FR2363884A1 - Microsonde auger a balayage a ouverture de sortie axiale et variable - Google Patents
Microsonde auger a balayage a ouverture de sortie axiale et variableInfo
- Publication number
- FR2363884A1 FR2363884A1 FR7726363A FR7726363A FR2363884A1 FR 2363884 A1 FR2363884 A1 FR 2363884A1 FR 7726363 A FR7726363 A FR 7726363A FR 7726363 A FR7726363 A FR 7726363A FR 2363884 A1 FR2363884 A1 FR 2363884A1
- Authority
- FR
- France
- Prior art keywords
- variable output
- auger
- microsonde
- scan
- axial
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
- H01J49/46—Static spectrometers
- H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
- H01J49/482—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with cylindrical mirrors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Tubes For Measurement (AREA)
Abstract
L'invention concerne les microsondes Auger à balayge utilisant un analyseur à miroir cylindrique. L'analyseur à miroir cylindrique comporte un dispositif à ouverture de sortie variable monté à proximité du point de focalisation des électrons analysés et de la trace minimale de l'analyseur. Deux versions de ce dispositif sont proposées, l'une comportant trois ouvertures de diamètres différents, l'autre permettant de faire varier en continu l'ouverture de sortie.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US05/719,463 US4048498A (en) | 1976-09-01 | 1976-09-01 | Scanning auger microprobe with variable axial aperture |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2363884A1 true FR2363884A1 (fr) | 1978-03-31 |
FR2363884B1 FR2363884B1 (fr) | 1982-07-02 |
Family
ID=24890169
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7726363A Granted FR2363884A1 (fr) | 1976-09-01 | 1977-08-30 | Microsonde auger a balayage a ouverture de sortie axiale et variable |
Country Status (5)
Country | Link |
---|---|
US (1) | US4048498A (fr) |
JP (1) | JPS5919409B2 (fr) |
DE (1) | DE2717744C3 (fr) |
FR (1) | FR2363884A1 (fr) |
GB (1) | GB1561312A (fr) |
Families Citing this family (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4205226A (en) * | 1978-09-01 | 1980-05-27 | The Perkin-Elmer Corporation | Auger electron spectroscopy |
US4221971A (en) * | 1979-01-15 | 1980-09-09 | William Burger | Protective shield device |
US4476385A (en) * | 1979-11-26 | 1984-10-09 | Wunderlich Alan M | Utilizing gamma cameras for uptake studies |
US4489426A (en) * | 1981-12-23 | 1984-12-18 | General Electric Company | Collimator with adjustable aperture |
JPS6037644A (ja) * | 1983-08-10 | 1985-02-27 | Anelva Corp | 表面分析装置 |
GB8322017D0 (en) * | 1983-08-16 | 1983-09-21 | Vg Instr Ltd | Charged particle energy spectrometer |
JPS619145U (ja) * | 1984-06-20 | 1986-01-20 | アイダエンジニアリング株式会社 | グリツプ式トランスフア装置 |
DE3423149A1 (de) * | 1984-06-22 | 1986-01-02 | Fa. Carl Zeiss, 7920 Heidenheim | Verfahren und anordnung zur elektronenenergiegefilterten abbildung eines objektes oder eines objektbeugungsdiagrammes mit einem transmissions-elektronenmikroskop |
US4737639A (en) * | 1985-07-15 | 1988-04-12 | The Perkin-Elmer Corporation | Energy and analysis detection system for surface chemical analysis |
EP0236790B1 (fr) * | 1986-02-28 | 1990-10-17 | Siemens Aktiengesellschaft | Appareil de radiodiagnostic dentaire pour réaliser une tomographie panoramique de la machoîre d'un patient |
US4810880A (en) * | 1987-06-05 | 1989-03-07 | The Perkin-Elmer Corporation | Direct imaging monochromatic electron microscope |
US4806754A (en) * | 1987-06-19 | 1989-02-21 | The Perkin-Elmer Corporation | High luminosity spherical analyzer for charged particles |
US5118941A (en) * | 1991-04-23 | 1992-06-02 | The Perkin-Elmer Corporation | Apparatus and method for locating target area for electron microanalysis |
US5315113A (en) * | 1992-09-29 | 1994-05-24 | The Perkin-Elmer Corporation | Scanning and high resolution x-ray photoelectron spectroscopy and imaging |
US5444242A (en) * | 1992-09-29 | 1995-08-22 | Physical Electronics Inc. | Scanning and high resolution electron spectroscopy and imaging |
