FR2378872B1 - - Google Patents
Info
- Publication number
- FR2378872B1 FR2378872B1 FR7801889A FR7801889A FR2378872B1 FR 2378872 B1 FR2378872 B1 FR 2378872B1 FR 7801889 A FR7801889 A FR 7801889A FR 7801889 A FR7801889 A FR 7801889A FR 2378872 B1 FR2378872 B1 FR 2378872B1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/54—Absorbers, e.g. of opaque materials
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
- G03F1/80—Etching
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- ing And Chemical Polishing (AREA)
- Laminated Bodies (AREA)
- Surface Treatment Of Glass (AREA)
- Glass Compositions (AREA)
- Compounds Of Iron (AREA)
- Soft Magnetic Materials (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL7700808A NL7700808A (nl) | 1977-01-27 | 1977-01-27 | Werkwijze voor de vervaardiging van ijzer- oxidefotomaskers en ijzeroxidemaskers verkre- gen volgens deze werkwijze. |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2378872A1 FR2378872A1 (fr) | 1978-08-25 |
| FR2378872B1 true FR2378872B1 (US07576130-20090818-C00114.png) | 1983-11-18 |
Family
ID=19827853
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR7801889A Granted FR2378872A1 (fr) | 1977-01-27 | 1978-01-24 | Procede pour la realisation de photomasques d'oxyde de fer et masques ainsi realises |
Country Status (7)
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1268753A (en) * | 1968-05-20 | 1972-03-29 | United Glass Ltd | Containers resistant to ultra-violet light |
| GB1307216A (en) * | 1969-04-23 | 1973-02-14 | Pilkington Brothers Ltd | Treating glass |
| US3824100A (en) * | 1970-06-29 | 1974-07-16 | Corning Glass Works | Transparent iron oxide microcircuit mask |
| FR2110622A5 (US07576130-20090818-C00114.png) * | 1970-10-23 | 1972-06-02 | Commissariat Energie Atomique | |
| IT996924B (it) * | 1972-12-21 | 1975-12-10 | Glaverbel | Procedimento per formare uno strato di ossido metallico |
-
1977
- 1977-01-27 NL NL7700808A patent/NL7700808A/xx not_active Application Discontinuation
-
1978
- 1978-01-18 CA CA295,241A patent/CA1110507A/en not_active Expired
- 1978-01-23 DE DE2802814A patent/DE2802814C2/de not_active Expired
- 1978-01-24 GB GB2802/78A patent/GB1592017A/en not_active Expired
- 1978-01-24 JP JP53006631A patent/JPS596056B2/ja not_active Expired
- 1978-01-24 FR FR7801889A patent/FR2378872A1/fr active Granted
- 1978-01-25 US US05/872,171 patent/US4199621A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| FR2378872A1 (fr) | 1978-08-25 |
| GB1592017A (en) | 1981-07-01 |
| JPS5394185A (en) | 1978-08-17 |
| DE2802814C2 (de) | 1984-10-25 |
| NL7700808A (nl) | 1978-07-31 |
| CA1110507A (en) | 1981-10-13 |
| US4199621A (en) | 1980-04-22 |
| DE2802814A1 (de) | 1978-08-03 |
| JPS596056B2 (ja) | 1984-02-08 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |