FR2372242B3 - - Google Patents

Info

Publication number
FR2372242B3
FR2372242B3 FR7735592A FR7735592A FR2372242B3 FR 2372242 B3 FR2372242 B3 FR 2372242B3 FR 7735592 A FR7735592 A FR 7735592A FR 7735592 A FR7735592 A FR 7735592A FR 2372242 B3 FR2372242 B3 FR 2372242B3
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7735592A
Other languages
French (fr)
Other versions
FR2372242A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold Heraeus GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus GmbH filed Critical Leybold Heraeus GmbH
Publication of FR2372242A1 publication Critical patent/FR2372242A1/fr
Application granted granted Critical
Publication of FR2372242B3 publication Critical patent/FR2372242B3/fr
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Battery Electrode And Active Subsutance (AREA)
  • Sealing Battery Cases Or Jackets (AREA)
FR7735592A 1976-11-27 1977-11-25 Evaporateur thermique a chauffage electrique pour equipements de metallisation sous vide Granted FR2372242A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19762653909 DE2653909A1 (de) 1976-11-27 1976-11-27 Durch stromdurchfluss beheizter thermischer verdampfer fuer vakuumaufdampfanlagen

Publications (2)

Publication Number Publication Date
FR2372242A1 FR2372242A1 (fr) 1978-06-23
FR2372242B3 true FR2372242B3 (oth) 1980-08-29

Family

ID=5994098

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7735592A Granted FR2372242A1 (fr) 1976-11-27 1977-11-25 Evaporateur thermique a chauffage electrique pour equipements de metallisation sous vide

Country Status (3)

Country Link
BE (1) BE855447A (oth)
DE (1) DE2653909A1 (oth)
FR (1) FR2372242A1 (oth)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1041169B1 (de) 1999-03-29 2007-09-26 ANTEC Solar Energy AG Vorrichtung und Verfahren zur Beschichtung von Substraten durch Aufdampfen mittels eines PVD-Verfahrens

Also Published As

Publication number Publication date
FR2372242A1 (fr) 1978-06-23
DE2653909A1 (de) 1978-06-01
BE855447A (fr) 1977-10-03

Similar Documents

Publication Publication Date Title
JPS5368995U (oth)
JPS5393669U (oth)
JPS5379945U (oth)
BG23468A1 (oth)
BG23506A1 (oth)
CH590040A5 (oth)
CH594961A5 (oth)
CH596359A5 (oth)
CH596513A5 (oth)
CH596619A5 (oth)
CH596843A5 (oth)
CH596965A5 (oth)
CH597574A5 (oth)
CH597879A5 (oth)
CH598212A5 (oth)
CH598521A5 (oth)
CH599197A5 (oth)
CH600082A5 (oth)
CH603277A5 (oth)
CH603303A5 (oth)
CH603419A5 (oth)
CH605241A5 (oth)
CH607382A5 (oth)
CH608969A5 (oth)
CH609567A5 (oth)

Legal Events

Date Code Title Description
ST Notification of lapse