-02-28 | 2009-11-10 | The Board Of Trustees Of The Leland Stanford Junior University | Capacitive micromachined ultrasonic transducer(CMUT) with varying thickness membrane |
| US8042401B2 (en) * | 2008-06-12 | 2011-10-25 | Rosemount, Inc. | Isolation system for process pressure measurement |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2021479A1 (de) * | 1970-05-02 | 1971-11-11 | Kleinwaechter Hans | Druckmessgeraet zur Messung von Drucken in Gasen und Fluessigkeiten |
| FR2139401A5 (en:Method) * | 1971-05-10 | 1973-01-05 | Bendix Corp | |
| FR2297485A1 (fr) * | 1975-01-07 | 1976-08-06 | Bendix Corp | Condensateur sensible a la pression |
| FR2344006A1 (fr) * | 1976-03-12 | 1977-10-07 | Kavlico Corp | Transducteur de pression capacitif et procede de fabrication d'un tel transducteur |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3455165A (en) * | 1965-12-22 | 1969-07-15 | Pierre Huet | Pressure sensitive devices |
| US4040172A (en) * | 1975-05-01 | 1977-08-09 | Kulite Semiconductor Products, Inc. | Method of manufacturing integral transducer assemblies employing built-in pressure limiting |
| US4079508A (en) * | 1975-08-13 | 1978-03-21 | The Board Of Trustees Of The Leland Stanford Junior University | Miniature absolute pressure transducer assembly and method |
| US4127840A (en) * | 1977-02-22 | 1978-11-28 | Conrac Corporation | Solid state force transducer |
-
1980
- 1980-08-27 US US06/181,839 patent/US4382247A/en not_active Expired - Lifetime
-
1981
- 1981-02-20 IT IT19877/81A patent/IT1135557B/it active
- 1981-02-27 FR FR8104040A patent/FR2477709A1/fr active Granted
- 1981-03-05 GB GB8106878A patent/GB2071853B/en not_active Expired
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2021479A1 (de) * | 1970-05-02 | 1971-11-11 | Kleinwaechter Hans | Druckmessgeraet zur Messung von Drucken in Gasen und Fluessigkeiten |
| FR2139401A5 (en:Method) * | 1971-05-10 | 1973-01-05 | Bendix Corp | |
| FR2297485A1 (fr) * | 1975-01-07 | 1976-08-06 | Bendix Corp | Condensateur sensible a la pression |
| FR2344006A1 (fr) * | 1976-03-12 | 1977-10-07 | Kavlico Corp | Transducteur de pression capacitif et procede de fabrication d'un tel transducteur |
Also Published As
| Publication number | Publication date |
|---|---|
| GB2071853A (en) | 1981-09-23 |
| IT8119877A0 (it) | 1981-02-20 |
| GB2071853B (en) | 1984-05-10 |
| IT1135557B (it) | 1986-08-27 |
| US4382247A (en) | 1983-05-03 |
| FR2477709B1 (en:Method) | 1984-05-25 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |