FR2468913A2 - Dispositif destine a un transducteur comportant une structure fixe - Google Patents

Dispositif destine a un transducteur comportant une structure fixe

Info

Publication number
FR2468913A2
FR2468913A2 FR8023535A FR8023535A FR2468913A2 FR 2468913 A2 FR2468913 A2 FR 2468913A2 FR 8023535 A FR8023535 A FR 8023535A FR 8023535 A FR8023535 A FR 8023535A FR 2468913 A2 FR2468913 A2 FR 2468913A2
Authority
FR
France
Prior art keywords
fixed structure
transducer
support
sensor
fixed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR8023535A
Other languages
English (en)
Other versions
FR2468913B2 (fr
Inventor
Richard A Hanson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sundstrand Data Control Inc
Original Assignee
Sundstrand Data Control Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sundstrand Data Control Inc filed Critical Sundstrand Data Control Inc
Publication of FR2468913A2 publication Critical patent/FR2468913A2/fr
Application granted granted Critical
Publication of FR2468913B2 publication Critical patent/FR2468913B2/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/132—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electromagnetic counterbalancing means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Pressure Sensors (AREA)
  • Vehicle Body Suspensions (AREA)

Abstract

L'invention concerne un dispositif destiné à un transducteur comportant une structure fixe. La structure fixe comprend deux éléments fixes 10, 12 entre des faces opposées desquelles est placé un ensemble 20 à masse d'épreuve comprenant un support extérieur annulaire 22 par rapport auquel peut se déplacer un élément 26 qui s'étend radialement vers l'intérieur du support 22 L'élément mobile 26 porte un capteur qui est relié à l'élément 22 de support par des conducteurs électriques dont la surface est prise en considération lors du calcul de la position du centre géométrique du capteur, afin de réduire davantage les erreurs systématiques. Domaine d'application : accéléromètres.
FR8023535A 1979-11-05 1980-11-04 Dispositif destine a un transducteur comportant une structure fixe Expired FR2468913B2 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/092,240 US4250757A (en) 1979-11-05 1979-11-05 Movable element with position sensing means for transducers

Publications (2)

Publication Number Publication Date
FR2468913A2 true FR2468913A2 (fr) 1981-05-08
FR2468913B2 FR2468913B2 (fr) 1985-07-05

Family

ID=22232324

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8023535A Expired FR2468913B2 (fr) 1979-11-05 1980-11-04 Dispositif destine a un transducteur comportant une structure fixe

Country Status (11)

Country Link
US (1) US4250757A (fr)
JP (1) JPS6034069B2 (fr)
AU (1) AU525853B2 (fr)
CA (1) CA1139123A (fr)
CH (1) CH642460A5 (fr)
DE (1) DE3041743C2 (fr)
FR (1) FR2468913B2 (fr)
GB (1) GB2062248B (fr)
IT (1) IT1127914B (fr)
NO (1) NO803294L (fr)
SE (1) SE441394B (fr)

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4494409A (en) * 1981-05-29 1985-01-22 Kabushiki Kaisha Toyota Chuo Kenkyusho Engine vibration sensor
US4441366A (en) * 1981-07-14 1984-04-10 Sundstrand Data Control, Inc. Flexure with electrical conductor
US4399700A (en) * 1981-07-14 1983-08-23 Sundstrand Data Control, Inc. Force transducer flexure with conductors on surfaces in the neutral bending plane
US4394405A (en) * 1981-07-14 1983-07-19 Sundstrand Data Control, Inc. Method of making force transducer flexure
US4400979A (en) * 1981-07-14 1983-08-30 Sundstrand Data Control, Inc. Force transducer flexure with conductors on surfaces in the neutral bending plane
US4498342A (en) * 1983-04-18 1985-02-12 Honeywell Inc. Integrated silicon accelerometer with stress-free rebalancing
US4592234A (en) * 1984-06-11 1986-06-03 Sundstrand Data Control, Inc. Suspension system for a transducer
JPS6117959A (ja) * 1984-07-05 1986-01-25 Japan Aviation Electronics Ind Ltd 加速度計
US4726228A (en) * 1986-04-16 1988-02-23 Sundstrand Data Control, Inc. Accelerometer proof mass interface
DE3774077D1 (de) * 1986-08-25 1991-11-28 Richard A Hanson Pruefmassenaufhaengung fuer einen beschleunigungsmesser.
US4779463A (en) * 1987-01-13 1988-10-25 Systron Donner Corporation Servo accelerometer
US4987780A (en) * 1987-11-16 1991-01-29 Litton Systems, Inc. Integrated accelerometer assembly
US4932258A (en) * 1988-06-29 1990-06-12 Sundstrand Data Control, Inc. Stress compensated transducer
US5024089A (en) * 1988-06-29 1991-06-18 Sundstrand Data Control, Inc. Stress compensated transducer
US5072619A (en) * 1988-10-11 1991-12-17 Hanson Richard A Pendulous assembly including specifically configured mounting pads
WO1991019986A1 (fr) * 1990-06-11 1991-12-26 Sundstrand Data Control, Inc. Accelerometer a elements souples isoles
US5111694A (en) * 1990-08-17 1992-05-12 Sundstrand Corporation Accelerometer with rebalance coil stress isolation
US5239871A (en) * 1990-12-17 1993-08-31 Texas Instruments Incorporated Capacitive accelerometer
US5532665A (en) * 1994-01-21 1996-07-02 Alliedsignal, Inc. Low stress magnet interface
US5557044A (en) * 1994-01-21 1996-09-17 Alliedsignal, Inc. Low stress magnet interface
US5524488A (en) * 1994-01-24 1996-06-11 Alliedsignal Inc. Flux control groove
DE69509312T2 (de) * 1994-06-29 1999-11-04 New Sd Inc Beschleunigungsmesser sowie Verfahren zu seiner Herstellung
US5488865A (en) * 1994-08-15 1996-02-06 Alliedsignal Inc. Wide-band servo accelerometer with flat leaf flexure suspension
WO1997047977A1 (fr) 1996-06-11 1997-12-18 Alliedsignal Inc. Compensation de la non-linearite du deuxieme ordre dans des detecteurs utilisant des diapasons a deux extremites
US5978972A (en) * 1996-06-14 1999-11-09 Johns Hopkins University Helmet system including at least three accelerometers and mass memory and method for recording in real-time orthogonal acceleration data of a head
US20070048456A1 (en) * 2004-09-14 2007-03-01 Keshner Marvin S Plasma enhanced chemical vapor deposition apparatus and method
US7100447B2 (en) 2004-12-07 2006-09-05 Honeywell International Inc. Super Invar magnetic return path for high performance accelerometers
IL215656A0 (en) 2011-10-10 2011-11-30 Israel Aerospace Ind Ltd Accelerometer
US9164117B2 (en) * 2012-10-19 2015-10-20 Honeywell International Inc. Stress reduction components for sensors
CN102998481A (zh) * 2012-12-11 2013-03-27 中国船舶重工集团公司第七0七研究所 一种新型电磁加速度计结构
US9658244B2 (en) * 2014-07-08 2017-05-23 Honeywell International Inc. Reducing hysteresis effects in accelerometer
US10036765B2 (en) * 2015-07-10 2018-07-31 Honeywell International Inc. Reducing hysteresis effects in an accelerometer
CN107703329B (zh) * 2017-09-29 2019-11-26 中国船舶重工集团公司第七0七研究所 用于高分辨率石英挠性加速度计的真空保持结构
CN113252944B (zh) * 2021-07-14 2021-09-17 中国工程物理研究院电子工程研究所 基于微型力矩器的石英挠性加速度计及其制造方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1437946A (fr) * 1964-06-24 1966-05-06 Gen Precision Inc Commande d'amortissement d'accéléromètre
FR1438068A (fr) * 1964-07-02 1966-05-06 North American Aviation Inc Accéléromètre
US3283586A (en) * 1964-06-24 1966-11-08 Gen Precision Inc Accelerometer damping control
US3673873A (en) * 1969-10-23 1972-07-04 North American Rockwell Sensing instrument having a cantilevered proof mass
US3702073A (en) * 1969-02-28 1972-11-07 Sundstrand Data Control Accelerometer
GB2006439A (en) * 1977-10-17 1979-05-02 Sundstrand Data Control Servoed Accelerometer Utilizing Rare Earth Magnets

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2643869A (en) * 1948-01-15 1953-06-30 Clark James Accelerometer

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1437946A (fr) * 1964-06-24 1966-05-06 Gen Precision Inc Commande d'amortissement d'accéléromètre
US3283586A (en) * 1964-06-24 1966-11-08 Gen Precision Inc Accelerometer damping control
FR1438068A (fr) * 1964-07-02 1966-05-06 North American Aviation Inc Accéléromètre
US3339419A (en) * 1964-07-02 1967-09-05 North American Aviation Inc Accelerometer
US3702073A (en) * 1969-02-28 1972-11-07 Sundstrand Data Control Accelerometer
US3673873A (en) * 1969-10-23 1972-07-04 North American Rockwell Sensing instrument having a cantilevered proof mass
GB2006439A (en) * 1977-10-17 1979-05-02 Sundstrand Data Control Servoed Accelerometer Utilizing Rare Earth Magnets
FR2406202A1 (fr) * 1977-10-17 1979-05-11 Sundstrand Data Control Accelerometre insensible a la temperature

Also Published As

Publication number Publication date
DE3041743A1 (de) 1981-09-03
CH642460A5 (fr) 1984-04-13
GB2062248A (en) 1981-05-20
SE8007206L (sv) 1981-05-06
JPS6034069B2 (ja) 1985-08-06
JPS5682450A (en) 1981-07-06
SE441394B (sv) 1985-09-30
GB2062248B (en) 1983-06-22
DE3041743C2 (de) 1986-01-02
FR2468913B2 (fr) 1985-07-05
CA1139123A (fr) 1983-01-11
IT1127914B (it) 1986-05-28
AU525853B2 (en) 1982-12-02
IT8050065A0 (it) 1980-11-03
US4250757A (en) 1981-02-17
AU6345780A (en) 1981-05-14
NO803294L (no) 1981-05-06

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Legal Events

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RM Correction of a material error