FR2308200B1 - - Google Patents
Info
- Publication number
- FR2308200B1 FR2308200B1 FR7539696A FR7539696A FR2308200B1 FR 2308200 B1 FR2308200 B1 FR 2308200B1 FR 7539696 A FR7539696 A FR 7539696A FR 7539696 A FR7539696 A FR 7539696A FR 2308200 B1 FR2308200 B1 FR 2308200B1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/04—Apparatus for manufacture or treatment
- H10P72/0402—Apparatus for fluid treatment
- H10P72/0418—Apparatus for fluid treatment for etching
- H10P72/0421—Apparatus for fluid treatment for etching for drying etching
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US56957575A | 1975-04-18 | 1975-04-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2308200A1 FR2308200A1 (fr) | 1976-11-12 |
| FR2308200B1 true FR2308200B1 (https=) | 1980-10-31 |
Family
ID=24275994
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR7539696A Granted FR2308200A1 (fr) | 1975-04-18 | 1975-12-24 | Installation de fabrication de semi-conducteurs et procede pour une telle fabrication |
Country Status (2)
| Country | Link |
|---|---|
| FR (1) | FR2308200A1 (https=) |
| GB (1) | GB1509135A (https=) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4183780A (en) * | 1978-08-21 | 1980-01-15 | International Business Machines Corporation | Photon enhanced reactive ion etching |
| WO1981000420A1 (en) * | 1979-08-09 | 1981-02-19 | Western Electric Co | High capacity etching apparatus |
| US4298443A (en) * | 1979-08-09 | 1981-11-03 | Bell Telephone Laboratories, Incorporated | High capacity etching apparatus and method |
| JPS6037188B2 (ja) * | 1981-08-27 | 1985-08-24 | 三菱マテリアル株式会社 | スパツタリング装置 |
| CN102359676B (zh) * | 2011-09-26 | 2015-12-09 | 常州捷佳创精密机械有限公司 | 一种槽底排水管道联接装置 |
-
1975
- 1975-12-24 FR FR7539696A patent/FR2308200A1/fr active Granted
-
1976
- 1976-03-18 GB GB10899/76A patent/GB1509135A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| FR2308200A1 (fr) | 1976-11-12 |
| GB1509135A (en) | 1978-04-26 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| CD | Change of name or company name | ||
| TP | Transmission of property | ||
| ST | Notification of lapse |