US5541410A (en) * | 1995-07-11 | 1996-07-30 | Board Of Regents, University Of Nebraska-Lincoln | Reduced diameter retractable cylindrical mirror analyzer |
US5602899A (en) | 1996-01-31 | 1997-02-11 | Physical Electronics Inc. | Anode assembly for generating x-rays and instrument with such anode assembly |
US6184523B1 (en) | 1998-07-14 | 2001-02-06 | Board Of Regents Of The University Of Nebraska | High resolution charged particle-energy detecting, multiple sequential stage, compact, small diameter, retractable cylindrical mirror analyzer system, and method of use |
JP2000106121A (ja) * | 1998-07-29 | 2000-04-11 | Jeol Ltd | 電子顕微鏡あるいはその類似装置 |
DE60143751D1 (de) * | 2000-04-24 | 2011-02-10 | Fei Co | Sammeln von sekundärelektronen durch die objektivl |
US7449682B2 (en) * | 2001-10-26 | 2008-11-11 | Revera Incorporated | System and method for depth profiling and characterization of thin films |
US6891158B2 (en) * | 2002-12-27 | 2005-05-10 | Revera Incorporated | Nondestructive characterization of thin films based on acquired spectrum |
US6800852B2 (en) * | 2002-12-27 | 2004-10-05 | Revera Incorporated | Nondestructive characterization of thin films using measured basis spectra |
US7561438B1 (en) | 2004-12-22 | 2009-07-14 | Revera Incorporated | Electronic device incorporating a multilayered capacitor formed on a printed circuit board |
US7411188B2 (en) * | 2005-07-11 | 2008-08-12 | Revera Incorporated | Method and system for non-destructive distribution profiling of an element in a film |
US20130112870A1 (en) * | 2011-11-04 | 2013-05-09 | Victor Gorelik | Hollow cylindrical analyzer |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1980492A (en) * | 1932-01-14 | 1934-11-13 | Zeiss Carl Fa | Diaphragm restricting the image field in apparatus for projection with transmitted light |
US2380216A (en) * | 1942-02-09 | 1945-07-10 | Eastman Kodak Co | Lens system |
DE2246270A1 (de) * | 1971-09-23 | 1973-03-29 | Ferranti Ltd | Vorrichtung zur bildung einer optischen oeffnung mit variabler flaeche |
US3805057A (en) * | 1971-03-22 | 1974-04-16 | Hitachi Ltd | Energy analyzer of coaxial cylindrical type |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2352043A (en) * | 1940-01-15 | 1944-06-20 | Ardenne Manfred Von | Diaphragm for electron optical apparatus |
US2806147A (en) * | 1954-03-30 | 1957-09-10 | Hoffman Electronics Corp | Shutters for atomic radiation detectors or the like |
US2852684A (en) * | 1955-12-22 | 1958-09-16 | Gen Electric | Adjustable slit mechanism |
US3699331A (en) * | 1971-08-27 | 1972-10-17 | Paul W Palmberg | Double pass coaxial cylinder analyzer with retarding spherical grids |
US3735128A (en) * | 1971-08-27 | 1973-05-22 | Physical Electronics Ind Inc | Field termination plate |
-
1976
- 1976-09-01 US US05/719,463 patent/US4048498A/en not_active Expired - Lifetime
-
1977
- 1977-04-21 DE DE2717744A patent/DE2717744C3/de not_active Expired
- 1977-05-11 GB GB19755/77A patent/GB1561312A/en not_active Expired
- 1977-08-30 FR FR7726363A patent/FR2363884A1/fr active Granted
- 1977-09-01 JP JP52105379A patent/JPS5919409B2/ja not_active Expired
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1980492A (en) * | 1932-01-14 | 1934-11-13 | Zeiss Carl Fa | Diaphragm restricting the image field in apparatus for projection with transmitted light |
US2380216A (en) * | 1942-02-09 | 1945-07-10 | Eastman Kodak Co | Lens system |
US3805057A (en) * | 1971-03-22 | 1974-04-16 | Hitachi Ltd | Energy analyzer of coaxial cylindrical type |
DE2246270A1 (de) * | 1971-09-23 | 1973-03-29 | Ferranti Ltd | Vorrichtung zur bildung einer optischen oeffnung mit variabler flaeche |
Non-Patent Citations (2)
Title |
---|
EXBK/70 * |
EXBK/75 * |
Also Published As
Publication number | Publication date |
---|---|
DE2717744A1 (de) | 1978-03-02 |
DE2717744C3 (de) | 1979-12-06 |
US4048498A (en) | 1977-09-13 |
GB1561312A (en) | 1980-02-20 |
JPS5330385A (en) | 1978-03-22 |
JPS5919409B2 (ja) | 1984-05-07 |
FR2363884B1 (fr) | 1982-07-02 |
DE2717744B2 (de) | 1979-04-05 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |