FR2395330B1 - - Google Patents

Info

Publication number
FR2395330B1
FR2395330B1 FR7719521A FR7719521A FR2395330B1 FR 2395330 B1 FR2395330 B1 FR 2395330B1 FR 7719521 A FR7719521 A FR 7719521A FR 7719521 A FR7719521 A FR 7719521A FR 2395330 B1 FR2395330 B1 FR 2395330B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7719521A
Other languages
French (fr)
Other versions
FR2395330A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Saint Gobain Industries SA
Compagnie de Saint Gobain SA
Original Assignee
Saint Gobain Industries SA
Compagnie de Saint Gobain SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Saint Gobain Industries SA, Compagnie de Saint Gobain SA filed Critical Saint Gobain Industries SA
Priority to FR7719521A priority Critical patent/FR2395330A1/fr
Priority to DE19782827647 priority patent/DE2827647C2/de
Publication of FR2395330A1 publication Critical patent/FR2395330A1/fr
Application granted granted Critical
Publication of FR2395330B1 publication Critical patent/FR2395330B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/02—Details
    • H05B3/06—Heater elements structurally combined with coupling elements or holders
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
FR7719521A 1977-06-24 1977-06-24 Perfectionnements apportes aux moyens de fixation et d'alimentation electrique des dispositifs d'evaporation thermique sous vide d'un metal Granted FR2395330A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR7719521A FR2395330A1 (fr) 1977-06-24 1977-06-24 Perfectionnements apportes aux moyens de fixation et d'alimentation electrique des dispositifs d'evaporation thermique sous vide d'un metal
DE19782827647 DE2827647C2 (de) 1977-06-24 1978-06-23 Vorrichtung zur Befestigung und Stromversorgung von Einrichtungen zur thermischen Vakuumverdampfung eines Metalls

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7719521A FR2395330A1 (fr) 1977-06-24 1977-06-24 Perfectionnements apportes aux moyens de fixation et d'alimentation electrique des dispositifs d'evaporation thermique sous vide d'un metal

Publications (2)

Publication Number Publication Date
FR2395330A1 FR2395330A1 (fr) 1979-01-19
FR2395330B1 true FR2395330B1 (de) 1980-04-18

Family

ID=9192568

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7719521A Granted FR2395330A1 (fr) 1977-06-24 1977-06-24 Perfectionnements apportes aux moyens de fixation et d'alimentation electrique des dispositifs d'evaporation thermique sous vide d'un metal

Country Status (2)

Country Link
DE (1) DE2827647C2 (de)
FR (1) FR2395330A1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4409761B4 (de) * 1994-03-22 2007-12-27 Vtd Vakuumtechnik Dresden Gmbh Einrichtung zur plasmagestützten Verdampfung in einem Bogenentladungsplasma
DE102012102210A1 (de) * 2012-03-15 2013-09-19 Solibro Gmbh Heizsystem für eine Vakuumabscheidequelle und Vakuumabscheidevorrichtung

Also Published As

Publication number Publication date
DE2827647A1 (de) 1979-01-18
FR2395330A1 (fr) 1979-01-19
DE2827647C2 (de) 1986-02-06

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Legal Events

Date Code Title Description
ST Notification of lapse