FR2304073A1 - Barre d' echantillonnage pour chambre a vide - Google Patents

Barre d' echantillonnage pour chambre a vide

Info

Publication number
FR2304073A1
FR2304073A1 FR7606864A FR7606864A FR2304073A1 FR 2304073 A1 FR2304073 A1 FR 2304073A1 FR 7606864 A FR7606864 A FR 7606864A FR 7606864 A FR7606864 A FR 7606864A FR 2304073 A1 FR2304073 A1 FR 2304073A1
Authority
FR
France
Prior art keywords
vacuum chamber
sampling bar
sampling
bar
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7606864A
Other languages
English (en)
French (fr)
Other versions
FR2304073B1 (US20110009641A1-20110113-C00185.png
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold Heraeus GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus GmbH filed Critical Leybold Heraeus GmbH
Publication of FR2304073A1 publication Critical patent/FR2304073A1/fr
Application granted granted Critical
Publication of FR2304073B1 publication Critical patent/FR2304073B1/fr
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L1/00—Enclosures; Chambers
    • B01L1/02—Air-pressure chambers; Air-locks therefor

Landscapes

  • Health & Medical Sciences (AREA)
  • Clinical Laboratory Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Physical Vapour Deposition (AREA)
FR7606864A 1975-03-12 1976-03-10 Barre d' echantillonnage pour chambre a vide Granted FR2304073A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2510683A DE2510683C3 (de) 1975-03-12 1975-03-12 Stabschleuse für Vakuumkammern

Publications (2)

Publication Number Publication Date
FR2304073A1 true FR2304073A1 (fr) 1976-10-08
FR2304073B1 FR2304073B1 (US20110009641A1-20110113-C00185.png) 1980-05-30

Family

ID=5941100

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7606864A Granted FR2304073A1 (fr) 1975-03-12 1976-03-10 Barre d' echantillonnage pour chambre a vide

Country Status (4)

Country Link
US (1) US4067697A (US20110009641A1-20110113-C00185.png)
DE (1) DE2510683C3 (US20110009641A1-20110113-C00185.png)
FR (1) FR2304073A1 (US20110009641A1-20110113-C00185.png)
GB (1) GB1490681A (US20110009641A1-20110113-C00185.png)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4532816A (en) * 1983-07-25 1985-08-06 The Perkin-Elmer Corporation Sample vessel
US4493287A (en) * 1982-12-03 1985-01-15 Northern Telecom Limited Diffusion equipment
US4811958A (en) * 1987-05-07 1989-03-14 North American Philips Corporation Sealed shafts moveable in vacuum chambers by exercising control from outside
US4834394A (en) * 1988-06-16 1989-05-30 North American Philip Corporation Sealed universal movement of a shaft extending between environments
JP3982844B2 (ja) * 1995-01-12 2007-09-26 株式会社日立国際電気 半導体製造装置及び半導体の製造方法
EP4032612A1 (en) * 2018-10-05 2022-07-27 kiutra GmbH System and method for inserting a sample into a chamber

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2602899A (en) * 1950-02-23 1952-07-08 Gen Electric Introduction of specimens into discharge vessels
DE901573C (de) * 1951-07-31 1954-01-14 Sueddeutsche Lab G M B H Stabschleuse zum Ein- und Ausschleusen von Objekten bei Korpuskularstrahlapparaten, insbesondere Elektronenmikroskopen
GB861151A (en) * 1958-05-15 1961-02-15 Tesla Np A device for inserting objects into evacuated chambers
US3162049A (en) * 1962-03-05 1964-12-22 American Cyanamid Co Sampler for reaction kettles and other vessels under pressure or vacuum
DE1937008A1 (de) * 1969-07-21 1971-01-28 Siemens Ag Vakuumapparatur fuer eine Vorrichtung zur Bearbeitung von Bauteilen
US3967127A (en) * 1975-07-03 1976-06-29 Gca Corporation Sample introducer

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3394679A (en) * 1966-12-05 1968-07-30 Dresser Ind Vacuum coating apparatus
GB1184356A (en) * 1967-05-10 1970-03-18 Norton Co Improvements in or relating to shaft feedthrough apparatus for vacuum coaters
GB1284262A (en) * 1968-09-09 1972-08-02 Unilever Ltd A device for passing a product between zones of different pressure
US3578969A (en) * 1968-11-25 1971-05-18 Electronic Associates Solid sample inlet system for a mass spectrometer

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2602899A (en) * 1950-02-23 1952-07-08 Gen Electric Introduction of specimens into discharge vessels
DE901573C (de) * 1951-07-31 1954-01-14 Sueddeutsche Lab G M B H Stabschleuse zum Ein- und Ausschleusen von Objekten bei Korpuskularstrahlapparaten, insbesondere Elektronenmikroskopen
GB861151A (en) * 1958-05-15 1961-02-15 Tesla Np A device for inserting objects into evacuated chambers
US3162049A (en) * 1962-03-05 1964-12-22 American Cyanamid Co Sampler for reaction kettles and other vessels under pressure or vacuum
DE1937008A1 (de) * 1969-07-21 1971-01-28 Siemens Ag Vakuumapparatur fuer eine Vorrichtung zur Bearbeitung von Bauteilen
US3967127A (en) * 1975-07-03 1976-06-29 Gca Corporation Sample introducer

Also Published As

Publication number Publication date
DE2510683C3 (de) 1979-08-16
DE2510683B2 (de) 1978-11-23
DE2510683A1 (de) 1976-09-23
FR2304073B1 (US20110009641A1-20110113-C00185.png) 1980-05-30
GB1490681A (en) 1977-11-02
US4067697A (en) 1978-01-10

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Legal Events

Date Code Title Description
ST Notification of lapse