FR2457397A1 - Turbopompe a vide moleculaire, a groupe magnetique de support a puissance efficace nulle et a servocommande a axe unique - Google Patents

Turbopompe a vide moleculaire, a groupe magnetique de support a puissance efficace nulle et a servocommande a axe unique

Info

Publication number
FR2457397A1
FR2457397A1 FR8011253A FR8011253A FR2457397A1 FR 2457397 A1 FR2457397 A1 FR 2457397A1 FR 8011253 A FR8011253 A FR 8011253A FR 8011253 A FR8011253 A FR 8011253A FR 2457397 A1 FR2457397 A1 FR 2457397A1
Authority
FR
France
Prior art keywords
single axis
support group
magnetic support
servo control
efficient power
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
FR8011253A
Other languages
English (en)
Inventor
Akira Yamamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cambridge Thermionic Corp
Original Assignee
Cambridge Thermionic Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cambridge Thermionic Corp filed Critical Cambridge Thermionic Corp
Publication of FR2457397A1 publication Critical patent/FR2457397A1/fr
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0442—Active magnetic bearings with devices affected by abnormal, undesired or non-standard conditions such as shock-load, power outage, start-up or touchdown
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0444—Details of devices to control the actuation of the electromagnets
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0474—Active magnetic bearings for rotary movement
    • F16C32/0476—Active magnetic bearings for rotary movement with active support of one degree of freedom, e.g. axial magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)

Abstract

TURBOPOMPE A GROUPE DE SUPPORT MAGNETIQUE A PUISSANCE EFFICACE NULLE, A SERVOCOMMANDE A AXE UNIQUE ET A RAPPORT OPTIMISE DE LA LONGUEUR AU DIAMETRE AINSI QU'A NOMBRE OPTIMAL DE FACES POLAIRES. LA DISPOSITION EST TELLE QUE LA RAIDEUR RADIALE DU SYSTEME DE SUSPENSION EST FAIBLE ET L'AMORTISSEMENT RADIAL EST ELEVE DE MANIERE A PERMETTRE UNE COMMANDE D'AXE UNIQUE. UNE STRUCTURE DE SUPPORT MECANIQUE A SURFACES TRONCONIQUES60, 62, 160, 162 ASSURE L'APPUI DU ROTOR10 EN CAS DE DEFAILLANCE DE LA SUSPENSION MAGNETIQUE 14, 24, 40, 42, 44, 46 AINSI QUE 114, 124, 140, 142, 144, 146. APPLICATION AUX POMPES TOURNANT A TRES GRANDE VITESSE D'AU MOINS 30000 TOURS A LA MINUTE.
FR8011253A 1979-05-21 1980-05-20 Turbopompe a vide moleculaire, a groupe magnetique de support a puissance efficace nulle et a servocommande a axe unique Pending FR2457397A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/040,893 US4312628A (en) 1979-05-21 1979-05-21 Turbomolecular vacuum pump having virtually zero power magnetic bearing assembly with single axis servo control

Publications (1)

Publication Number Publication Date
FR2457397A1 true FR2457397A1 (fr) 1980-12-19

Family

ID=21913561

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8011253A Pending FR2457397A1 (fr) 1979-05-21 1980-05-20 Turbopompe a vide moleculaire, a groupe magnetique de support a puissance efficace nulle et a servocommande a axe unique

Country Status (5)

Country Link
US (1) US4312628A (fr)
JP (1) JPS5612095A (fr)
DE (1) DE3019227A1 (fr)
FR (1) FR2457397A1 (fr)
GB (1) GB2052807A (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2521230A1 (fr) * 1982-02-11 1983-08-12 Pfeiffer Vakuumtechnik Pompe turbo-moleculaire a paliers magnetiques
FR2523657A1 (fr) * 1982-03-20 1983-09-23 Pfeiffer Vakuumtechnik Systeme d'entrainement pour turbopompe moleculaire
FR2525698A1 (fr) * 1982-04-21 1983-10-28 Hitachi Ltd Pompe turbomoleculaire
FR2536473A1 (fr) * 1982-11-19 1984-05-25 Seiko Instr & Electronics Pompe turbomoleculaire
WO2002018794A1 (fr) * 2000-09-02 2002-03-07 Leybold Vakuum Gmbh Pompe a vide

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59162396A (ja) * 1983-03-07 1984-09-13 Hitachi Ltd タ−ボ分子ポンプ
JPS5946394A (ja) * 1983-07-13 1984-03-15 Hitachi Ltd タ−ボ分子ポンプ
DE3343186A1 (de) * 1983-11-29 1985-06-05 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 8000 München Magnetische rotorlagerung
FR2561729B1 (fr) * 1984-03-26 1986-08-22 Europ Propulsion Palier magnetique radial actif a rotor massif pour l'amortissement des frequences critiques
DE3600124A1 (de) * 1986-01-04 1987-07-16 Fortuna Werke Maschf Ag Geblaese zum umwaelzen grosser gasmengen, insbesondere fuer hochleistungs-laser
JPH0455276Y2 (fr) * 1986-05-16 1992-12-25
JPH0676798B2 (ja) * 1988-08-22 1994-09-28 株式会社荏原製作所 磁気軸受を備えた遠心ポンプ
US4988906A (en) * 1988-09-08 1991-01-29 The Dow Chemical Company Magnetic bearing assembly
DE68925510T2 (de) * 1988-10-21 1996-08-29 Ebara Corp Magnetlagersystem
DE69011391T2 (de) * 1989-05-08 1995-01-26 Nippon Ferrofluidics Kk Magnetische Lagervorrichtung.
DE3931661A1 (de) * 1989-08-25 1991-04-04 Leybold Ag Magnetgelagerte vakuumpumpe
US5350283A (en) * 1991-12-04 1994-09-27 Ntn Corporation Clean pump
US6074165A (en) * 1998-03-10 2000-06-13 Varian, Inc. Vacuum pump with magnetic bearing system and back-up bearings
US6071092A (en) * 1998-03-10 2000-06-06 Varian, Inc. Vacuum pump with improved back-up bearing assembly
JP3000356B1 (ja) * 1998-07-07 2000-01-17 セイコー精機株式会社 真空ポンプ及び真空装置
FR2831621B1 (fr) * 2001-10-25 2004-02-13 Cit Alcatel Utilisation des billes en zircone pour les roulements d'atterrissage des pompes turbomoleculaires sur palier magnetique
DE10223869A1 (de) * 2002-05-29 2003-12-11 Leybold Vakuum Gmbh Zwei-Wellen-Vakuumpumpe
DE602004025916D1 (de) * 2004-07-20 2010-04-22 Varian Spa Rotationsvakuumpumpe und ihr Auswuchtverfahren
DE102007048703A1 (de) * 2007-10-11 2009-04-16 Oerlikon Leybold Vacuum Gmbh Mehrstufiger Turbomolekularpumpen-Pumpenrotor
CN103534499B (zh) * 2011-05-12 2016-02-03 舍弗勒技术股份两合公司 特别用于支承压缩机快速转动的轴的带备用轴承的轴承装置
CN108119404A (zh) * 2017-12-20 2018-06-05 湖北省神珑泵业有限责任公司 一种新型双级双作用锥体结构真空泵

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3860300A (en) * 1971-07-07 1975-01-14 Cambridge Thermionic Corp Virtually zero powered magnetic suspension
FR2246756A1 (fr) * 1973-09-29 1975-05-02 Leybold Heraeus Gmbh & Co Kg
DE2500211A1 (de) * 1974-01-03 1975-07-17 Aerospatiale Traegheitsrad fuer satelliten
FR2257077A1 (en) * 1974-01-03 1975-08-01 Aerospatiale Artificial moon inertia flywheel - has magnetic radial and axial centring mechanisms and damper also motor generator
FR2286298A1 (fr) * 1974-09-27 1976-04-23 Balzers Patent Beteilig Ag Turbopompe a vide
FR2293623A1 (fr) * 1974-12-06 1976-07-02 Teldix Gmbh Appareillage magnetique
FR2309754A1 (fr) * 1975-05-02 1976-11-26 Teldix Gmbh Ensemble de paliers magnetiques

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3428371A (en) * 1966-01-24 1969-02-18 Cambridge Thermionic Corp Suspension apparatus
US3473852A (en) * 1967-12-18 1969-10-21 Cambridge Thermionic Corp Magnetic suspension apparatus
FR2110581A5 (fr) * 1970-10-22 1972-06-02 Habermann Helmut

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3860300A (en) * 1971-07-07 1975-01-14 Cambridge Thermionic Corp Virtually zero powered magnetic suspension
FR2246756A1 (fr) * 1973-09-29 1975-05-02 Leybold Heraeus Gmbh & Co Kg
DE2500211A1 (de) * 1974-01-03 1975-07-17 Aerospatiale Traegheitsrad fuer satelliten
FR2257077A1 (en) * 1974-01-03 1975-08-01 Aerospatiale Artificial moon inertia flywheel - has magnetic radial and axial centring mechanisms and damper also motor generator
FR2286298A1 (fr) * 1974-09-27 1976-04-23 Balzers Patent Beteilig Ag Turbopompe a vide
FR2293623A1 (fr) * 1974-12-06 1976-07-02 Teldix Gmbh Appareillage magnetique
FR2309754A1 (fr) * 1975-05-02 1976-11-26 Teldix Gmbh Ensemble de paliers magnetiques

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2521230A1 (fr) * 1982-02-11 1983-08-12 Pfeiffer Vakuumtechnik Pompe turbo-moleculaire a paliers magnetiques
FR2523657A1 (fr) * 1982-03-20 1983-09-23 Pfeiffer Vakuumtechnik Systeme d'entrainement pour turbopompe moleculaire
FR2525698A1 (fr) * 1982-04-21 1983-10-28 Hitachi Ltd Pompe turbomoleculaire
FR2536473A1 (fr) * 1982-11-19 1984-05-25 Seiko Instr & Electronics Pompe turbomoleculaire
WO2002018794A1 (fr) * 2000-09-02 2002-03-07 Leybold Vakuum Gmbh Pompe a vide
US6877963B2 (en) 2000-09-02 2005-04-12 Leybold Vakuum Gmbh Vacuum pump

Also Published As

Publication number Publication date
US4312628A (en) 1982-01-26
DE3019227A1 (de) 1980-12-04
JPS5612095A (en) 1981-02-05
GB2052807A (en) 1981-01-28

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