FR2463946A1 - Procede de realisation simultanee de plusieurs masques complementaires ou identiques a haute definition - Google Patents
Procede de realisation simultanee de plusieurs masques complementaires ou identiques a haute definition Download PDFInfo
- Publication number
- FR2463946A1 FR2463946A1 FR7920858A FR7920858A FR2463946A1 FR 2463946 A1 FR2463946 A1 FR 2463946A1 FR 7920858 A FR7920858 A FR 7920858A FR 7920858 A FR7920858 A FR 7920858A FR 2463946 A1 FR2463946 A1 FR 2463946A1
- Authority
- FR
- France
- Prior art keywords
- layer
- resin
- radiation
- layers
- masks
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229920005989 resin Polymers 0.000 title claims abstract description 69
- 239000011347 resin Substances 0.000 title claims abstract description 69
- 230000005855 radiation Effects 0.000 title claims abstract description 44
- 230000000295 complement effect Effects 0.000 title claims abstract description 31
- 238000004377 microelectronic Methods 0.000 title abstract description 3
- 239000000758 substrate Substances 0.000 claims abstract description 33
- 238000000034 method Methods 0.000 claims abstract description 22
- 238000004519 manufacturing process Methods 0.000 claims abstract description 8
- 239000002184 metal Substances 0.000 claims abstract 2
- 230000006399 behavior Effects 0.000 claims description 34
- 230000002745 absorbent Effects 0.000 claims description 22
- 239000002250 absorbent Substances 0.000 claims description 22
- 230000009102 absorption Effects 0.000 claims description 17
- 238000010521 absorption reaction Methods 0.000 claims description 17
- 238000000151 deposition Methods 0.000 claims description 9
- 230000008021 deposition Effects 0.000 claims description 7
- 238000004090 dissolution Methods 0.000 claims description 5
- 239000002904 solvent Substances 0.000 claims description 4
- 230000009471 action Effects 0.000 claims description 3
- 238000011282 treatment Methods 0.000 claims description 3
- 238000010894 electron beam technology Methods 0.000 claims description 2
- 230000036561 sun exposure Effects 0.000 claims description 2
- 230000001678 irradiating effect Effects 0.000 claims 1
- 239000002245 particle Substances 0.000 abstract description 2
- 229920003229 poly(methyl methacrylate) Polymers 0.000 abstract description 2
- 239000004926 polymethyl methacrylate Substances 0.000 abstract description 2
- 230000006870 function Effects 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 239000004642 Polyimide Substances 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 229920002799 BoPET Polymers 0.000 description 1
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 1
- 206010019345 Heat stroke Diseases 0.000 description 1
- 239000005041 Mylar™ Substances 0.000 description 1
- 208000007180 Sunstroke Diseases 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229920006026 co-polymeric resin Polymers 0.000 description 1
- MZLCVCICBVBUFJ-UHFFFAOYSA-N ethyl prop-2-enoate;oxiran-2-ylmethyl 2-methylprop-2-enoate Chemical compound CCOC(=O)C=C.CC(=C)C(=O)OCC1CO1 MZLCVCICBVBUFJ-UHFFFAOYSA-N 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 235000013550 pizza Nutrition 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/50—Mask blanks not covered by G03F1/20 - G03F1/34; Preparation thereof
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7920858A FR2463946A1 (fr) | 1979-08-17 | 1979-08-17 | Procede de realisation simultanee de plusieurs masques complementaires ou identiques a haute definition |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7920858A FR2463946A1 (fr) | 1979-08-17 | 1979-08-17 | Procede de realisation simultanee de plusieurs masques complementaires ou identiques a haute definition |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2463946A1 true FR2463946A1 (fr) | 1981-02-27 |
| FR2463946B1 FR2463946B1 (show.php) | 1981-08-28 |
Family
ID=9228909
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR7920858A Granted FR2463946A1 (fr) | 1979-08-17 | 1979-08-17 | Procede de realisation simultanee de plusieurs masques complementaires ou identiques a haute definition |
Country Status (1)
| Country | Link |
|---|---|
| FR (1) | FR2463946A1 (show.php) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1546592A1 (de) * | 1965-03-30 | 1970-10-08 | Telefunken Patent | Verfahren zum doppelseitigen Aufbringen von Mustern auf Koerper,vorzugsweise Halbleiterkoerper |
| DE2558530A1 (de) * | 1974-12-28 | 1976-07-08 | Fuji Photo Film Co Ltd | Bilderzeugungsverfahren |
-
1979
- 1979-08-17 FR FR7920858A patent/FR2463946A1/fr active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1546592A1 (de) * | 1965-03-30 | 1970-10-08 | Telefunken Patent | Verfahren zum doppelseitigen Aufbringen von Mustern auf Koerper,vorzugsweise Halbleiterkoerper |
| DE2558530A1 (de) * | 1974-12-28 | 1976-07-08 | Fuji Photo Film Co Ltd | Bilderzeugungsverfahren |
Non-Patent Citations (2)
| Title |
|---|
| EXBK/69 * |
| EXBK/70 * |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2463946B1 (show.php) | 1981-08-28 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |