FR2422253A1 - Source d'ions - Google Patents

Source d'ions

Info

Publication number
FR2422253A1
FR2422253A1 FR7908537A FR7908537A FR2422253A1 FR 2422253 A1 FR2422253 A1 FR 2422253A1 FR 7908537 A FR7908537 A FR 7908537A FR 7908537 A FR7908537 A FR 7908537A FR 2422253 A1 FR2422253 A1 FR 2422253A1
Authority
FR
France
Prior art keywords
source
ion source
ion
equipotential
separation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7908537A
Other languages
English (en)
French (fr)
Other versions
FR2422253B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UK Atomic Energy Authority
Original Assignee
UK Atomic Energy Authority
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by UK Atomic Energy Authority filed Critical UK Atomic Energy Authority
Publication of FR2422253A1 publication Critical patent/FR2422253A1/fr
Application granted granted Critical
Publication of FR2422253B1 publication Critical patent/FR2422253B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/08—Ion sources; Ion guns using arc discharge

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Particle Accelerators (AREA)
FR7908537A 1978-04-05 1979-04-04 Source d'ions Granted FR2422253A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1331078 1978-04-05

Publications (2)

Publication Number Publication Date
FR2422253A1 true FR2422253A1 (fr) 1979-11-02
FR2422253B1 FR2422253B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1984-02-10

Family

ID=10020642

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7908537A Granted FR2422253A1 (fr) 1978-04-05 1979-04-04 Source d'ions

Country Status (5)

Country Link
US (1) US4354113A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JPS54139000A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE2913769A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
FR (1) FR2422253A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
NL (1) NL7902620A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2837023B2 (ja) * 1991-05-14 1998-12-14 アプライド マテリアルズ インコーポレイテッド イオン源の寿命を向上させたイオン打ち込み装置
DE4334357A1 (de) * 1993-10-08 1995-04-13 Zeiss Carl Fa Sattelfeldquelle
US7041984B2 (en) * 2004-05-20 2006-05-09 Inficon, Inc. Replaceable anode liner for ion source
JP5925084B2 (ja) * 2012-08-28 2016-05-25 住友重機械イオンテクノロジー株式会社 イオン生成方法およびイオン源

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1126466A (fr) * 1955-03-26 1956-11-23 Commissariat Energie Atomique Nouvelle source productrice d'ions d'éléments réfractaires ou non

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1158782A (en) * 1965-05-14 1969-07-16 Nat Res Dev Improvements in or relating to Oscillation Generators
US3411035A (en) * 1966-05-31 1968-11-12 Gen Electric Multi-chamber hollow cathode low voltage electron beam apparatus
GB1414626A (en) 1971-11-24 1975-11-19 Franks J Ion sources
US3784858A (en) * 1972-11-24 1974-01-08 J Franks Ion sources
US3831052A (en) * 1973-05-25 1974-08-20 Hughes Aircraft Co Hollow cathode gas discharge device
GB1488657A (en) * 1973-09-24 1977-10-12 Ion Tech Ltd Ion sources

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1126466A (fr) * 1955-03-26 1956-11-23 Commissariat Energie Atomique Nouvelle source productrice d'ions d'éléments réfractaires ou non

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JAPANESE JOURNAL OF APPLIED PHYSICS; Suppl. 2, point 1, 1974 (TOKYO, JP) R.K. FITCH et al.: "Design and operating characteristics of a low pressure ion source", pages 411-414 *

Also Published As

Publication number Publication date
FR2422253B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1984-02-10
NL7902620A (nl) 1979-10-09
JPS6229862B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-06-29
US4354113A (en) 1982-10-12
JPS54139000A (en) 1979-10-27
DE2913769A1 (de) 1979-11-08
DE2913769C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-04-05

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Legal Events

Date Code Title Description
ST Notification of lapse