FR2436502A1 - Transistors bipolaires a heterojonction de structure plane et leur procede de fabrication - Google Patents
Transistors bipolaires a heterojonction de structure plane et leur procede de fabricationInfo
- Publication number
- FR2436502A1 FR2436502A1 FR7826069A FR7826069A FR2436502A1 FR 2436502 A1 FR2436502 A1 FR 2436502A1 FR 7826069 A FR7826069 A FR 7826069A FR 7826069 A FR7826069 A FR 7826069A FR 2436502 A1 FR2436502 A1 FR 2436502A1
- Authority
- FR
- France
- Prior art keywords
- esp
- bipolar transistor
- plane structure
- base
- types
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000009792 diffusion process Methods 0.000 abstract 2
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical group [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 abstract 1
- 238000003486 chemical etching Methods 0.000 abstract 1
- 230000008021 deposition Effects 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 238000005215 recombination Methods 0.000 abstract 1
- 230000006798 recombination Effects 0.000 abstract 1
- 239000011701 zinc Substances 0.000 abstract 1
- 229910052725 zinc Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/70—Bipolar devices
- H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
- H01L29/73—Bipolar junction transistors
- H01L29/737—Hetero-junction transistors
- H01L29/7371—Vertical transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/74—Making of localized buried regions, e.g. buried collector layers, internal connections substrate contacts
- H01L21/743—Making of internal connections, substrate contacts
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Bipolar Transistors (AREA)
Abstract
a. Transistor bipolaire à hétérojonction émetteur-base, en structure plane. b. Il comprend un substrat, une couche de collecteur, une couche de base et une couche d'émetteur, cette dernière étant en un matériau formant avec la couche de base une hétérojonction, et il est caractérisé en ce que l'électrode de base est déposée sur la couche d'émetteur et est reliée à la couche de base par un puits diffusé à fort dopage à travers la couche d'émetteur et sous l'électrode de base, du même type de conductivité que la couche de base. c. Transistors à haute fréquence.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7826069A FR2436502A1 (fr) | 1978-09-12 | 1978-09-12 | Transistors bipolaires a heterojonction de structure plane et leur procede de fabrication |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7826069A FR2436502A1 (fr) | 1978-09-12 | 1978-09-12 | Transistors bipolaires a heterojonction de structure plane et leur procede de fabrication |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2436502A1 true FR2436502A1 (fr) | 1980-04-11 |
FR2436502B1 FR2436502B1 (fr) | 1982-05-07 |
Family
ID=9212510
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7826069A Granted FR2436502A1 (fr) | 1978-09-12 | 1978-09-12 | Transistors bipolaires a heterojonction de structure plane et leur procede de fabrication |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR2436502A1 (fr) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0130774A1 (fr) * | 1983-06-30 | 1985-01-09 | Fujitsu Limited | Procédé pour la fabrication des transistors bipolaires |
EP0141892A2 (fr) * | 1983-11-15 | 1985-05-22 | Refining Energy Services, Inc. | Dispositif semi-conducteur à effet de recombination de surface |
US4617724A (en) * | 1983-06-30 | 1986-10-21 | Fujitsu Limited | Process for fabricating heterojunction bipolar transistor with low base resistance |
FR2604299A1 (fr) * | 1986-09-23 | 1988-03-25 | Palmier Jean Francois | Transistor bipolaire comportant un emetteur multicouche assurant le confinement des trous |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1449487A (fr) * | 1964-10-13 | 1966-03-18 | Ibm | Structure de transistor améliorée |
DE2504273A1 (de) * | 1975-02-01 | 1976-08-05 | Licentia Gmbh | Verfahren zum herstellen eines transistors |
-
1978
- 1978-09-12 FR FR7826069A patent/FR2436502A1/fr active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1449487A (fr) * | 1964-10-13 | 1966-03-18 | Ibm | Structure de transistor améliorée |
DE2504273A1 (de) * | 1975-02-01 | 1976-08-05 | Licentia Gmbh | Verfahren zum herstellen eines transistors |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0130774A1 (fr) * | 1983-06-30 | 1985-01-09 | Fujitsu Limited | Procédé pour la fabrication des transistors bipolaires |
US4617724A (en) * | 1983-06-30 | 1986-10-21 | Fujitsu Limited | Process for fabricating heterojunction bipolar transistor with low base resistance |
EP0141892A2 (fr) * | 1983-11-15 | 1985-05-22 | Refining Energy Services, Inc. | Dispositif semi-conducteur à effet de recombination de surface |
EP0141892A3 (fr) * | 1983-11-15 | 1987-10-28 | Refining Energy Services, Inc. | Dispositif semi-conducteur à effet de recombination de surface |
FR2604299A1 (fr) * | 1986-09-23 | 1988-03-25 | Palmier Jean Francois | Transistor bipolaire comportant un emetteur multicouche assurant le confinement des trous |
Also Published As
Publication number | Publication date |
---|---|
FR2436502B1 (fr) | 1982-05-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
TP | Transmission of property | ||
TP | Transmission of property | ||
ST | Notification of lapse |