BE855447A - Evaporateur thermique chauffe par le passage d'un courant, pour installations de metallisation sous vide - Google Patents

Evaporateur thermique chauffe par le passage d'un courant, pour installations de metallisation sous vide

Info

Publication number
BE855447A
BE855447A BE178243A BE178243A BE855447A BE 855447 A BE855447 A BE 855447A BE 178243 A BE178243 A BE 178243A BE 178243 A BE178243 A BE 178243A BE 855447 A BE855447 A BE 855447A
Authority
BE
Belgium
Prior art keywords
passing
current
thermal evaporator
vacuum metallization
evaporator heated
Prior art date
Application number
BE178243A
Other languages
English (en)
Original Assignee
Leybold Heraeus Gmbh & Co Kg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus Gmbh & Co Kg filed Critical Leybold Heraeus Gmbh & Co Kg
Publication of BE855447A publication Critical patent/BE855447A/fr

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Battery Electrode And Active Subsutance (AREA)
  • Sealing Battery Cases Or Jackets (AREA)
  • Physical Vapour Deposition (AREA)
BE178243A 1976-11-27 1977-06-07 Evaporateur thermique chauffe par le passage d'un courant, pour installations de metallisation sous vide BE855447A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19762653909 DE2653909A1 (de) 1976-11-27 1976-11-27 Durch stromdurchfluss beheizter thermischer verdampfer fuer vakuumaufdampfanlagen

Publications (1)

Publication Number Publication Date
BE855447A true BE855447A (fr) 1977-10-03

Family

ID=5994098

Family Applications (1)

Application Number Title Priority Date Filing Date
BE178243A BE855447A (fr) 1976-11-27 1977-06-07 Evaporateur thermique chauffe par le passage d'un courant, pour installations de metallisation sous vide

Country Status (3)

Country Link
BE (1) BE855447A (fr)
DE (1) DE2653909A1 (fr)
FR (1) FR2372242A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE374263T1 (de) * 1999-03-29 2007-10-15 Antec Solar Energy Ag Vorrichtung und verfahren zur beschichtung von substraten durch aufdampfen mittels eines pvd- verfahrens

Also Published As

Publication number Publication date
FR2372242B3 (fr) 1980-08-29
FR2372242A1 (fr) 1978-06-23
DE2653909A1 (de) 1978-06-01

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