FR2325914B1 - - Google Patents

Info

Publication number
FR2325914B1
FR2325914B1 FR7628857A FR7628857A FR2325914B1 FR 2325914 B1 FR2325914 B1 FR 2325914B1 FR 7628857 A FR7628857 A FR 7628857A FR 7628857 A FR7628857 A FR 7628857A FR 2325914 B1 FR2325914 B1 FR 2325914B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7628857A
Other versions
FR2325914A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Kogaku KK filed Critical Nippon Kogaku KK
Publication of FR2325914A1 publication Critical patent/FR2325914A1/fr
Application granted granted Critical
Publication of FR2325914B1 publication Critical patent/FR2325914B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
FR7628857A 1975-09-26 1976-09-24 Ellipsometre spectroscopique pour la mesure des parametres de lumiere polarisee de longueur d'onde quelconque Granted FR2325914A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50115644A JPS5240388A (en) 1975-09-26 1975-09-26 Spectroscopic autoellipsometer

Publications (2)

Publication Number Publication Date
FR2325914A1 FR2325914A1 (fr) 1977-04-22
FR2325914B1 true FR2325914B1 (fr) 1978-10-20

Family

ID=14667734

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7628857A Granted FR2325914A1 (fr) 1975-09-26 1976-09-24 Ellipsometre spectroscopique pour la mesure des parametres de lumiere polarisee de longueur d'onde quelconque

Country Status (3)

Country Link
US (1) US4077720A (fr)
JP (1) JPS5240388A (fr)
FR (1) FR2325914A1 (fr)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57132039A (en) * 1981-02-09 1982-08-16 Hitachi Ltd Method for measuring carrier distribution
JPS58182518A (ja) * 1982-04-12 1983-10-25 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション エリプソメ−タ
JPS60120235A (ja) * 1983-12-02 1985-06-27 Hitachi Ltd 斜入射反射分光装置
US4672196A (en) * 1984-02-02 1987-06-09 Canino Lawrence S Method and apparatus for measuring properties of thin materials using polarized light
US4653924A (en) * 1984-06-12 1987-03-31 Victor Company Of Japan, Ltd. Rotating analyzer type ellipsometer
GB8916764D0 (en) * 1989-07-21 1989-09-06 Sambles John R Surface plasmon optical sensor
US5166752A (en) * 1990-01-11 1992-11-24 Rudolph Research Corporation Simultaneous multiple angle/multiple wavelength ellipsometer and method
GB2276938B (en) * 1993-04-05 1996-04-17 Univ Wales Optical apparatus
US5408322A (en) * 1993-04-26 1995-04-18 Materials Research Corporation Self aligning in-situ ellipsometer and method of using for process monitoring
DE4343490A1 (de) * 1993-12-20 1995-06-22 Max Planck Gesellschaft Schnelles spektroskopisches Ellipsometer
US5625455A (en) * 1995-06-06 1997-04-29 Board Of Regents, The University Of Texas System Rotating analyzer ellipsometer and ellipsometry technique
US5963326A (en) * 1996-11-25 1999-10-05 Masao; Katsuya Ellipsometer
US5838448A (en) * 1997-03-11 1998-11-17 Nikon Corporation CMP variable angle in situ sensor
US6618145B1 (en) * 2000-01-19 2003-09-09 The United States Of America As Represented By The Secretary Of The Air Force Spectroplarimetric reflectometer
CN102323464B (zh) * 2011-05-24 2013-07-24 黑龙江大学 三维空间任意庞加莱截平面的示波器显示电路
JP6466654B2 (ja) * 2014-04-24 2019-02-06 株式会社東芝 漏洩検出装置及び方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1203978B (de) * 1962-03-23 1965-10-28 Zeiss Carl Fa Spektralpolarimeter
JPS5010670B1 (fr) * 1970-04-16 1975-04-23
JPS5246828B2 (fr) * 1974-08-29 1977-11-28

Also Published As

Publication number Publication date
FR2325914A1 (fr) 1977-04-22
JPS5619576B2 (fr) 1981-05-08
US4077720A (en) 1978-03-07
JPS5240388A (en) 1977-03-29

Similar Documents

Publication Publication Date Title
FI760257A (fr)
AU495836B2 (fr)
JPS51140951U (fr)
DD122151A1 (fr)
CH582795A5 (fr)
BG22222A1 (fr)
BG22340A1 (fr)
BG22584A1 (fr)
BG22655A1 (fr)
BG22713A1 (fr)
BG22942A1 (fr)
BG23288A1 (fr)
CH576092A5 (fr)
CH584589A5 (fr)
CH584833A5 (fr)
CH587115A5 (fr)
CH587761A5 (fr)
CH588603A5 (fr)
CH589394A5 (fr)
CH589454A5 (fr)
CH590087A5 (fr)
CH592852A5 (fr)
CH595338A5 (fr)
CH595916A5 (fr)
CH596075A5 (fr)

Legal Events

Date Code Title Description
ST Notification of lapse