FR2463946B1 - - Google Patents
Info
- Publication number
- FR2463946B1 FR2463946B1 FR7920858A FR7920858A FR2463946B1 FR 2463946 B1 FR2463946 B1 FR 2463946B1 FR 7920858 A FR7920858 A FR 7920858A FR 7920858 A FR7920858 A FR 7920858A FR 2463946 B1 FR2463946 B1 FR 2463946B1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/50—Mask blanks not covered by G03F1/20 - G03F1/34; Preparation thereof
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7920858A FR2463946A1 (fr) | 1979-08-17 | 1979-08-17 | Procede de realisation simultanee de plusieurs masques complementaires ou identiques a haute definition |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7920858A FR2463946A1 (fr) | 1979-08-17 | 1979-08-17 | Procede de realisation simultanee de plusieurs masques complementaires ou identiques a haute definition |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2463946A1 FR2463946A1 (fr) | 1981-02-27 |
| FR2463946B1 true FR2463946B1 (show.php) | 1981-08-28 |
Family
ID=9228909
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR7920858A Granted FR2463946A1 (fr) | 1979-08-17 | 1979-08-17 | Procede de realisation simultanee de plusieurs masques complementaires ou identiques a haute definition |
Country Status (1)
| Country | Link |
|---|---|
| FR (1) | FR2463946A1 (show.php) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1546592A1 (de) * | 1965-03-30 | 1970-10-08 | Telefunken Patent | Verfahren zum doppelseitigen Aufbringen von Mustern auf Koerper,vorzugsweise Halbleiterkoerper |
| JPS6032173B2 (ja) * | 1974-12-28 | 1985-07-26 | 富士写真フイルム株式会社 | 画像形成法 |
-
1979
- 1979-08-17 FR FR7920858A patent/FR2463946A1/fr active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| FR2463946A1 (fr) | 1981-02-27 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |