FR2322452B1 - - Google Patents

Info

Publication number
FR2322452B1
FR2322452B1 FR7626413A FR7626413A FR2322452B1 FR 2322452 B1 FR2322452 B1 FR 2322452B1 FR 7626413 A FR7626413 A FR 7626413A FR 7626413 A FR7626413 A FR 7626413A FR 2322452 B1 FR2322452 B1 FR 2322452B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7626413A
Other languages
French (fr)
Other versions
FR2322452A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Publication of FR2322452A1 publication Critical patent/FR2322452A1/fr
Application granted granted Critical
Publication of FR2322452B1 publication Critical patent/FR2322452B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/1478—Beam tilting means, i.e. for stereoscopy or for beam channelling
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/21—Means for adjusting the focus
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261—Details
    • H01J37/265—Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
FR7626413A 1975-09-01 1976-09-01 Microscope electronique Granted FR2322452A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7510276A NL7510276A (nl) 1975-09-01 1975-09-01 Elektronenmikroskoop.

Publications (2)

Publication Number Publication Date
FR2322452A1 FR2322452A1 (fr) 1977-03-25
FR2322452B1 true FR2322452B1 (de) 1980-12-12

Family

ID=19824390

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7626413A Granted FR2322452A1 (fr) 1975-09-01 1976-09-01 Microscope electronique

Country Status (6)

Country Link
JP (1) JPS5847825B2 (de)
CA (1) CA1061477A (de)
DE (1) DE2637753A1 (de)
FR (1) FR2322452A1 (de)
GB (1) GB1563014A (de)
NL (1) NL7510276A (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7804038A (nl) * 1978-04-17 1979-10-19 Philips Nv Elektronenmikroskoop.
JPS55121259A (en) * 1979-03-14 1980-09-18 Hitachi Ltd Elelctron microscope
DE69939309D1 (de) 1999-03-31 2008-09-25 Advantest Corp Teilchenstrahlgerät zur schrägen Beobachtung einer Probe

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL245866A (de) * 1958-11-29
JPS5623272B2 (de) * 1973-11-19 1981-05-29

Also Published As

Publication number Publication date
JPS5230154A (en) 1977-03-07
NL7510276A (nl) 1977-03-03
CA1061477A (en) 1979-08-28
DE2637753A1 (de) 1977-03-03
GB1563014A (en) 1980-03-19
FR2322452A1 (fr) 1977-03-25
JPS5847825B2 (ja) 1983-10-25

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Legal Events

Date Code Title Description
DR Decision of the appeal court due to an appeal at law against decisions of the director of the inpi, except decision of lapse
ST Notification of lapse