FR2367315A1 - Dispositif de deplacement piezopneumatique - Google Patents

Dispositif de deplacement piezopneumatique

Info

Publication number
FR2367315A1
FR2367315A1 FR7630467A FR7630467A FR2367315A1 FR 2367315 A1 FR2367315 A1 FR 2367315A1 FR 7630467 A FR7630467 A FR 7630467A FR 7630467 A FR7630467 A FR 7630467A FR 2367315 A1 FR2367315 A1 FR 2367315A1
Authority
FR
France
Prior art keywords
piezo
cushion
aerostatic
displacement control
pneumatic displacement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7630467A
Other languages
English (en)
French (fr)
Other versions
FR2367315B1 (cs
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR7630467A priority Critical patent/FR2367315A1/fr
Publication of FR2367315A1 publication Critical patent/FR2367315A1/fr
Application granted granted Critical
Publication of FR2367315B1 publication Critical patent/FR2367315B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/028—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors along multiple or arbitrary translation directions, e.g. XYZ stages
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
    • H02N2/023—Inchworm motors

Landscapes

  • Control Of Position Or Direction (AREA)
FR7630467A 1976-10-11 1976-10-11 Dispositif de deplacement piezopneumatique Granted FR2367315A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7630467A FR2367315A1 (fr) 1976-10-11 1976-10-11 Dispositif de deplacement piezopneumatique

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7630467A FR2367315A1 (fr) 1976-10-11 1976-10-11 Dispositif de deplacement piezopneumatique

Publications (2)

Publication Number Publication Date
FR2367315A1 true FR2367315A1 (fr) 1978-05-05
FR2367315B1 FR2367315B1 (cs) 1980-09-26

Family

ID=9178574

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7630467A Granted FR2367315A1 (fr) 1976-10-11 1976-10-11 Dispositif de deplacement piezopneumatique

Country Status (1)

Country Link
FR (1) FR2367315A1 (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0085745A3 (en) * 1982-02-09 1986-03-19 Kabushiki Kaisha Toshiba Fine rotation mechanism

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0085745A3 (en) * 1982-02-09 1986-03-19 Kabushiki Kaisha Toshiba Fine rotation mechanism

Also Published As

Publication number Publication date
FR2367315B1 (cs) 1980-09-26

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Legal Events

Date Code Title Description
ST Notification of lapse