FR2338509B3 - - Google Patents
Info
- Publication number
- FR2338509B3 FR2338509B3 FR7701348A FR7701348A FR2338509B3 FR 2338509 B3 FR2338509 B3 FR 2338509B3 FR 7701348 A FR7701348 A FR 7701348A FR 7701348 A FR7701348 A FR 7701348A FR 2338509 B3 FR2338509 B3 FR 2338509B3
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/707—Chucks, e.g. chucking or un-chucking operations or structural details
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DD19086176A DD123848A1 (sv) | 1976-01-19 | 1976-01-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2338509A1 FR2338509A1 (fr) | 1977-08-12 |
| FR2338509B3 true FR2338509B3 (sv) | 1980-12-26 |
Family
ID=5503310
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR7701348A Granted FR2338509A1 (fr) | 1976-01-19 | 1977-01-18 | Procede et appareillage pour le positionnement a plans paralleles d'une plaque de semi-conducteur pour un cliche photographique |
Country Status (6)
| Country | Link |
|---|---|
| CS (1) | CS211450B1 (sv) |
| DD (1) | DD123848A1 (sv) |
| DE (1) | DE2701106A1 (sv) |
| FR (1) | FR2338509A1 (sv) |
| GB (1) | GB1536978A (sv) |
| SU (1) | SU750614A1 (sv) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DD151387A1 (de) | 1980-06-02 | 1981-10-14 | Erich Adler | Verfahren und vorrichtung zum automatischen transport und zur lageorientierung scheibenfoermiger objekte |
| CN109794427B (zh) * | 2019-02-03 | 2024-06-04 | 东莞市粤蒙电子科技有限公司 | 一种分选设备 |
-
1976
- 1976-01-19 DD DD19086176A patent/DD123848A1/xx unknown
-
1977
- 1977-01-04 CS CS6677A patent/CS211450B1/cs unknown
- 1977-01-12 DE DE19772701106 patent/DE2701106A1/de not_active Withdrawn
- 1977-01-12 SU SU772439404A patent/SU750614A1/ru active
- 1977-01-14 GB GB161577A patent/GB1536978A/en not_active Expired
- 1977-01-18 FR FR7701348A patent/FR2338509A1/fr active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| CS211450B1 (en) | 1982-02-26 |
| GB1536978A (en) | 1978-12-29 |
| FR2338509A1 (fr) | 1977-08-12 |
| SU750614A1 (ru) | 1980-07-23 |
| DE2701106A1 (de) | 1977-07-28 |
| DD123848A1 (sv) | 1977-01-19 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |