FR2423914A1 - Pulsed power supply system - is for discharge equipment for treating workpieces and prevents glow discharge passing over into damaging arc discharge - Google Patents

Pulsed power supply system - is for discharge equipment for treating workpieces and prevents glow discharge passing over into damaging arc discharge

Info

Publication number
FR2423914A1
FR2423914A1 FR7811730A FR7811730A FR2423914A1 FR 2423914 A1 FR2423914 A1 FR 2423914A1 FR 7811730 A FR7811730 A FR 7811730A FR 7811730 A FR7811730 A FR 7811730A FR 2423914 A1 FR2423914 A1 FR 2423914A1
Authority
FR
France
Prior art keywords
discharge
power supply
supply system
passing over
pulsed power
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7811730A
Other languages
French (fr)
Other versions
FR2423914B1 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to FR7811730A priority Critical patent/FR2423914A1/en
Publication of FR2423914A1 publication Critical patent/FR2423914A1/en
Application granted granted Critical
Publication of FR2423914B1 publication Critical patent/FR2423914B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

The power supply (100) for ion-nitriting and ion-coating equipment, produces pulses of variable frequency for applying to the glow-discharge path. The energy of each pulse is kept constant independently of the type of discharge and its parameters. The energy of each pulse is less than the minimum energy needed to cause an arc discharge -- which would damage the workpiece being treated. However, if an arc discharge does occur, the next pulse is delayed by a time interval greater than the de-ionising time of the discharge path.
FR7811730A 1978-04-20 1978-04-20 Pulsed power supply system - is for discharge equipment for treating workpieces and prevents glow discharge passing over into damaging arc discharge Granted FR2423914A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7811730A FR2423914A1 (en) 1978-04-20 1978-04-20 Pulsed power supply system - is for discharge equipment for treating workpieces and prevents glow discharge passing over into damaging arc discharge

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7811730A FR2423914A1 (en) 1978-04-20 1978-04-20 Pulsed power supply system - is for discharge equipment for treating workpieces and prevents glow discharge passing over into damaging arc discharge

Publications (2)

Publication Number Publication Date
FR2423914A1 true FR2423914A1 (en) 1979-11-16
FR2423914B1 FR2423914B1 (en) 1980-10-31

Family

ID=9207401

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7811730A Granted FR2423914A1 (en) 1978-04-20 1978-04-20 Pulsed power supply system - is for discharge equipment for treating workpieces and prevents glow discharge passing over into damaging arc discharge

Country Status (1)

Country Link
FR (1) FR2423914A1 (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2451629A1 (en) * 1979-03-11 1980-10-10 Vmei Lenin Nis PLANT FOR PROCESSING METAL PARTS BY CHEMICAL THERMAL USING LUMINESCENT ELECTRIC DISCHARGE
FR2474783A1 (en) * 1980-01-24 1981-07-31 Merlin Gerin Static feed of current to electrofilter - utilising static converter transformer and rectifier to control feed of pulses from thyratron
EP0034075A2 (en) * 1980-01-24 1981-08-19 Merlin Gerin Static power supply device of an electrofilter for electrostatic dust precipitation
FR2476143A1 (en) * 1980-02-20 1981-08-21 Fours Indls Cie Thermochemical treatment of workpieces by ion bombardment - such as ion nitriding, where AC voltages are employed to prevent local damage to workpiece surfaces
FR2497038A1 (en) * 1980-12-19 1982-06-25 Frager Jean POWER CURRENT GENERATOR, IN PARTICULAR FOR DISCHARGE PROCESS IN A RAREFIRED ATMOSPHERE
FR2508231A1 (en) * 1981-06-05 1982-12-24 Aizenshtein Anatoly METHOD FOR CONTROLLING A PROCESS FOR THE CHEMICAL-THERMAL TREATMENT OF ARTICLES IN A LUMINESCENT DISCHARGE, DEVICE FOR CARRYING OUT SAID METHOD OF CONTROL AND ARTICLES THUS PROCESSED
FR2518354A1 (en) * 1981-12-16 1983-06-17 Atelier Electro Thermie Const PROCESS FOR GENERATING PLASMA AND DEVICE FOR IMPLEMENTING SAID METHOD

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2003632A1 (en) * 1968-03-11 1969-11-14 Lucas Industries Ltd
FR2237675A1 (en) * 1973-07-18 1975-02-14 Le Elekt Gas flow electrical discharge treatment - with reactor electrodes connected through switching circuit to rectified AC from transformer

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2003632A1 (en) * 1968-03-11 1969-11-14 Lucas Industries Ltd
FR2237675A1 (en) * 1973-07-18 1975-02-14 Le Elekt Gas flow electrical discharge treatment - with reactor electrodes connected through switching circuit to rectified AC from transformer

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2451629A1 (en) * 1979-03-11 1980-10-10 Vmei Lenin Nis PLANT FOR PROCESSING METAL PARTS BY CHEMICAL THERMAL USING LUMINESCENT ELECTRIC DISCHARGE
FR2474783A1 (en) * 1980-01-24 1981-07-31 Merlin Gerin Static feed of current to electrofilter - utilising static converter transformer and rectifier to control feed of pulses from thyratron
EP0034075A2 (en) * 1980-01-24 1981-08-19 Merlin Gerin Static power supply device of an electrofilter for electrostatic dust precipitation
EP0034075A3 (en) * 1980-01-24 1981-08-26 Merlin Gerin Static power supply process and device of an electrofilter for electrostatic dust precipitation
FR2476143A1 (en) * 1980-02-20 1981-08-21 Fours Indls Cie Thermochemical treatment of workpieces by ion bombardment - such as ion nitriding, where AC voltages are employed to prevent local damage to workpiece surfaces
FR2497038A1 (en) * 1980-12-19 1982-06-25 Frager Jean POWER CURRENT GENERATOR, IN PARTICULAR FOR DISCHARGE PROCESS IN A RAREFIRED ATMOSPHERE
FR2508231A1 (en) * 1981-06-05 1982-12-24 Aizenshtein Anatoly METHOD FOR CONTROLLING A PROCESS FOR THE CHEMICAL-THERMAL TREATMENT OF ARTICLES IN A LUMINESCENT DISCHARGE, DEVICE FOR CARRYING OUT SAID METHOD OF CONTROL AND ARTICLES THUS PROCESSED
FR2518354A1 (en) * 1981-12-16 1983-06-17 Atelier Electro Thermie Const PROCESS FOR GENERATING PLASMA AND DEVICE FOR IMPLEMENTING SAID METHOD
EP0082089A2 (en) * 1981-12-16 1983-06-22 ATELIER D'ELECTROTHERMIE ET DE CONSTRUCTIONS SPECIALES (AET) Société anonyme dite Method and apparatus for generating a plasma
EP0082089A3 (en) * 1981-12-16 1984-10-24 ATELIER D'ELECTROTHERMIE ET DE CONSTRUCTIONS SPECIALES (AET) Société anonyme dite Method and apparatus for generating a plasma

Also Published As

Publication number Publication date
FR2423914B1 (en) 1980-10-31

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Legal Events

Date Code Title Description
ST Notification of lapse